General Purpose 10 sccm to 20 slm Mass Flow Controller

General Purpose 10 sccm to 20 slm Mass Flow Controller MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Mass Flow Controllers & Meters Mass Flow Controllers Legacy Mass Flow Controllers 1179C General Purpose, Elastomer Sealed 10-20,000 sccm Mass Flow Controller Print General Purpose 10 to 20,000 sccm Mass Flow Controller with Elastomer Seals General Purpose 10 to 20,000 sccm Mass Flow Controller with Elastomer Seals Products Configuration Options Features Accessories Resources Contact Us Overview

The 1179C is a general purpose mass flow controller designed to measure and control the flow of gases in a wide variety of applications. The 1179 Mass-Flo® controllers are available with Full Scale ranges from 10 sccm to 20 slm, providing fast, repeatable flow control to as low as 0.2 sccm. It can also be used as a pressure controller when connected to a suitable pressure transducer.

Flow ranges from 10 sccm to 20 slm Patented sensor design provides exceptional zero stability Fast warm-up time minimizes expensive production downtime Compatible with earlier MKS MFC and power supply/readout modules See All Features Products Show Filters:  View all products Compare Description Compatibility sortOrder rankScore ranking Drawings, CAD & Specs Full Scale Flow Range Seal Material Fitting Type Availability Featured Item Price Brand 1179C01311CR1BV
Loading... Quote Loading... Mass Flow Controller, 10 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal 14 Weeks 1179C01311CR1BV Mass Flow Controller, 10 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal UNIVERSAL 0.0 1.0 0.0 0.0 10 sccm Viton 4 VCR male 14 Weeks Loading... Quote Loading... 1179C01311CS1BV
Loading... Quote Loading... Mass Flow Controller, 10 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal 14 Weeks 1179C01311CS1BV Mass Flow Controller, 10 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal UNIVERSAL 0.0 1.0 0.0 0.0 10 sccm Viton 0.25 in. tube 14 Weeks Loading... Quote Loading... 1179C01312CR1BV
Loading... Quote Loading... Mass Flow Controller, 100 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal 14 Weeks 1179C01312CR1BV Mass Flow Controller, 100 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal UNIVERSAL 0.0 1.0 0.0 0.0 100 sccm Viton 4 VCR male 14 Weeks Loading... Quote Loading... 1179C01312CS1BV
Loading... Quote Loading... Mass Flow Controller, 100 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal 14 Weeks 1179C01312CS1BV Mass Flow Controller, 100 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal UNIVERSAL 0.0 1.0 0.0 0.0 100 sccm Viton 0.25 in. tube 14 Weeks Loading... Quote Loading... 1179C01313CR1BV
Loading... Quote Loading... Mass Flow Controller, 1000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal 14 Weeks 1179C01313CR1BV Mass Flow Controller, 1000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal UNIVERSAL 0.0 1.0 0.0 0.0 1000 sccm Viton 4 VCR male 14 Weeks Loading... Quote Loading... 1179C01313CS1BV
Loading... Quote Loading... Mass Flow Controller, 1000 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal 14 Weeks 1179C01313CS1BV Mass Flow Controller, 1000 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal UNIVERSAL 0.0 1.0 0.0 0.0 1000 sccm Viton 0.25 in. tube 14 Weeks Loading... Quote Loading... 1179C01314CR1BV
Loading... Quote Loading... Mass Flow Controller, 10,000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal 14 Weeks 1179C01314CR1BV Mass Flow Controller, 10,000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal UNIVERSAL 0.0 1.0 0.0 0.0 10000 sccm Viton 4 VCR male 14 Weeks Loading... Quote Loading... 1179C01314CS1BV
Loading... Quote Loading... Mass Flow Controller, 10,000 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal 14 Weeks 1179C01314CS1BV Mass Flow Controller, 10,000 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal UNIVERSAL 0.0 1.0 0.0 0.0 10000 sccm Viton 0.25 in. tube 14 Weeks Loading... Quote Loading... 1179C01321CR1BV
Loading... Quote Loading... Mass Flow Controller, 20 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal 14 Weeks 1179C01321CR1BV Mass Flow Controller, 20 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal UNIVERSAL 0.0 1.0 0.0 0.0 20 sccm Viton 4 VCR male 14 Weeks Loading... Quote Loading... 1179C01321CS1BV
Loading... Quote Loading... Mass Flow Controller, 20 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal 14 Weeks 1179C01321CS1BV Mass Flow Controller, 20 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal UNIVERSAL 0.0 1.0 0.0 0.0 20 sccm Viton 0.25 in. tube 14 Weeks Loading... Quote Loading... 1179C01322CR1BV
Loading... Quote Loading... Mass Flow Controller, 200 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal 14 Weeks 1179C01322CR1BV Mass Flow Controller, 200 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal UNIVERSAL 0.0 1.0 0.0 0.0 200 sccm Viton 4 VCR male 14 Weeks Loading... Quote Loading... 1179C01322CS1BV
Loading... Quote Loading... Mass Flow Controller, 200 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal 14 Weeks 1179C01322CS1BV Mass Flow Controller, 200 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal UNIVERSAL 0.0 1.0 0.0 0.0 200 sccm Viton 0.25 in. tube 14 Weeks Loading... Quote Loading... 1179C01323CR1BV
Loading... Quote Loading... Mass Flow Controller, 2,000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal 14 Weeks 1179C01323CR1BV Mass Flow Controller, 2,000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal UNIVERSAL 0.0 1.0 0.0 0.0 2000 sccm Viton 4 VCR male 14 Weeks Loading... Quote Loading... 1179C01323CS1BV
Loading... Quote Loading... Mass Flow Controller, 2,000 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal 14 Weeks 1179C01323CS1BV Mass Flow Controller, 2,000 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal UNIVERSAL 0.0 1.0 0.0 0.0 2000 sccm Viton 0.25 in. tube 14 Weeks Loading... Quote Loading... 1179C01324CR1BV
Loading... Quote Loading... Mass Flow Controller, 20,000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal 14 Weeks 1179C01324CR1BV Mass Flow Controller, 20,000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal UNIVERSAL 0.0 1.0 0.0 0.0 20000 sccm Viton 4 VCR male 14 Weeks Loading... Quote Loading... 1179C01324CS1BV
Loading... Quote Loading... Mass Flow Controller, 20,000 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal 14 Weeks 1179C01324CS1BV Mass Flow Controller, 20,000 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal UNIVERSAL 0.0 1.0 0.0 0.0 20000 sccm Viton 0.25 in. tube 14 Weeks Loading... Quote Loading... 1179C01351CR1BV
Loading... Quote Loading... Mass Flow Controller, 50 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal 14 Weeks 1179C01351CR1BV Mass Flow Controller, 50 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal UNIVERSAL 0.0 1.0 0.0 0.0 50 sccm Viton 4 VCR male 14 Weeks Loading... Quote Loading... 1179C01351CS1BV
Loading... Quote Loading... Mass Flow Controller, 50 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal 14 Weeks 1179C01351CS1BV Mass Flow Controller, 50 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal UNIVERSAL 0.0 1.0 0.0 0.0 50 sccm Viton 0.25 in. tube 14 Weeks Loading... Quote Loading... 1179C01352CR1BV
Loading... Quote Loading... Mass Flow Controller, 500 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal 14 Weeks 1179C01352CR1BV Mass Flow Controller, 500 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal UNIVERSAL 0.0 1.0 0.0 0.0 500 sccm Viton 4 VCR male 14 Weeks Loading... Quote Loading... 1179C01352CS1BV
Loading... Quote Loading... Mass Flow Controller, 500 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal 14 Weeks 1179C01352CS1BV Mass Flow Controller, 500 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal UNIVERSAL 0.0 1.0 0.0 0.0 500 sccm Viton 0.25 in. tube 14 Weeks Loading... Quote Loading... 1179C01353CR1BV
Loading... Quote Loading... Mass Flow Controller, 5,000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal 14 Weeks 1179C01353CR1BV Mass Flow Controller, 5,000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal UNIVERSAL 0.0 1.0 0.0 0.0 5000 sccm Viton 4 VCR male 14 Weeks Loading... Quote Loading... 1179C01353CS1BV
Loading... Quote Loading... Mass Flow Controller, 5,000 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal 14 Weeks 1179C01353CS1BV Mass Flow Controller, 5,000 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal UNIVERSAL 0.0 1.0 0.0 0.0 5000 sccm Viton 0.25 in. tube 14 Weeks Loading... Quote Loading... Show All Configuration Options Please see the 1179C datasheet for product options.

 Show All Configuration Options Description 1179C Mass Flow Controller, Elastomer Seal, 10 - 20,000 sccm Loading... Quote Loading... 1179c-mass-flow-controller - Drawings & CAD Additional CAD file downloads are not available for this product. CAD File Downloads: Loading... Download Close Close Close 1179c-mass-flow-controller - Drawings Additional drawings are not available for this product. Close Close Specifications Control Range 2% to 100% of Full Scale Full Scale Flow Range 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm (N2 equivalent) Fitting Type Swagelok® 4 VCR®, Swagelok 4 VCO®, ¼" Swagelok® Analog I/O Connector 9-pin or 15-pin Type "D" Seal Material Buna-N, Neoprene®, Kalrez® Maximum Inlet Pressure 150 psig Normal Operating Pressure Differential 10 to 40 psid (10 to 5000 sccm)
15 to 40 psid (10000 to 30000 sccm)
(with atmospheric pressure at the MFC outlet) Typical Accuracy ±1.0% of Full Scale Repeatability ±0.2% of Full Scale Resolution 0.1% of Full Scale Zero Temperature Coefficient Span Temperature Coefficient Pressure Coefficient Warm-up Time 2 minutes Typical Settling Time Operating Temperature 0° to 50°C Power Requirements ±15 VDC (200 mA start-up, 100 mA steady-state) Set Point Command Signal 0 to 5 VDC from Wetted Materials 316L S.S., Viton®, nickel External Leak Integrity < 1 x 10-9 Leak Integrity Through Closed Valve Compliance CE Features Form-Fit-Function Replacement MFC The 1179C is a direct form-fit-function replacement for the most common MFCs on the market today. The standard 3-inch footprint enables the 1179C to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same Type “D” connectors, with the same pin-outs, signals, and functions as their industry counterparts, so no cable or connector rewiring is necessary. The 1179C is compatible with MFC power supply and display electronics from MKS or other manufacturers.

Performance and Reliability Performance and reliability have been designed into the 1179C, and ensured through rigorous MTBF analysis and extensive STRIFE testing. The 1179C complies with IEC-801 specifications for tolerance to ESD (electro static discharge) and RFI (radio frequency interference) environments. Zero and span drift are minimal with MKS’s new patented sensor, as shown by the graph below. The 1179C also complies with European CE Mark requirements. As a statement of our confidence in the performance of the 1179C, it carries a two-year warranty.

Accessories

Compare Description Compatibility Drawings, CAD & Specs Avail. Price CB259-5-10Cable, Mass Flow Controller, 246, 247 or 660 Controllers, DB15, 10 ft. UNIVERSAL 14 Weeks Loading... Quote Loading... CB147-12-10Cable, Mass Flow Controller, DB9, 10 ft. UNIVERSAL 14 Weeks Loading... Quote Loading... CB147-1-10Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, DB15, 10 ft. UNIVERSAL 14 Weeks Loading... Quote Loading... 100016745Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 25 ft. UNIVERSAL 14 Weeks Loading... Quote Loading... 100016744Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 10 ft. UNIVERSAL 14 Weeks Loading... Quote Loading... 100016746Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 50 ft. UNIVERSAL 14 Weeks Loading... Quote Loading... 100019087Cable, Mass Flow Controller, 946 Controller, DB9 to HD15, 10 ft. UNIVERSAL 14 Weeks Loading... Quote Loading... 100019088Cable, Mass Flow Controller, 946 Controller, DB9 to HD15, 25 ft. UNIVERSAL 14 Weeks Loading... Quote Loading... 100019089Mass Flow Controller Cable, 946 Controller, DB9 to HD15, 50 ft. UNIVERSAL 14 Weeks Loading... Quote Loading... RCBDMFC-3-10Cable, Mass Flow Controller, RoHS, DB9, 10 ft. UNIVERSAL 14 Weeks Loading... Quote Loading... RCBDMFC-1-10Cable, Mass Flow Controller, 246, 247 or 660 Controllers, RoHS, DB15, 10 ft. UNIVERSAL 14 Weeks Loading... Quote Loading... RCBDMFC-4-10Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, RoHS, DB15, 10 ft. UNIVERSAL 14 Weeks Loading... Quote Loading... Resources Literature 1179C General Purpose Mass-Flo Controller (MFC) (252.4 kB, PDF) Manuals 1179, 2179, and 1479 Mass Flow Controller Pin-outs (25.4 kB, PDF) MKS 1179C Mass-Flo® Controller, 179C Mass-Flo Meter Manual   (396.5 kB, PDF) Drawings & CADs 1179 & 179 3D Model Files 1179C Dimensional Drawing (54.6 kB, PDF) Application Notes Gas Correction Factors for Thermal-based Mass Flow 1179c-mass-flow-controller Related Products PR4000B Digital Power Supply and Readout 946 Vacuum System Controller GE50A Elastomer-sealed 5-50,000 sccm Mass Flow Controllers 179C General Purpose Metal-Sealed 10-20,000 sccm Mass Flow Meters PSR1A Single Channel Power Supply, Readout and Set Point Controller PSR4A Four Channel Power Supply, Readout & Set Point Controller Related Products PR4000B Digital Power Supply and Readout 946 Vacuum System Controller GE50A Elastomer-sealed 5-50,000 sccm Mass Flow Controllers 179C General Purpose Metal-Sealed 10-20,000 sccm Mass Flow Meters PSR1A Single Channel Power Supply, Readout and Set Point Controller PSR4A Four Channel Power Supply, Readout & Set Point Controller Need help? Contact an Applications Specialist by sending us an email

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