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Ozone Gas Generators

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Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Plasma and Reactive Gas Solutions Ozone Generators & Systems Ozone Gas Generators Ozone Gas Generators SEMOZON® Ozone gas generators and subsystems are the industry standard for compact, high concentration, ultra-clean ozone gas generation. Applications include Atomic Layer Deposition (ALD), Atomic Layer Etch (ALE), Chemical Vapor Deposition (CVD) and Wet Cleaning.

Ozone Gas Generators SEMOZON® Ozone gas generators and subsystems are the industry standard for compact, high concentration, ultra-clean ozone gas generation. Applications include Atomic Layer Deposition (ALD), Atomic Layer Etch (ALE), Chemical Vapor Deposition (CVD) and Wet Cleaning.

Showing 3 products in 3 families Show Filters:  Filter Products Showing 3 products in 3 families View:  Filter by: Flow Rate 2.5 - 50 slm 1 5 - 40 slm 1 5 - 80 slm 1 Ozone Output 3"/> 3" value=""/> up to 335 g/Nm3 2 3 (27.1 wt%)"/> 3 (27.1 wt%)" value=""/> up to 425 g/Nm3 (27.1 wt%) 1 Pressure 20 - 50 psig 2 20 - 30 psig 1 AX8415 Ultra High Concentration, High Flow Ozone Generator Ozone concentration up to 425 g/Nm3 or 27.1 wt% at 5°C @ 2.5 slm O2 flow rate from 2.5 slm to 50 slm enables process flexibility Patented cell design enables production of high concentration ozone 1 Products AX8415 Ultra High Concentration, High Flow Ozone Generator 1 Products AX8410 PRIME High Concentration, Ultra High Flow Ozone Generator Ozone concentration up to 375 g/Nm3 or 24.2 wt% at 5°C O2 flow rate from 5 slm to 80 slm enables process flexibility Patented cell structure design improves gap uniformity to enable production of high concentration ozone 1 Products AX8410 PRIME High Concentration, Ultra High Flow Ozone Generator 1 Products AX8407 High Flow Ozone Generator Ozone concentration up to 335 g/Nm3 or 21.7 wt% at 5°C O2 flow rate from 5 slm to 40 slm enables process flexibility Patented cell structure design enables production of high concentration ozone 1 Products AX8407 High Flow Ozone Generator 1 Products Need help? Contact an Applications Specialist by sending us an email

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