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C Series Mass Flow Controller Model Files

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C Series Mass Flow Controller Model Files MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Mass Flow Controllers and Meters Mass Flow Controllers C-Series Compact, Ultrafast Mass Flow Controllers and Meters C Series Mass Flow Controller Model Files C Series Mass Flow Controller Model Files Modbus C-Series with 1/4 inch Tube Compression Fitting C-Series Modbus MFC, 1/4 inch Tube Compression Fitting C-Series Modbus MFM, 1/4 inch Tube Compression Fitting, Reduced Length C-Series Modbus MFM, 1/4 inch Tube Compression Fitting, Standard Length Modbus C-Series with 4 VCO Male Fittings C-Series Modbus MFC, 4 VCO Male Fitting C-Series Modbus MFM, 4 VCO Male Fitting, Reduced Length C-Series Modbus MFM, 4 VCO Male Fitting, Standard Length Modbus C-Series with 4 VCR Male Fittings C-Series Modbus MFC, 4 VCR Male Fitting C-Series Modbus MFM, 4 VCR Male Fitting, Reduced Length C-Series Modbus MFM, 4 VCR Male Fitting, Standard Length Modbus C-Series with C-seal Surface Mount C-Series Modbus MFC, C-seal Surface Mount C-Series Modbus MFM,C-seal Surface Mount Modbus C-Series with W-seal Surface Mount C-Series Modbus MFC, W-seal Surface Mount C-Series Modbus MFM,W-seal Surface Mount C-Series RS485 Analog with 1/4 inch Tube Compression Fittings C-Series RS485 Analog MFC, 1/4 inch Tube Compression Fitting C-Series RS485 Analog MFM, 1/4 inch Tube Compression Fitting, Reduced Length C-Series RS485 Analog MFM, 1/4 inch Tube Compression Fitting, Standard Length C-Series RS485 Analog with 4 VCO Male Fittings C-Series RS485 Analog MFC, 4 VCO Male Fitting C-Series RS485 Analog MFM, 4 VCO Male Fitting, Reduced Length C-Series RS485 Analog MFM, 4 VCO Male Fitting, Standard Length C-Series RS485 Analog with 4 VCR Male Fittings C-Series RS485 Analog MFC, 4 VCR Male Fitting C-Series RS485 Analog MFM, 4 VCR Male Fitting, Reduced Length C-Series RS485 Analog MFM, 4 VCR Male Fitting, Standard Length C-Series RS485 Analog with C-seal Surface Mount C-Series RS485 Analog MFC, C-seal Surface Mount C-Series RS485 Analog MFM,C-seal Surface Mount C-Series RS485 Analog with W-seal Surface Mount C-Series RS485 Analog MFC, W-seal Surface Mount C-Series RS485 Analog MFM,W-seal Surface Mount As noted above, there are two different sizes of the C-series MFM. The shorter one ("reduced length") eliminates the length occupied by an MFC control valve. "standard length" is the same fitting-to-fitting length as the C-Series MFC.

Subject to change without notice.

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