MKS Vacuum Isolation Valves

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Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Pressure Controllers and Valves Valves Vacuum Isolation Valves Vacuum Isolation Valves MKS is a leader in high reliability vacuum isolation valves. Our vacuum isolation valves includes bellows sealed valves, ball valves, soft start dual-stage valves, and safety shut off valves. These are available in a wide array of configurations including manual, pneumatic, and electromagnetic actuators. Vacuum Isolation Valves MKS is a leader in high reliability vacuum isolation valves. Our vacuum isolation valves includes bellows sealed valves, ball valves, soft start dual-stage valves, and safety shut off valves. These are available in a wide array of configurations including manual, pneumatic, and electromagnetic actuators. Showing 86 products in 19 families Show Filters:  Filter Products Showing 86 products in 19 families View:  Filter by: Type 2-way Ball Valve 14 Compact Valve 10 Low-profile, Single-stage, Bellows-sealed Poppet Valve 10 Safety Valve 10 In Situ Diagnostic Access Valve 8 Vacuum Isolation Valve 6 Electromagnetic Valve 5 Ultra-high Vacuum Valve 5 3-way Ball Valve 4 Check Valve 2 Standard Vacuum Valve 2 2-Stage Valve 1 2-stage, Low-profile Valve 1 Corrosion & Ozone Resistant Valve 1 Heated 2-way Ball Valve 1 High Cycle Valve 1 High Flow Valve 1 Rapid Isolation Valve 1 Single-stage, Low-profile Valve 1 Soft-start Valve 1 Port Size NW40 23 NW50 19 NW25 17 1.0 in. 11 0.75 in. 8 NW100 6 NW80 5 NW16 4 NW63 4 NW160 3 .75 in. 2 1.5 in. 2 NW200 1 NW250 1 Body Configuration Angle 40 Inline 24 Left-handed 4 Right-handed 4 Offset Inline 2 Flange Type ISO-KF 55 ISO-MF 10 Tube 9 CF 6 2.75 in. CF 4 ISO-KF NW16 2 ISO-KF NW25 2 VCR 2 KF100 1 KF40 1 KF50 1 Actuation Pneumatic 29 Manual 24 Electromagnetic, Normally Closed 5 Pneumatic, Normally Closed 5 Pneumatic, Normally Closed with Limit Switch 2 Pneumatic, Normally Open 2 Thumb Screw 2 24 VDC solenoid 1 Electromagnetic, Normally Open 1 Manual Rotary Knob 1 Manual Toggle 1 Micometer Head 1 Micrometer Head 1 LoPro™ Bellows Vacuum Isolation Valves NW25 - NW50 HV pump and line isolation applications 1,000,000 cycle rating (clean environments) 11 Products  Show Top Products Compare Description Avail. Price Qty. LPV1 Vacuum Isolation Valve, Single Stage, Low Profile Contact Us Loading... Quote LPV1 Vacuum Isolation Valve, Single Stage, Low Profile Contact Us Quote LPV1-40-AK-CNVS Poppet Valve, LoPro, NW40 ISO-KF, Angle Ports, Viton Seals, Pneumatic 15 Weeks Loading... Quote LPV1-40-AK-CNVS Poppet Valve, LoPro, NW40 ISO-KF, Angle Ports, Viton Seals, Pneumatic 15 Weeks Quote LPV1-40-AK-MNVN Poppet Valve, LoPro, NW40 ISO-KF, Angle Ports, Viton Seals, Manual 15 Weeks Loading... Quote LPV1-40-AK-MNVN Poppet Valve, LoPro, NW40 ISO-KF, Angle Ports, Viton Seals, Manual 15 Weeks Quote LPV1-40-IK-CNVS Poppet Valve, LoPro, NW40 ISO-KF, Inline Ports, Viton Seals, Pneumatic 15 Weeks Loading... Quote LPV1-40-IK-CNVS Poppet Valve, LoPro, NW40 ISO-KF, Inline Ports, Viton Seals, Pneumatic 15 Weeks Quote LPV1-40-IK-MNVN Poppet Valve, LoPro, NW40 ISO-KF, Inline Ports, Viton Seals, Manual 15 Weeks Loading... Quote LPV1-40-IK-MNVN Poppet Valve, LoPro, NW40 ISO-KF, Inline Ports, Viton Seals, Manual 15 Weeks Quote Viewing5 of 11 Products | View All 11 Products LoPro™ Bellows Vacuum Isolation Valves 11 Products LoPro™ Soft-start Bellows Vacuum Isolation Valves NW25 - NW50 Two-stage with adjustable conductance for variable pump down speed 1,000,000 cycle rating (clean environments) 1 Products LoPro™ Soft-start Bellows Vacuum Isolation Valves 1 Products Cv™ Compact Bellows Vacuum Isolation Valves NW10 - NW25 or VCR HV gauge isolation, roughing, bypass or venting 1,000,000 cycle rating (clean environments) 10 Products  Show Top Products Compare Description Avail. Price Qty. CV Compact Vacuum Valve, Inline Body Configuration Contact Us Loading... Quote CV Compact Vacuum Valve, Inline Body Configuration Contact Us Quote CV16-K1K1-NCVV Vacuum Isolation Valve, Cv, NW16 ISO-KF, Angle Ports, Viton, Pneumatic 15 Weeks Loading... Quote CV16-K1K1-NCVV Vacuum Isolation Valve, Cv, NW16 ISO-KF, Angle Ports, Viton, Pneumatic 15 Weeks Quote CV16-K1K1-MKKVV Vacuum Isolation Valve, Cv, NW16 ISO-KF, Angle Ports, Viton, Manual 15 Weeks Loading... Quote CV16-K1K1-MKKVV Vacuum Isolation Valve, Cv, NW16 ISO-KF, Angle Ports, Viton, Manual 15 Weeks Quote CVNL-K1-NCVV Vacuum Isolation Valve, Cv, NW16 ISO-KF, Inline Ports, Viton, Pneumatic 15 Weeks Loading... Quote CVNL-K1-NCVV Vacuum Isolation Valve, Cv, NW16 ISO-KF, Inline Ports, Viton, Pneumatic 15 Weeks Quote CVNL-K1-MKKVV Vacuum Isolation Valve, Cv, NW16 ISO-KF, Inline Ports, Viton, Manual 15 Weeks Loading... Quote CVNL-K1-MKKVV Vacuum Isolation Valve, Cv, NW16 ISO-KF, Inline Ports, Viton, Manual 15 Weeks Quote Viewing5 of 10 Products | View All 10 Products Cv™ Compact Bellows Vacuum Isolation Valves 10 Products CRV Corrosion Resistant Vacuum Isolation Valves NW40 - NW50, custom sizes available Designed for use in harsh environments Shield keeps reactive and corrosive gases from contacting bellows 1 Products CRV Corrosion Resistant Vacuum Isolation Valves 1 Products HCV High-cycle Bellows Vacuum Isolation Valves NW25 - NW50 HV load lock pumping or high cycle applications 10,000,000 cycle rating (clean environments) 1 Products HCV High-cycle Bellows Vacuum Isolation Valves 1 Products ECv Electric Bellows Vacuum Isolation Valves NW10 - NW25 or VCR Electric actuation applications (12 VDC or 24 VDC) 1,000,000 cycle rating (clean environments) 5 Products  Show Top Products Compare Description Avail. Price Qty. ECV Vacuum Isolation Valve, Compact, Bellows Sealed Contact Us Loading... Quote ECV Vacuum Isolation Valve, Compact, Bellows Sealed Contact Us Quote CVNL-K2-ECLVV-24DC Vacuum Isolation Valve, Compact, NW25 ISO-KF, Inline, Viton, 24 VDC Solenoid 15 Weeks Loading... Quote CVNL-K2-ECLVV-24DC Vacuum Isolation Valve, Compact, NW25 ISO-KF, Inline, Viton, 24 VDC Solenoid 15 Weeks Quote CV16-K1K1-ECLVV-24DC Vacuum Isolation Valve, Compact, NW16 ISO-KF, Angle, Viton, 24 VDC Solenoid 15 Weeks Loading... Quote CV16-K1K1-ECLVV-24DC Vacuum Isolation Valve, Compact, NW16 ISO-KF, Angle, Viton, 24 VDC Solenoid 15 Weeks Quote CVNL-K1-ECLVV-24DC Vacuum Isolation Valve, Compact, NW16 ISO-KF, Inline, Viton, 24 VDC Solenoid 15 Weeks Loading... Quote CVNL-K1-ECLVV-24DC Vacuum Isolation Valve, Compact, NW16 ISO-KF, Inline, Viton, 24 VDC Solenoid 15 Weeks Quote CV25-K2K2-ECLVV-24DC Vacuum Isolation Valve, Compact, NW25 ISO-KF, Angle, Viton, 24 VDC Solenoid 15 Weeks Loading... Quote CV25-K2K2-ECLVV-24DC Vacuum Isolation Valve, Compact, NW25 ISO-KF, Angle, Viton, 24 VDC Solenoid 15 Weeks Quote Viewing5 of 5 Products | View All 5 Products ECv Electric Bellows Vacuum Isolation Valves 5 Products UHV Ultra-high Vacuum Isolation Valves NW25 - NW40 Ultra-high vacuum system applications Metal bonnet seal limits outgassing and permeation for a lower base pressure 5 Products  Show Top Products Compare Description Avail. Price Qty. UHV Vacuum Isolation Valve, Ultra-high Vacuum Contact Us Loading... Quote UHV Vacuum Isolation Valve, Ultra-high Vacuum Contact Us Quote UHV-25-ACC-ELVN UHV Isolation Valve, NW25, 2.75 in., Angle Ports, Viton/Copper, Pneumatic 15 Weeks Loading... Quote UHV-25-ACC-ELVN UHV Isolation Valve, NW25, 2.75 in., Angle Ports, Viton/Copper, Pneumatic 15 Weeks Quote UHV-40-ACC-ELVN UHV Isolation Valve, NW40, 2.75 in. CF, Angle Ports, Viton/Copper, Pneumatic 15 Weeks Loading... Quote UHV-40-ACC-ELVN UHV Isolation Valve, NW40, 2.75 in. CF, Angle Ports, Viton/Copper, Pneumatic 15 Weeks Quote UHV-40-ACC-EMVM UHV Isolation Valve, NW40, 2.75 in. CF, Angle Ports, Viton/Copper, Manual 15 Weeks Loading... Quote UHV-40-ACC-EMVM UHV Isolation Valve, NW40, 2.75 in. CF, Angle Ports, Viton/Copper, Manual 15 Weeks Quote UHV-40-ICC-ELVN UHV Isolation Valve, NW40, 2.75 in. CF, Inline Ports, Viton/Copper, Pneumatic 15 Weeks Loading... Quote UHV-40-ICC-ELVN UHV Isolation Valve, NW40, 2.75 in. CF, Inline Ports, Viton/Copper, Pneumatic 15 Weeks Quote Viewing5 of 5 Products | View All 5 Products UHV Ultra-high Vacuum Isolation Valves 5 Products High Vacuum Ball Valves NW16 - NW100 Designed with straight-through flow paths and less sensitive to contamination 2-way and 3-way ports 18 Products  Show Top Products Compare Description Avail. Price Qty. 100015777 High Vacuum Ball Valve, 2-way, Manual, NW40 Port, ISO-KF Flange 15 Weeks Loading... Quote 100015777 High Vacuum Ball Valve, 2-way, Manual, NW40 Port, ISO-KF Flange 15 Weeks Quote 100015778 High Vacuum Ball Valve, 2-way, Pneumatic, NW40 Port, ISO-KF Flange 15 Weeks Loading... Quote 100015778 High Vacuum Ball Valve, 2-way, Pneumatic, NW40 Port, ISO-KF Flange 15 Weeks Quote 100015828 High Vacuum Ball Valve, 2-way, Manual, NW16 Port, ISO-KF Flange Contact Us Loading... Quote 100015828 High Vacuum Ball Valve, 2-way, Manual, NW16 Port, ISO-KF Flange Contact Us Quote 100015830 High Vacuum Ball Valve, 2-way, Pneumatic, NW16 Port, ISO-KF Flange 15 Weeks Loading... Quote 100015830 High Vacuum Ball Valve, 2-way, Pneumatic, NW16 Port, ISO-KF Flange 15 Weeks Quote 100015831 High Vacuum Ball Valve, 2-way, Manual, NW25 Port, ISO-KF Flange 15 Weeks Loading... Quote 100015831 High Vacuum Ball Valve, 2-way, Manual, NW25 Port, ISO-KF Flange 15 Weeks Quote Viewing5 of 18 Products | View All 18 Products High Vacuum Ball Valves 18 Products Jalapeño Heated Vacuum Isolation Valves Maintains optimal valve conductance ensuring materials don’t solidify and clog the system Actuator thermal barrier design improves internal thermal performance and reduces external temperature to safe touch levels Formed bellows-sealed poppet valve reduces particle trapping resulting in high cycle life 1 Products Jalapeño Heated Vacuum Isolation Valves 1 Products Heated Vacuum Isolation Ball Valves KF 40 and KF 50 Designed with straight-through flow paths and less sensitive to contamination Designed for heated use up to 150°C 1 Products Heated Vacuum Isolation Ball Valves 1 Products 150/160 Series Bellows Vacuum Isolation Valves NW16 - NW160 Designed to ensure product quality, reliability, and value Dual acting pneumatic operation available in select sizes 7 Products  Show Top Products Compare Description Avail. Price Qty. 150-160-VALVE Vacuum Isolation Valve, Single-Stage, Bellows-Sealed Contact Us Loading... Quote 150-160-VALVE Vacuum Isolation Valve, Single-Stage, Bellows-Sealed Contact Us Quote 152-0016K Vacuum Valve, Pneumatic, Angle, ISO NW16 Flanges 15 Weeks Loading... Quote 152-0016K Vacuum Valve, Pneumatic, Angle, ISO NW16 Flanges 15 Weeks Quote 152-0025K Vacuum Valve, Pneumatic, Angle, ISO NW25 Flanges 15 Weeks Loading... Quote 152-0025K Vacuum Valve, Pneumatic, Angle, ISO NW25 Flanges 15 Weeks Quote 152-0040K Vacuum Valve, Angle, Pneumatic, ISO NW40 Flanges 15 Weeks Loading... Quote 152-0040K Vacuum Valve, Angle, Pneumatic, ISO NW40 Flanges 15 Weeks Quote 161-0025K Vacuum Valve, Inline, Manual, ISO NW25 Flanges Contact Us Loading... Quote 161-0025K Vacuum Valve, Inline, Manual, ISO NW25 Flanges Contact Us Quote Viewing5 of 7 Products | View All 7 Products 150/160 Series Bellows Vacuum Isolation Valves 7 Products V-100 Bellows Vacuum Isolation Valves NW100 Designed to ensure product quality, reliability, and value Spring-closed, air-open 1 Products V-100 Bellows Vacuum Isolation Valves 1 Products 150/160 Series Soft-start Bellows Vacuum Isolation Valves NW25 - NW100 Two-stage with adjustable conductance for variable pump down speed Designed to ensure product quality, reliability, and value 1 Products 150/160 Series Soft-start Bellows Vacuum Isolation Valves 1 Products IDA™ In Situ Diagnostic Access Isolation Valves NW16 or VCR Dual-valve design provides safe and controlled reference port access Multi-function capability with direct access to process chamber for leak checks 8 Products  Show Top Products Compare Description Avail. Price Qty. IDA-LEV Diagnostic Access Valve, In Situ, Left-handed, Viton Seal, Viton Nosepiece Contact Us Loading... Quote IDA-LEV Diagnostic Access Valve, In Situ, Left-handed, Viton Seal, Viton Nosepiece Contact Us Quote IDA-LEZ Diagnostic Access Valve, In Situ, Left-handed, Chemraz Seal, Chemraz Nosepiece Contact Us Loading... Quote IDA-LEZ Diagnostic Access Valve, In Situ, Left-handed, Chemraz Seal, Chemraz Nosepiece Contact Us Quote IDA-LMV Diagnostic Access Valve, In Situ, Left-handed, Copper Seal, Viton Nosepiece Contact Us Loading... Quote IDA-LMV Diagnostic Access Valve, In Situ, Left-handed, Copper Seal, Viton Nosepiece Contact Us Quote IDA-LMZ Diagnostic Access Valve, In Situ, Left-handed, Copper Seal, Chemraz Nosepiece Contact Us Loading... Quote IDA-LMZ Diagnostic Access Valve, In Situ, Left-handed, Copper Seal, Chemraz Nosepiece Contact Us Quote IDA-REZ Diagnostic Access Valve, In Situ, Right-handed, Chemraz Seal, Chemraz Nosepiece Contact Us Loading... Quote IDA-REZ Diagnostic Access Valve, In Situ, Right-handed, Chemraz Seal, Chemraz Nosepiece Contact Us Quote Viewing5 of 8 Products | View All 8 Products IDA™ In Situ Diagnostic Access Isolation Valves 8 Products HFV High Flow, High Conductance Vacuum Valves Edge welded bellows provide maximum stroke length with high conductance Bellows-sealed poppet ensures a minimum of 1,000,000 cycles 304 stainless steel body, heatable to 160°C 1 Products HFV High Flow, High Conductance Vacuum Valves 1 Products ILP Integrated Soft-start Vacuum Isolation Valves NW25 - NW50 Compact design with two valves in one compact body 1,000,000 cycles (clean environments) 1 Products ILP Integrated Soft-start Vacuum Isolation Valves 1 Products Rapid Vacuum Isolation Valves NW16 - NW160 Protects vacuum system from particles and turbulence during pump failure 1 Products Rapid Vacuum Isolation Valves 1 Products 225 Auto-Soft Flow Actuated Check Valves NW40 - NW50 Operates automatically without electrical or other external power Reduces particulate contamination by reducing system turbulence during venting 2 Products  Show Top Products Compare Description Avail. Price Qty. 225-0040 Check Valve, Flow Actuated, NW40 Size, Auto-Soft 15 Weeks Loading... Quote 225-0040 Check Valve, Flow Actuated, NW40 Size, Auto-Soft 15 Weeks Quote 225-0050 Check Valve, Flow Actuated, NW50 Size, Auto-Soft 15 Weeks Loading... Quote 225-0050 Check Valve, Flow Actuated, NW50 Size, Auto-Soft 15 Weeks Quote Viewing2 of 2 Products | View All 2 Products 225 Auto-Soft Flow Actuated Check Valves 2 Products 145 Vacuum Sentry® Safety Isolation Valves NW25 - NW50 Protects vacuum system from oil back streaming in the event of power failure Enables quick system restarts by venting the pump to atmosphere 10 Products  Show Top Products Compare Description Avail. Price Qty. 145 Safety Valve, Vacuum Sentry, Pump Failure Protection Contact Us Loading... Quote 145 Safety Valve, Vacuum Sentry, Pump Failure Protection Contact Us Quote 145-0025K-24VDC Vacuum Safety Valve, ISO-KF Flanges, NW25 Angle Ports, Viton Seals, 24VDC Contact Us Loading... Quote 145-0025K-24VDC Vacuum Safety Valve, ISO-KF Flanges, NW25 Angle Ports, Viton Seals, 24VDC Contact Us Quote 145-0025K-120V/60 Vacuum Safety Valve, ISO-KF Flanges, NW25 Angle Ports, Viton Seals, 120 VAC/60 Hz 15 Weeks Loading... Quote 145-0025K-120V/60 Vacuum Safety Valve, ISO-KF Flanges, NW25 Angle Ports, Viton Seals, 120 VAC/60 Hz 15 Weeks Quote 145-0025K-220V/50-60 Vacuum Safety Valve, ISO-KF Flanges, NW25 Angle Ports, Viton Seals, 220 VAC/50-60 Hz Contact Us Loading... Quote 145-0025K-220V/50-60 Vacuum Safety Valve, ISO-KF Flanges, NW25 Angle Ports, Viton Seals, 220 VAC/50-60 Hz Contact Us Quote 145-0040K-120V/60 Vacuum Safety Valve, ISO-KF Flanges, NW40 Angle Ports, Viton Seals, 120 VAC/60 Hz Contact Us Loading... Quote 145-0040K-120V/60 Vacuum Safety Valve, ISO-KF Flanges, NW40 Angle Ports, Viton Seals, 120 VAC/60 Hz Contact Us Quote Viewing5 of 10 Products | View All 10 Products 145 Vacuum Sentry® Safety Isolation Valves 10 Products  MKS Isolation Valve Spares & Kits  How to Rebuild an Isolation Valve (8:04) Need help? Contact an Applications Specialist by sending us an email

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