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MKS Business Units and Products

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MKS Business Units and Products MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Company Careers MKS Business Units and Products Business Units & Products

MKS enables technologies that transform our world. We deliver foundational technology solutions to leading edge semiconductor manufacturing, electronics and packaging, and specialty industrial applications. We apply our broad science and engineering capabilities to create instruments, subsystems, systems, process control solutions and specialty chemicals technology that improve process performance, optimize productivity and enable unique innovations for many of the world’s leading technology and industrial companies. We are organized in three divisions: Vacuum Solutions, Photonics Solutions and Materials Solutions.

Vacuum Solutions Division Automation & Control Solutions MKS provides advanced automation solutions including controllers and I/O devices, software and analytics for Industry 4.0 and smart factory automation, and custom control systems. The MKS automation portfolio enables advanced process control by providing EtherCAT® connectivity, programmable safety, multi-zone temperature control, edge analytics, and IoT/cloud connectivity.

Fiber-Optic Sensing Solutions MKS provides fiber-optic sensing solutions for high-precision measurement of temperature and position in extreme environments with high RF power, high temperature, vacuum, plasma and reactive gases. Our sensors provide access to more comprehensive data in environments where traditional electrical sensors are unreliable, while our probes help achieve the highest measurement accuracy and repeatability over a wide temperature range.

Flow Solutions MKS provides gas flow and delivery products including mass flow controllers, mass flow meters, and in-situ mass flow verifiers to precisely measure and control gas flow. Upstream pressure controllers with integrated mass flow meters provide pressure measurement and control while monitoring mass flow rates for critical process applications. MKS flow ratio controllers accurately and repeatedly divide gas flows into precise flow streams.

Gas Analysis MKS provides gas analysis solutions for real-time vacuum quality control, contamination detection, process monitoring, and compositional analysis. Products offered include residual gas analyzers (RGAs), process RGA systems, atmospheric pressure mass spectrometers, and optical gas analyzers. MKS also offers flexible and scalable software platforms to leverage sensor data and enable powerful process optimization and monitoring capabilities for advanced manufacturing environments.

Plasma & Reactive Gas Solutions MKS provides remote plasma systems (RPS) and ozone generators that create reactive gas species. Our RPS systems generate fluorine, oxygen, and hydrogen radicals and our Cleanline® Foreline Plasma Clean System generates radicals from gases containing oxygen and fluorine. Our ozone generators produce ultra-pure, high concentration ozone gas from oxygen. Our dissolved gas delivery systems supply ozonated water, dissolved CO2, and dissolved NH3. In addition, microwave plasma delivery subsystems are available in 1.8 or 3 kW and provide safe delivery of radical species to the wafer.

Power Solutions MKS provides high reliability radio frequency (RF) and microwave power delivery systems, providing energy to various etching, stripping, and deposition processes. Our RF generators deliver solid state power from low to very high frequencies (VHF) and combined with our Impedance Matching Network provide a complete RF delivery system. Our industrial microwave generators and systems generate power levels from 1 to 75 kW and are adaptable to a wide range of applications.

Pressure & Vacuum Control Solutions MKS Baratron® capacitance manometers provide highly accurate and repeatable direct pressure measurement and are insensitive to gas composition. In addition, MKS has a wide range of indirect pressure sensors, transducers and modules that use hot and cold cathode, Piezo and Pirani gauge technologies. These products measure pressure in corrosive and noncorrosive environments over 14 decades of range from above atmospheric to ultra-high vacuum.

Valves & Integrated Process Solutions MKS provides a variety of vacuum valves including butterfly valves for pressure control, isolation valves and gate valves. Heated and unheated configurations are available as well as specialty valves for high cycle count and highly corrosive environments. In addition, MKS provides integrated vacuum solutions including effluent management with heater jackets and controllers, process traps, virtual walls, and integrated vacuum measurement and control assemblies .

Photonics Solutions Division Instruments, Motion, Components & Vibration Control MKS provides a wide range of high precision motion control products including linear and rotation stages, hexapods, controllers, Piezos and industrial OEM sub-assemblies. Our vibration isolation solutions, specialized light sources, laser power measurement and beam characterization instruments, optical to electrical converters, solar simulators and laser diode control are used in photonics applications. Products used to mount, position, or support optical components and systems are also part of the MKS offering.

Lasers MKS develops and manufactures advanced pulsed and continuous wave diode-pumped solid-state, fiber and hybrid fiber lasers for precision applications. Pulse widths span nanosecond, picosecond, and femtosecond, and wavelengths range from infrared and visible to the ultraviolet.

Optical Components, IR Assemblies & Integrated Solutions MKS provides precision optical components and complex lens assemblies across the infrared, visible and ultraviolet spectrum. In addition to custom subsystem solutions, products include optical filters, thin film coatings, high performance gratings, replicated mirrors including free-form designs, windows, spherical, aspherical, cylindrical, and free-form lenses, laser optics, refractive, reflective, catadioptric optical assemblies on a build-to-print or build-to-spec basis, and off-the-shelf high-performance IR thermal imaging lenses including continuous zoom lenses.

Laser-based PCB Manufacturing Systems MKS provides laser systems for the creation of blind micro vias necessary for the manufacturing of printed circuit boards (flexible, rigid-flexible, multi-layer, and high-density interconnect PCBs) and package substrates. MKS solutions help manufacturers optimize production of the materials, components and systems that are an integral part of the electronic devices in use today. They deliver greater flexibility and a higher degree of processing control, enabling customers to incorporate a wider range of materials into their production processes.

Materials Solutions Division Specialty Chemicals, Equipment & Software for PCB, Package Substrate & Wafer Manufacturing MKS provides advanced chemical processes, production equipment, and software solutions for the manufacturing of printed circuit boards (flexible, rigid-flexible, multi-layer, and high-density interconnect PCBs), package substrates, connectors, lead frames, and wafers used in smartphones, computers, other consumer electronics, server and data centers, automotive electronics, medical, and industrial industries.

Specialty Chemicals & Equipment for Decorative & Functional Surface Finishing MKS provides advanced chemical processes and production equipment for decorative and functional surface finishing including decorative, corrosion-protective, and wear-resistant coatings for automotive, construction, energy, household appliance and heavy machinery industries. We also provide chemical processes for paint applications including pretreatment, stripping and overspray treatment for automotive and household appliances and related industries.

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