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Granville-Phillips 356 Micro-Ion Plus Module

Granville-Phillips 356 Micro-Ion Plus Module MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Granville-Phillips® Indirect Vacuum Gauges Legacy Vacuum Gauges & Controllers Legacy Vacuum Gauges & Controllers 356 Micro-Ion® Plus Vacuum Pressure Transducers Sorry, this family of products is no longer available.

Print 356 Micro-Ion® Plus Vacuum Pressure Transducers 356 Micro-Ion® Plus Vacuum Pressure Transducers Features Resources Contact Us Overview

See All Features Specifications Sensor Type Micro-Ion® Gauge Measurement Range 1 x 10-9 Torr to atmosphere
1 x 10-9 mbar to atmosphere
1 x 10-7 Pa to atmosphere
(Air and N2) Repeatability -8 Torr to 50 Torr Accuracy -8 Torr to 50 Torr (N2) Filament Yttria-coated iridium Operating Temperature 10 - 40°C Bake Out Temperature 150°C (with electronics removed) Storage Temperature -40 to 70°C Relays Two single-pole, double-throw relays (SPDT) Relay Contact Rating 1 A at 30 VDC resistive, non-inductive Relay Response 1 x 10-9 to 50 Torr; 1 x 10-9 to 70 mbar; 1 x 10-7 Pa to 7 kPa Power Requirements 24 VDC ±15%, 26 W max Exposed Materials 304 stainless steel, tantalum, tungsten, nickel, nickel iron alloy, borosilicate glass Case Material Aluminum extrusion Internal Volume 10.8 cc Weight 567 gm (20 oz) with NW16KF flange Display 2 digits plus exponent, green LED (optional) Ion Gauge Degas Electron bombardment, 3.75 W with 2-minute timer Ion Gauge Emission Current Autoranging Ion Gauge Auto On Setting 2 x 10-2 Torr; 3 x 10-2 mbar; 3 Pa, on decreasing pressure Ion Gauge Auto Off Setting 3 x 10-2 Torr; 4 x 10-2 mbar; 4 Pa, on increasing pressure Switch to Low Emission Setting 1 x 10-5 Torr; 1 x 10-5 mbar; 1 x 10-3 Pa, on increasing pressure X-ray Limit -10 Torr; -10 mbar; -8 Pa Compliance CE Features The combination of two sensors in the same vacuum envelope saves space. Vacuum system control is simplified by using the heat-loss sensor to automatically turn-on and turn-off the ionization gauge. The patented Conductron Heat Loss Sensor is based on the understanding and insights gained in over 35 years of experience in making the industry standard Convectron® Gauge. The wide range, high performance and compact size make the Micro-Ion Plus Module a wise choice for pressure measurement on high vacuum systems.

Micro-Ion® Plus Gauge Compact Combination Gauge: Micro-Ion Plus combines the new miniature Conductron Heat-loss sensor with a Micro-Ion sensor in one gauge envelope, at less than 10% of the volume of a conventional ionization gauge. High Performance: The complete Micro-Ion design has been retained with the patented dual ion collector that increases the electron path length and ion collection efficiency, providing high performance in a small volume. Dual Ionization Sensor Filaments: Dual, burn-out resistant yttria-coated iridium filaments provide long gauge life. Unscheduled downtime is avoided by using the second filament as a back-up until the gauge can be replaced during regular maintenance procedures. Cooler Operation: At only 8% of the power consumption of a traditional glass or nude gauge, the Micro-Ion sensor generates much less heat to disturb a process or experiment. Robust All-Metal Design: Welded components, vacuum fired and assembled in a cleanroom environment, are enclosed in a stainless steel envelope to ensure sensor integrity. Port Shield: Protects the electrode assembly from damage during assembly or vacuum chamber maintenance, and provides a stable electrical environment for improved measurement performance. Wide Selection of Vacuum Fittings: Simplifies installation on your vacuum system. Replaceable Gauge: Gauge can quickly and easily be replaced using only a screwdriver. Micro-Ion® Plus Module Wide Measurement Range: Allows vacuum system performance to be monitored continuously from 1x10-9 Torr (1x10-9 mbar; 1x10-7 Pa) to atmosphere. Simple Modular Design: Electronics and sensors are packaged together in one compact, easy to install module that eliminates the need for multiple gauges, cables, and electronics. Control System Simplification: The integral heat loss sensor automatically controls activation and deactivation of the ion gauge, eliminating the need for external control of the ion gauge. RS-485, Analog Output and Remote I/O: In addition to RS-485 communications and analog output, the module provides input control of gauge on/off, degas, atmospheric calibration, and keyboard lock along with outputs of gauge, filament, and degas status. Process Trip Points: Relay contacts allow control of other vacuum equipment and provide safety interlocking. Settings are adjustable through the local display interface, RS-485 or DeviceNet interface. Local Display/Interface (Optional): Setup time and diagnostics are improved with a green LED display and pushbutton interface that gives point-of-use pressure indication and local adjustment of process trip points. DeviceNet Interface Version: Provides high speed access to pressure measurement and easy configuration of gauge parameters. DeviceNet Network Power Flexibility: Gauge power can be supplied either through the DeviceNet micro connector or through a separate connector.

Resources Literature 356 Micro-Ion® Plus Modules (Archive) (325.3 kB, PDF) Manuals   (72.7 kB, PDF)   (187.7 kB, PDF)   (1.3 MB, PDF)   (1.1 MB, PDF) Device Description Files 356 Micro-Ion® Plus Module DeviceNet™ EDS File (12.2 kB, EDS) Other 356 Micro-Ion® Plus Module Declaration of Conformity (121.8 kB, PDF) 356-micro-ion-plus-modules Related Products 355 Micro-Ion® Hot Cathode Vacuum Transducers 390 Micro-Ion® ATM Vacuum Transducers 392 Micro-Ion® Plus Vacuum Transducers 355 Micro-Ion® Bayard-Alpert Vacuum Sensors 358 Micro-Ion® Vacuum Gauge Controller Related Products 355 Micro-Ion® Hot Cathode Vacuum Transducers 390 Micro-Ion® ATM Vacuum Transducers 392 Micro-Ion® Plus Vacuum Transducers 355 Micro-Ion® Bayard-Alpert Vacuum Sensors 358 Micro-Ion® Vacuum Gauge Controller Need help? Contact an Applications Specialist by sending us an email

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