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IP66 Rated Multi-gas, Multi-range Elastomer-sealed 250-500 slm Mass Flow Controller

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IP66 Rated Multi-gas, Multi-range Elastomer-sealed 250-500 slm Mass Flow Controller MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Mass Flow Controllers & Meters Mass Flow Controllers IP66 Rated Mass Flow Controllers IE500A IP66-rated, Elastomer-sealed 250-500 slm Mass Flow Controllers Print IP66 Rated Multi-gas, Multi-range Elastomer-sealed 250-500 slm Mass Flow Controllers IP66 Rated Multi-gas, Multi-range Elastomer-sealed 250-500 slm Mass Flow Controllers Products Configuration Options Features Accessories Resources Contact Us Overview

Flow rates from 250 to 500 slm Seal and valve plug option of Viton, Buna, Neoprene or EPDM Analog, RS485, Profibus™, or DeviceNet™ I/O Standard closed conductance leak rate of less than 1.0% of Full Scale 1 to 2 second settling time See All Features Products Configuration Options The following options are available for IE500A IP66-rated, Elastomer-sealed 250-500 slm Mass Flow Controllers
Ordering Code Example: IE500A013255T4R0020

Configuration Option

Option Code

IE500A Mass Flow Controller IE500A Gas (Per Semi Standard E52-0703) Helium (He): 350-700 slm 001 Argon (Ar): 250-500 slm 004 Hydrogen(H2): 250-500 slm 007 Nitrogen (N2): 250-500 slm 013 Other Gas Options See Here Flow Range Full Scale 500 slm (500,000 sccm) 505 Fittings (compatible with) 12 mm Swagelok L 0.5 in. tube compression S 0.75 in. tube compression Z 0.5 in. NPT female M 0.75 in. NPT female N 8 VCR male T 8 VCO male D Connector Profibus 4 PROFINET 9 15 pin D (Analog 0-5 VDC I/O) B 15 pin D (4-20 mA I/O) G Seal Materials Viton® V Buna B Neoprene® N EPDM E Valve/Device Type Standard MFC 0 Mass Flow Meter 3 Firmware MKS will ship firmware revision current to date 20

* For gases not listed in the standard products gas table, please contact the MKS applications department for assistance.
** The Full Scale flow rate is designated by a 3 digit number. The first two digits represent the significant digits of the Full Scale flow rate separated by a decimal point. The third digit is the exponent of the power of ten. Example flow rate code: 255 is 2.5 x 105 sccm or 250 slm; 105 is 1.0 x 105 sccm or 100 slm

 Show All Configuration Options Description IE500A Mass Flow Controller, IP66-rated, Elastomer-sealed, 250 - 500 slm Loading... Quote Loading... ie500a-mass-flow-controller - Drawings & CAD Additional CAD file downloads are not available for this product. CAD File Downloads: Loading... Download Close Close Close ie500a-mass-flow-controller - Drawings Additional drawings are not available for this product. Close Close Specifications Type Mass Flow Controller Full Scale Flow Range 250-500 slm (N2 equivalent) Fitting Type Compatible with:
12 mm Swagelok
0.5 in. tube compression
0.75 in. compression
0.5 in. NPT female
0.75 in. NPT female
8 VCR male
8 VCO male Connector Profibus
PROFINET
15 pin D (Analog 0-5 VDC I/O)
15 pin D (4-20 mA I/O) Maximum Inlet Pressure 150 psig Normal Operating Pressure Differential 40 to 50 psid Burst Pressure 1500 psig Control Range 2% to 100% of Full Scale Typical Accuracy ±1% of set point for >20% to 100% Full Scale
±0.25% of Full Scale for 5% to 20% Full Scale Repeatability ±0.5% of Reading Resolution 0.1% of Reading Zero Temperature Coefficient Span Temperature Coefficient Inlet Pressure Coefficient Typical Settling Time Warm-up Time 1 hour Operating Temperature 10° to 50°C Storage Humidity 0 to 95% Relative Humidity, non-condensing Storage Temperature -20° to 65°C External Leak Integrity <1 x 10 (scc/sec He) Leak Integrity Through Closed Valve Seal Material Viton®
Buna
Neoprene®
EPDM Wetted Materials 316 S.S., Elgiloy, 430FR, PTFE (Standard) Surface Finish 16 µinch average Ra Enclosure Rating IP66 Power Requirements 15-24 VDC @ ( Flow Input Output Signal Voltage: 0-5 VDC
Current: 4-20 mA Analog I/O Connector Voltage: 15-pin Type "D" male
Current: 15-pin Type "D" male Weight 12.7 lbs. (5.8 kg) Compliance CE Features Communications Options Digital I/O Profibus® PROFINET® Input Power Required +15 to +24 VDC ( +24 VDC ( Connector 9 pin Type D male (power)
9 pin Type D female (comm.) 2 x RJ-45 (comm.) male
M8 male 5 pin (power) Data Rate Switch/Selection No switch
Set data rate via Profibus No switch Comm. Rate(s) 9.6 Kbps to 12 Mbps 100 Mbps MAC ID Switches/Addresses 2 switches, 10 positions n/a Network Size Up to 99 nodes n/a Visual Indicators LED Comm (green/red)
LED Error (green/red) LED Maint (amber)
LED BUS Fault (red)
LED Ready (green)
LED Sys Fault (red) Compliance CE CE

Fast Settling Time Settling times of 2 to 3 seconds and set point accuracies below 1% of set point exceed those of other typical high flow MFCs. Precise control is maintained down to 2% of the IE500A configured Full Scale flow range. The multi-gas/multi-range capability, along with tight performance specifications for accuracy, control range, and transient response allow users to minimize inventory of high flow MFC part numbers.

Multi-Gas / Multi-Range Capability The multi-gas/multi-range feature (along with other custom controls) is accessed through the MFCs embedded diagnostic interface, which requires no special software or hardware to operate. A standard Ethernet cable and JAVA-enabled HTML browser, widely available, are all the tools needed. The critical gas parameters for typical high flow rate gases are already stored on the device. Configuring the device is simply a matter of selecting the gas from a drop down menu and specifying the desired Full Scale flow range. The diagnostic interface also allows the user to perform routine device health checks, plot flow response, and store operating data for offline analysis.

IP66 Rated Enclosure Thesre mass flow controllers are designed for use in harsh environments where resistance to liquid and dust ingress are essential. Applications include those where “hose down” may be required, such as industrial glass production where moisture and particulates are present. With its IP66 rated enclosure, these MFCs meet the stringent requirements of these aggressive environments.

Accessories

Compare Description Compatibility Drawings, CAD & Specs Avail. Price CB147-12-10Cable, Mass Flow Controller, DB9, 10 ft. UNIVERSAL 15 Weeks Loading... Quote Loading... CB147-1-10Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, DB15, 10 ft. UNIVERSAL 15 Weeks Loading... Quote Loading... CB259-5-10Cable, Mass Flow Controller, 246, 247 or 660 Controllers, DB15, 10 ft. UNIVERSAL 15 Weeks Loading... Quote Loading... Resources Literature IE500A IP66 Rated, Elastomer Sealed Mass Flow Controller, 250-500 slm (2.2 MB, PDF) Application Notes   (246.3 kB, PDF)   (320.8 kB, PDF) Sample Gas Codes for Mass Flow Controllers/Meters Gas Correction Factors for Thermal-based Mass Flow Manuals   (2.2 MB, PDF)   (86.9 kB, PDF)   (502.9 kB, PDF)   (5.6 MB, PDF) Drawings & CADs IE500 Mass Flow Controller/Meter 3D Model Files IE500 Mass Flow Controller/Meter Dimensional Drawing (559.5 kB, PDF) ie500a-mass-flow-controller Related Products PR4000B Digital Power Supply and Readout 946 Vacuum System Controller Test Diagnostic Circuit Boards IE500A IP66 Rated Multi-gas, Multi-range Elastomer-sealed 250-500 slm Mass Flow Meter PSR4A Four Channel Power Supply, Readout & Set Point Controller PSR1A Single Channel Power Supply, Readout and Set Point Controller Related Products PR4000B Digital Power Supply and Readout 946 Vacuum System Controller Test Diagnostic Circuit Boards IE500A IP66 Rated Multi-gas, Multi-range Elastomer-sealed 250-500 slm Mass Flow Meter PSR4A Four Channel Power Supply, Readout & Set Point Controller PSR1A Single Channel Power Supply, Readout and Set Point Controller Need help? Contact an Applications Specialist by sending us an email

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