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P4B High Performance Mass Flow Meter, 5-50000 sccm

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P4B High Performance Mass Flow Meter, 5-50000 sccm MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Mass Flow Controllers & Meters Mass Flow Meters P-Series High Performance Mass Flow Meters P4B High Performance Mass Flow Meter, 5-50000 sccm Print P4B High Performance Mass Flow Meter, 5-50000 sccm P4B High Performance Mass Flow Meter, 5-50000 sccm Products Configuration Options Features Resources Contact Us Overview

Tightly controlled flow accuracy of process gas for improved chamber process matching Embedded configuration and diagnostics software that allows the user to check MFM functionality without device removal from the tool See All Features Products Configuration Options The following options are available for P4B High Performance Mass Flow Meters
Ordering Code Example: P4B013502C60030

Configuration Option

Option Code

P4B Mass Flow Meter P4B Gas (Per Semi Standard E52-0703) Nitrogen (N2) 013 Ammonia (NH3) 029 Sulfur Hexafluoride (SF6) 110 Flow Range Full Scale 5 sccm 500 10 sccm 101 20 sccm 201 50 sccm 501 100 sccm 102 200 sccm 202 500 sccm 502 1000 sccm 103 2000 sccm 203 5000 sccm 503 10000 sccm 104 20000 sccm 204 30000 sccm 304 50000 sccm 504 Fittings (compatible with) Swagelok 4 VCR R C-seal (1.125 in.) C W-seal (1.125 in.) H Connector DeviceNet 6 15 pin D (Analog I/O) B 9 pin D (Analog I/O) A Valve/Device Type No Valve (MFM) 0 Reserved Reserved 0 Firmware MKS will ship firmware revision current to date 30  Show All Configuration Options Description P4B-MFM Mass Flow Meter, Multi-gas, Multi-range, 5 sccm to 50 slm Loading... Quote Loading... p4b-mass-flow-meter - Drawings & CAD Additional CAD file downloads are not available for this product. CAD File Downloads: Loading... Download Close Close Close p4b-mass-flow-meter - Drawings Additional drawings are not available for this product. Close Close Specifications Type Mass Flow Meter Full Scale Flow Range 5-50000 sccm Measurement Range 0.1-100% of Full Scale (range on mech.) Maximum Inlet Pressure 500 psig Proof Pressure 1000 psig Burst Pressure 1500 psig Typical Accuracy ±1% of set point for 20-100% Full Scale
±0.2% of Full Scale for 2-20% Full Scale Repeatability ±0.3% of Reading Resolution 0.1% of Full Scale Zero Temperature Coefficient Span Temperature Coefficient Inlet Pressure Coefficient Warm-up Time Operating Temperature 10-50°C Storage Humidity 0-95% relative humidity, non-condensing Storage Temperature -20° to 80°C (-4° to 149° F) Temperature Display 0-100°C Temperature Accuracy ±2°C Temperature Resolution 0.1°C Display 4 digits for value, 4 characters for unit Fitting Type Compatible with: Swagelok® 4 VCR®, 1.125 in. surface mount (C-seal, W-seal), 1.5 in. W-seal External Leak Integrity -10 Wetted Materials 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S. Surface Finish 10μ inch average Ra Weight Compliance CE Power Requirements +15 to +24 VDC @ 200mA max Analog I/O Connector 15-pin Type “D” Male, 9 pin Type “D” Male Flow Input Output Signal 0 to 5 VDC DeviceNet Connector 5 pin microconnnector (DeviceNet) RS485 Connector 9 pin Type “D” Male Features Communications Options Digital I/O DeviceNet™ Input Power Required +11 to +25 VDC per DeviceNet specification (@ Connector 5 pin microconnnector (DeviceNet) Data Rate Switch/Selection 4 positions: 125, 250, 500K (Default), PGM (programmable over the network) Data Rate/Network Length Data rate (user selectable)
125 Kbps, 500 meters (1,640 feet)
250 Kbps, 250 meters (820 feet)
500 Kbps, 100 meters (328 feet) MAC ID Switches/Addresses 2 switches, 10 positions; 0,0 to 6,3 are hardware ID numbers
7,0 to 9,9 are software ID numbers
(6,4 to 6,9 are unused and, if selected will default to hardware ID number 6.3) Network Size Up to 64 nodes Network Topology Linear (trunkline/dropline) power and signal on same network cable Visual Indicators LED network status (green/red)
LED module status (green/red)
Scrolling LED displays (MFC Type, Flow Full Scale, Gas Type, IP address, Instance Number (1 to 31) Compliance CE

Multi-gas/Multi-range Capable The multi-gas/multi-range capability, along with tight performance specifications for accuracy, allow users to minimize inventory of high flow MFM part numbers. The multi-gas/multi-range feature (along with other custom controls) is accessed through the MFM embedded diagnostic interface, that requires no special software or hardware to operate. A standard Ethernet cable and JAVA-enabled HTML browser, widely available, are all the tools needed. The critical gas parameters for typical high flow rate gases are already stored on the device. Configuring the device is simply a matter of selecting the gas from a drop down menu and specifying the desired full scale flow range. The diagnostic interface also allows the user to perform routine device health checks, plot flow, and store operating data for off-line analysis.

Resources Literature P4B High Performance Mass Flow Meter (2.1 MB, PDF) Application Notes Sample Gas Codes for Mass Flow Controllers/Meters Gas Correction Factors for Thermal-based Mass Flow Manuals   (1.7 MB, PDF) Drawings & CADs P4B Mass Flow Controller/Meter 3D Model Files P4B Mass Flow Controller/Meter Dimensional Drawings (134.7 kB, PDF) p4b-mass-flow-meter Related Products P4B High Performance 5-50,000 sccm Mass Flow Controllers Mass Flow Controller Cables 946 Vacuum System Controller Related Products P4B High Performance 5-50,000 sccm Mass Flow Controllers Mass Flow Controller Cables 946 Vacuum System Controller Need help? Contact an Applications Specialist by sending us an email

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