温馨提示：本站仅提供公开网络链接索引服务，不存储、不篡改任何第三方内容，所有内容版权归原作者所有
AI智能索引来源：http://www.mks.com/p/179C01351CS3BM
点击访问原文链接

179C01351CS3BM Mass Flow Meter

进入原网站 导航首页
179C01351CS3BM Mass Flow Meter MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Mass Flow Controllers & Meters Mass Flow Meters Legacy Mass Flow Meters 179C General Purpose Metal-Sealed 10-20,000 sccm Mass Flow Meters 179C01351CS3BM Mass Flow Meter, 50 sccm, 0.25 in. Tube, DB15, Metal Seal Model: 179C01351CS3BM Mass Flow Meter, 50 sccm, 0.25 in. Tube, DB15, Metal Seal Mass Flow Meter, 50 sccm, 0.25 in. Tube, DB15, Metal Seal Model: 179C01351CS3BM 14 Weeks Loading... Request a Quote Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to 179C01351CS3BM Mass Flow Meter, 50 sccm, 0.25 in. Tube, DB15, Metal Seal Continue Shopping View All Saved Lists     Compare Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to 179C01351CS3BM Mass Flow Meter, 50 sccm, 0.25 in. Tube, DB15, Metal Seal Continue Shopping View All Saved Lists Overview Overview The 179C01351CS3BM is a general purpose mass flow meter with a metal seal, rated for 50 sccm Full Scale (N2), with 0.25 inch tubes and a 15-Pin type D connector. It is designed to measure the flow of gases in a wide variety of applications. It provides fast, repeatable flow metering and is a direct form-fit-function replacement for the most common MFMs on the market today. 

Product Series Overview 179C General Purpose Metal-Sealed 10-20,000 sccm Mass Flow Meters Technical Specs Technical Specs Type Mass Flow Meter Calibration Gas N2 (or equivalent) Full Scale Flow Range 50 sccm Fitting Type 0.25 in. tube Analog I/O Connector 15-pin D-sub Seal Material Metal Maximum Inlet Pressure 500 psig Normal Operating Pressure Differential 10 Torr Typical Accuracy ±1.0% of Full Scale Repeatability ±0.2% of Full Scale Resolution 0.1% of Full Scale Zero Temperature Coefficient Span Temperature Coefficient Warm-up Time Operating Temperature 0 - 50°C Wetted Materials 316L stainless steel External Leak Integrity -9 Compliance CE Typical Current Required at Steady State ±15 VDC (±5%) @ 150 mA Digital I/O Level of Filtering ±15 VDC (±5%) @ 50 mA Valve State Technical Specs Type Mass Flow Meter Calibration Gas N2 (or equivalent) Full Scale Flow Range 50 sccm Fitting Type 0.25 in. tube Analog I/O Connector 15-pin D-sub Seal Material Metal Maximum Inlet Pressure 500 psig Normal Operating Pressure Differential 10 Torr Typical Accuracy ±1.0% of Full Scale Repeatability ±0.2% of Full Scale Resolution 0.1% of Full Scale Zero Temperature Coefficient Span Temperature Coefficient Warm-up Time Operating Temperature 0 - 50°C Wetted Materials 316L stainless steel External Leak Integrity -9 Compliance CE Typical Current Required at Steady State ±15 VDC (±5%) @ 150 mA Digital I/O Level of Filtering ±15 VDC (±5%) @ 50 mA Valve State Resources & Downloads Resources & Downloads Literature 179C All-Metal Mass Flo® Mass Flow Meter, 10 sccm - 20 slm (231.2 kB, PDF) Mass Flow Meter, 50 sccm, 0.25 in. Tube, DB15, Metal Seal PART: 179C01351CS3BM 14 Weeks Loading... Request a Quote    Compare Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to 179C01351CS3BM Mass Flow Meter, 50 sccm, 0.25 in. Tube, DB15, Metal Seal Continue Shopping View All Saved Lists Overview Technical Specs Resources & Downloads Need help? Contact an Applications Specialist by sending us an email 179C01351CS3BM - Drawings & CAD Additional CAD file downloads are not available for this product. CAD File Downloads: Loading... Download Close Close Close 179C01351CS3BM - Drawings Additional drawings are not available for this product. Close Close 179C01351CS3BM

©2026 MKS Inc. All rights reserved.

Terms of UsePrivacy Mon.-Fri. 8:30-17:00 CST Contact Us Careers Legal About Us Investors Facebook YouTube LinkedIn Sign In

Email Address  Required Password:  Required Need a new account? Register Password Reset Enter your email address below to reset your account password. Email Address:  Required Cancel Password Reset
Email Verification Required


Sign In Cart Items Updated

Close Remove Product Remove this product from your comparison list?
Cancel Check Order Status Provide an order number and postal code to check the status of an order or download an invoice for an order that has shipped. Login to view your complete order history.
Order Number: Required Delivery ZIP/Postal Code:  Required

Sign In Required



To access this and other valuable technical resources, please sign in or register for a new online account. Cancel Add to Cart Mass Flow Meter, 50 sccm, 0.25 in. Tube, DB15, Metal Seal Part:  179C01351CS3BM Availability:  14 Weeks Add to Cart Also available on Newport.com Qty:  Availability:  14 Weeks Shop at Newport.com  Ultra-High Velocity Learn More Invalid VAT ID

VAT ID has invalid format. It will not be saved with the order when submitted.
Cancel   added to your cart Mass Flow Meter, 50 sccm, 0.25 in. Tube, DB15, Metal Seal Part:  179C01351CS3BM Availability:  View Cart & Checkout Continue Shopping   added to quote Model:  179C01351CS3BM Request Quote Continue Shopping
Close

智能索引记录