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Configuring 649 Compact Pressure Controllers

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Configuring 649 Compact Pressure Controllers MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

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Valve Orifice: The flow through any orifice depends on the size of the orifice, the inlet and outlet pressures, and gas density. To simplify 649 orifice selection, use the following procedure:

The flow through any orifice depends on the size of the orifice, the inlet and outlet pressures, and gas density. To simplify 649 orifice selection, use the following procedure: On the Index Number Table in Figure 1, choose your inlet pressure from the column of pressures on the left–the pressure that will be applied to the inlet of your 649. (Note that the values are absolute pressure.)
Figure 1 - Index Number Table Next, from the row of pressures at the top of that table, select your differential (delta) pressure – this is the inlet pressure minus your outlet pressure.
Locate the Index Number – where your selected row and column intersect. If you are using N2, skip to step #3. For other gases, calculate the Density Correction Factor (DCF) with this formula:

Multiply this Density Correction Factor times the Index Number found in step 3, to determine your density-corrected Index Number. Go to the Orifice Selection Graph (Figure 2) and locate your Index Number along the bottom axis.
Figure 2 - Orifice Selection Graph Draw a vertical line at your Index Number. This line will intersect with the Max. Flow Rate lines for available valve orifices. Choose the orifice whose maximum flow rate exceeds your requirements. Example 1: You want to control your process pressure at 5 psia, with a flow rate of 750 sccm of N2. Your inlet pressure is 15 psig (30 psia), giving a differential pressure (delta P) of 25 psi. Your delta P of 25 psi gives an Index Number value of 175. Drawing a vertical line on the Orifice Selection Chart at 175 indicates that Orifice #2 would be the best choice.

Example 2: You want to control a vacuum process at a pressure of 0.5 psia, with a flow rate of 2000 sccm of He. Your inlet pressure is 15 psia, giving a differential pressure (delta P) of 15 psi, resulting in an uncorrected Index Number value of 90. The gas density correction for He is calculated as

Multiplying 2.6 by 90 gives a density-corrected Index Number of 234. Drawing a vertical line on the Orifice Selection Chart at 234 indicates Orifice #3 would be the best choice.

This information subject to change without notice.

Learn more about 649B Downstream Pressure Controllers with Mass Flow Meter here

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