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e-Vision 2 General Purpose Residual Gas Analyzer

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e-Vision 2 General Purpose Residual Gas Analyzer MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Gas Analyzers Mass Spectrometers Residual Gas Analyzers e-Vision 2 General Purpose Residual Gas Analyzer Print e-Vision 2 General Purpose Residual Gas Analyzer e-Vision 2 General Purpose Residual Gas Analyzer Products Configuration Options Features Accessories Resources Contact Us Overview

Leak detection of vacuum lines, welds and seals Vacuum diagnostics Pump down monitoring Chamber bake out monitoring Leak checking of coolant lines within a vacuum chamber Chamber contaminant monitoring See All Features Products Show Filters:  View all products Compare Description Compatibility sortOrder rankScore ranking Drawings, CAD & Specs Mass Range Detector Ion Source Availability Featured Item Price Brand EV2-110-000
Loading... Quote Loading... Residual Gas Analyzer, 1-100 amu, Faraday Detector, Open Ion Source Contact Us EV2-110-000 Residual Gas Analyzer, 1-100 amu, Faraday Detector, Open Ion Source UNIVERSAL 0.0 1.0 0.0 0.0 1-100 amu Faraday Open Contact Us Loading... Quote Loading... EV2-120-000
Loading... Quote Loading... Residual Gas Analyzer, 1-100 amu, Multichannel Plate Dual Detector, Open Ion Source Contact Us EV2-120-000 Residual Gas Analyzer, 1-100 amu, Multichannel Plate Dual Detector, Open Ion Source UNIVERSAL 0.0 1.0 0.0 0.0 1-100 amu Multichannel Plate Dual Open Contact Us Loading... Quote Loading... EV2-210-000
Loading... Quote Loading... Residual Gas Analyzer, 1-200 amu, Faraday Detector, Open Ion Source Contact Us EV2-210-000 Residual Gas Analyzer, 1-200 amu, Faraday Detector, Open Ion Source UNIVERSAL 0.0 1.0 0.0 0.0 1-200 amu Faraday Open Contact Us Loading... Quote Loading... EV2-220-000
Loading... Quote Loading... Residual Gas Analyzer, 1-200 amu, Multichannel Plate Dual Detector, Open Ion Source, Tungsten Filaments Contact Us EV2-220-000 Residual Gas Analyzer, 1-200 amu, Multichannel Plate Dual Detector, Open Ion Source, Tungsten Filaments UNIVERSAL 0.0 1.0 0.0 0.0 1-200 amu Multichannel Plate Dual Open Contact Us Loading... Quote Loading... Show All Configuration Options e-Vision 2 General Purpose Residual Gas Analyzers are also available with the following options.
Ordering Code Example: EV2-120-000

Configuration Option Option Code e-Vision 2 Residual Gas Analyzer

EV Software Option Web Application Only 2 EasyView E Mass Range 100 amu 1 200 amu 2 Detector Type Faraday Only 1 Multichannel Plate Dual 2 Reserved Reserved 0-00 Filament Tungsten Filaments 0 Thoria Coated Iridium 1  Show All Configuration Options Description E-VISION-2 Residual Gas Analyzer, General Purpose, e-Vision 2 Loading... Quote Loading... e-vision-2-residual-gas-analyzer - Drawings & CAD Additional CAD file downloads are not available for this product. CAD File Downloads: Loading... Download Close Close Close e-vision-2-residual-gas-analyzer - Drawings Additional drawings are not available for this product. Close Close Specifications Type Residual Gas Analyzer Measurement Technique Mass Spectrometry Mass Range 1-100 or 1-200 amu Filaments Tungsten or Thoria Coated Iridium Software Built-in web applications allowing RGA control and data acquisition without installed software using web browser on any PC
Optional Easy View Software available Filter length 4 in. (100 mm) Maximum Analyzer Operating Pressure 1e-4 Torr (1.3e-4 mbar) Ion Source Sensitivity 5e-5 A/mbar Minimum Detectable Concentration 7.5e-11 Torr (1e-10 mbar) Faraday
2e-13 Torr (2.5e-13 mbar) Multiplier Mass Stability ±0.1 amu over 8 hours at stable ambient Bake Out Temperature 250°C with electronics removed Operating Temperature 200°C Faraday only with electronics 10-40°C
150°C Multiplier with electronics 10-40°C and pressure 90°C Multiplier with electronics 10-40°C and pressure Data Acquisition Method Dedicated realtime acquisition processor Data Acquisition Speed Data Collection Methods Analog scanning, full mass range 8, 16 or 32 points/amu
Barchart scanning
Peak-jump collection of up to 15 peaks per scan Settling Time Control Method CE operating system processor with web-server interface Command Structure Documented ASCII command protocols Electron Energy & Emission Current 40 or 70eV fixed (set in web configuration) Filament Protection Opto-isolated input for filament protect or control with auto detection of presence of the jack plug as failsafe Communication 10/100 Base-T Ethernet, static or automatically assigned IP addresses Compliance CE (control unit) Features Sensor Performance Field proven MKS quadrupole mass analyzers, with twin filaments as standard, ensure minimum downtime during critical diagnostic testing. The RGA is available with an optional dual detector including a faraday detector and microchannel plate electron multiplier for detection to e-14 mbar.

Electronics Performance Data acquisition occurs through all solid state, wide dynamic range, fast settling detector electronics. This technology prevents large peaks from causing false positive measurements on small peaks. Temperature stabilized critical components mean that signal stability and baseline drift are improved, allowing the unit to be used without frequent recalibration if the vacuum chamber is stable but ambient air temperature fluctuates.

Built-in Web Application A web interface using industry standard technology allows control of the e-Vision 2 as well as calibration, operation and data export through a non platform-specific web browser from anywhere on a network. Using the ASCII protocol and TCP-IP communication, any third party software can send and receive commands and data from the e-Vision 2.

Built-in web application for e-Vision 2 control and data acquisition EasyView Software In addition to the standard, built-in web applications, software control is also available through an optional Windows application, offering the best possible fit to any customer requirement. The field proven software provides basic RGA controls but with more functionality than the built-in web application.

Store RGA data and recall it back into the Recall viewer Annotate graphs with notes Run several RGAs from one software package

EasyView software for more sophisticated data management and control of multiple RGAs Applications The e-Vision 2 is suitable for a wide range of applications including:

Leak detection of vacuum lines, welds and seals Vacuum diagnostics Pump down monitoring Chamber bakeout monitoring Leak checking of coolant lines within a vacuum chamber Chamber contaminant monitoring Monitor cryo-pump performance Monitor getter performance

e-Vision 2 in use as a troubleshooting tool on vacuumbased surface analysis equipment Accessories Compatible Software

Compare Description Compatibility Drawings, CAD & Specs Avail. Price PROCESS-EYE-PROFESSIONALProcess Monitoring Software, Residual Gas Analyzer, Process Eye™ Professional UNIVERSAL Contact Us Loading... Quote Loading... TOOLWEB-RGAChamber Monitor Software, Residual Gas Analyzer, TOOLweb® UNIVERSAL Contact Us Loading... Quote Loading... 512-000/DGas Analyzer Software, EasyView, Residual Gas UNIVERSAL Contact Us Loading... Quote Loading... Resources Literature e-Vision 2 General Purpose Residual Gas Analyzer (RGA) (2.2 MB, PDF) Drawings & CADs e-Vision 2 Dimmensional Drawing (476.4 kB, PDF) e-vision-2-residual-gas-analyzer Related Products EasyView Residual Gas Analyzer Software Microvision 2 Flexible, Integration-ready Residual Gas Analyzer HPQ3 High Pressure 0.001 Torr Residual Gas Analyzers HPQ3S High Pressure 0.008 Torr Residual Gas Analyzer Related Products EasyView Residual Gas Analyzer Software Microvision 2 Flexible, Integration-ready Residual Gas Analyzer HPQ3 High Pressure 0.001 Torr Residual Gas Analyzers HPQ3S High Pressure 0.008 Torr Residual Gas Analyzer Need help? Contact an Applications Specialist by sending us an email

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