390 Micro-Ion ATM Modular Vacuum Gauge

390 Micro-Ion ATM Modular Vacuum Gauge MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Granville-Phillips® Indirect Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Transducers 390 Micro-Ion® ATM Vacuum Transducers Print 390 Micro-Ion® ATM Modular Vacuum Pressure Transducers 390 Micro-Ion® ATM Modular Vacuum Pressure Transducers Products Configuration Options Features Accessories Resources Contact Us Overview

The Granville-Phillips® 390 Micro-Ion® module combines proven Micro-Ion ionization gauge technology with a miniature Conductron heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, this product is capable of providing accurate absolute pressure up to atmosphere along with precise indication of vacuum chamber differential pressure from ambient.

Continuous pressure measurement from 10-9 Torr to atmosphere Precision differential pressure measurement at atmosphere Dual ionization gauge filaments increase equipment uptime Optional set point relays for process control Analog, RS-485, DeviceNet or EtherCAT interfaces Optional graphical LCD display See All Features Products Show Filters:  View all products Compare Description Compatibility sortOrder rankScore ranking Drawings, CAD & Specs Fitting Type Digital Communication Display Relays Availability Featured Item Price Brand 390410-0-YG-T
Loading... Quote Loading... Vacuum Gauge, Micro-Ion ATM, 2.75 in. CF, Analog 14 Weeks 390410-0-YG-T Vacuum Gauge, Micro-Ion ATM, 2.75 in. CF, Analog UNIVERSAL 0.0 1.0 0.0 10.0 2.75 in. CF No No 0 14 Weeks Loading... Quote Loading... 390411-0-YE-T
Loading... Quote Loading... Vacuum Gauge, Micro-Ion ATM, Display, NW25 ISO-KF, Analog Contact Us 390411-0-YE-T Vacuum Gauge, Micro-Ion ATM, Display, NW25 ISO-KF, Analog UNIVERSAL 0.0 1.0 0.0 10.0 NW25 ISO-KF No Graphics LCD 0 Contact Us Loading... Quote Loading... 390511-2-YE-T
Loading... Quote Loading... Vacuum Gauge, Micro-Ion ATM, Display, NW25-KF, RS485, 2 Relays 14 Weeks 390511-2-YE-T Vacuum Gauge, Micro-Ion ATM, Display, NW25-KF, RS485, 2 Relays UNIVERSAL 0.0 1.0 0.0 10.0 ISO-KF NW25 RS485 Graphics LCD 2 14 Weeks Loading... Quote Loading... 390511-2-YG-T
Loading... Quote Loading... Vacuum Gauge, Micro-Ion ATM, Display, 2.75 in. CF, RS485, 2 Relays Contact Us 390511-2-YG-T Vacuum Gauge, Micro-Ion ATM, Display, 2.75 in. CF, RS485, 2 Relays UNIVERSAL 0.0 1.0 0.0 10.0 2.75 in. CF RS485 Graphics LCD 2 Contact Us Loading... Quote Loading... 390511-3-YE-T
Loading... Quote Loading... Vacuum Gauge, Micro-Ion ATM, Display, NW25 ISO-KF, RS-485, Analog Contact Us 390511-3-YE-T Vacuum Gauge, Micro-Ion ATM, Display, NW25 ISO-KF, RS-485, Analog UNIVERSAL 0.0 1.0 0.0 10.0 ISO-KF NW25 RS485 Graphics LCD 3 Contact Us Loading... Quote Loading... 390511-3-YG-T
Loading... Quote Loading... Vacuum Gauge, Micro-Ion ATM, Display, 2.75 in. CF Flange, RS-485, Analog Contact Us 390511-3-YG-T Vacuum Gauge, Micro-Ion ATM, Display, 2.75 in. CF Flange, RS-485, Analog UNIVERSAL 0.0 1.0 0.0 10.0 2.75 in. CF RS485 Graphics LCD 3 Contact Us Loading... Quote Loading... 390610-2-YG-T
Loading... Quote Loading... Vacuum Gauge, Micro-Ion ATM, Display, 2.75 in. CF, DeviceNet, 2 Relays Contact Us 390610-2-YG-T Vacuum Gauge, Micro-Ion ATM, Display, 2.75 in. CF, DeviceNet, 2 Relays UNIVERSAL 0.0 1.0 0.0 10.0 2.75 in. CF DeviceNet No 2 Contact Us Loading... Quote Loading... 390611-3-YG-T
Loading... Quote Loading... Vacuum Gauge, Micro-Ion ATM, Display, 2.75 in. CF, DeviceNet, 3 Relays Contact Us 390611-3-YG-T Vacuum Gauge, Micro-Ion ATM, Display, 2.75 in. CF, DeviceNet, 3 Relays UNIVERSAL 0.0 1.0 0.0 10.0 2.75 in. CF DeviceNet Graphics LCD 3 Contact Us Loading... Quote Loading... 390710-2-YE-T
Loading... Quote Loading... Vacuum Gauge, Micro-Ion ATM, NW25-KF, EtherCAT, 2 Relays 14 Weeks 390710-2-YE-T Vacuum Gauge, Micro-Ion ATM, NW25-KF, EtherCAT, 2 Relays UNIVERSAL 0.0 1.0 0.0 10.0 ISO-KF NW25 EtherCAT No 2 14 Weeks Loading... Quote Loading... 390710-2-YG-T
Loading... Quote Loading... Vacuum Gauge, Micro-Ion ATM, 2.75 in. CF, EtherCAT, 2 Relays 14 Weeks 390710-2-YG-T Vacuum Gauge, Micro-Ion ATM, 2.75 in. CF, EtherCAT, 2 Relays UNIVERSAL 0.0 1.0 0.0 10.0 2.75 in. CF EtherCAT No 2 14 Weeks Loading... Quote Loading... Show All Configuration Options The following options are available for 390 Micro-Ion® Vacuum Pressure Transducers
Ordering Code Example: 390410-2-YG-T

Configuration Option Option Code Micro-Ion ATM Module RS-485/Analog 390510 RS-485/Analog with digital display 390511 DeviceNet 390610 DeviceNet with digital display 390611 EtherCAT 390710 Set Point Relays Two (EtherCAT is only available with 2 set point relays) 2 Three 3 Ionization Gauge Filament Types Yttria-coated iridium filaments Y Tungsten T Vacuum Connections NW16-KF D NW25-KF E NW40-KF K 1.33 in. (NW16-CF) ConFlat-type F 2.75 in. (NW35-CF) ConFlat-type G 0.5 in. VCR-type Male H Measurement Units Torr T mbar M Pascal P The following options are available for 390 Micro-Ion® Replacement Sensors
Ordering Code Example: 390100-Y-E

Configuration Option Option Code Micro-Ion ATM Module Replacement gauge 390100 Ionization Gauge Filament Types Yttria-coated iridium Y Tungsten T Vacuum Connections NW16-KF D NW25-KF E NW40-KF K 1.33 in. (NW16-CF) ConFlat-type F 2.75 in. (NW35-CF) ConFlat-type G 0.5 in. VCR-type Male H  Show All Configuration Options Description 390 Vacuum Transducer, Micro-Ion, Conductron, Piezo, Series 390 Loading... Quote Loading... 390-micro-ion-atm-modular-vacuum-gauge - Drawings & CAD Additional CAD file downloads are not available for this product. CAD File Downloads: Loading... Download Close Close Close 390-micro-ion-atm-modular-vacuum-gauge - Drawings Additional drawings are not available for this product. Close Close Specifications Absolute Measurement Range 1 x 10-9 Torr to atmosphere
1.33 x 10-9 mbar to atmosphere
1.33 x 10-7 Pascal to atmosphere
(air or N2) Differential Measurement Range -750 to +250 Torr
-999 to +188 mbar
-99.9 to 18.8 kPascal Type vacuum transducer Sensor Ionization gauge Display Graphics LCD (optional) Operating Temperature 10° to 40°C (50° to 104°F) Maximum Bakeout Temperature 105°C (221°F) maximum, with electronics removed Storage Temperature -40° to +70°C (-40° to +158°F) Analog Output Absolute: Logarithmic, 0.5 to 7.0 VDC, 0.5 V per decade
Differential: Linear 1-5 VDC, -750 to +250 Torr Internal Volume 10.8 cc Exposed Materials 304 stainless steel, tantalum, tungsten, yttria-coated iridium, alumina, CuAg eutectic, Kovar, gold or nickel plated Kovar, borosilicate glass Electronic Casing and Flange Aluminum Extrusion with Powder-coat Weight 728.5 gm (25.7 oz) - 2.75 ConFlat fitting) Compliance CE Span Temperature Coefficient -10 X-ray Limit 3 x 10-10 Torr
4 x 10-10 mbar
4 x 10-8 Pascal LED Indicator Module status Features Unique Sensor Design Traditionally, accurate measurement across a wide vacuum range required multiple sensors, multiple vacuum system ports, associated cables and electronics. The unique Micro-Ion® ATM sensor design eliminates thermal effects that can influence the performance of the heat loss sensor at higher pressures. The Micro-Ion ATM module combines multiple sensors in one microprocessor-based design, reducing overall cost of ownership, while enhancing vacuum measurement performance.

Cross Section of the Micro-Ion Gauge Analog Output and Digital Interface The full range pressure measurement is output as a single analog signal or available through optional serial RS-485, DeviceNet™ or EtherCAT™ digital interfaces. The RS-485 interface allows for communications between the module and host controller, and for module configuration. The DeviceNet interface provides high speed access to pressure measurement and easy configuration of gauge parameters. The EtherCAT interface provides "processing on the fly" principal, with minimizing processing delays.  The RS-485, DeviceNet and EtherCAT versions have up to three optional set point relays that can be configured for process control, with the ability to assign the relays at any pressure across the vacuum pressure range or to a specific differential pressure value.

Sensor Switching Points Compact Design One Micro-Ion gauge, a heat-loss sensor with a barometric diaphragm sensor, an absolute pressure diaphragm, and control electronics are all housed in a compact, modular package.

Field-Replaceable Gauge Assembly The vacuum gauge assembly can be quickly and easily replaced in the field using only a screwdriver after removal from the vacuum system.

Accessories 390 Micro-Ion® ATM Replacement Gauges The vacuum gauge assembly can be quickly and easily replaced in the field using only a screwdriver after removal from the vacuum system.

Compare Description Compatibility Drawings, CAD & Specs Avail. Price 390100-YDReplacement Vacuum Gauge, 390 Micro-Ion, Yttria-coated Iridium, NW16 ISO-KF UNIVERSAL Contact Us Loading... Quote Loading... 390100-YEReplacement Vacuum Gauge, 390 Micro-Ion, Yttria-coated Iridium, NW25 ISO-KF UNIVERSAL Contact Us Loading... Quote Loading... 390100-YFReplacement Vacuum Gauge, 390 Micro-Ion, Yttria-coated Iridium, 1.33 in. CF Flange UNIVERSAL Contact Us Loading... Quote Loading... 390100-YGReplacement Vacuum Gauge,390 Micro-Ion, Yttria-coated Iridium, 2.75 in. CF Flange UNIVERSAL Contact Us Loading... Quote Loading... 390100-YHReplacement Vacuum Gauge, 390 Micro-Ion, Yttria-coated Iridium, 0.5 in. VCR Male UNIVERSAL Contact Us Loading... Quote Loading... 390100-YKReplacement Vacuum Gauge, 390 Micro-Ion, Yttria-coated Iridium, NW40 ISO-KF UNIVERSAL Contact Us Loading... Quote Loading... Power Supply

Compare Description Compatibility Drawings, CAD & Specs Avail. Price 390200-1US AC Adapter, 24V DC Power Supply, 100W, 120V AC input, 390/392 Series UNIVERSAL 14 Weeks Loading... Quote Loading... Resources Literature Vacuum Measurement Product Guide (711.5 kB, PDF) 390 Micro-Ion® ATM Modules (470.8 kB, PDF) Manuals 390, 392 Vacuum Transducer Pinouts (219.2 kB, PDF) 390 Micro-Ion® ATM Module Instruction Manual 390412-X-XX-X   (80.5 kB, PDF) 390 Micro-Ion® ATM Four-Sensor Combination Vacuum Gauge ModuleManual   (1.1 MB, PDF) 390 Micro-Ion® ATM Gauge Removal and Replacement Procedure   (162.5 kB, PDF) 390 Micro-Ion® Gauge with Filament Status Output Manual Addendum   (111.5 kB, PDF) 390 Micro-Ion® ATM EtherCAT Manual   (848.6 kB, PDF) Device Description Files 390 Micro-Ion® ATM Module EDS File (26.9 kB, EDS) Drawings & CADs 390 Micro-Ion ATM Vacuum Transducer Model Files 390-micro-ion-atm-modular-vacuum-gauge Related Products 392 Micro-Ion® Plus Vacuum Transducers 355 Micro-Ion® Hot Cathode Vacuum Transducers 355 Micro-Ion® Bayard-Alpert Vacuum Sensors Related Products 392 Micro-Ion® Plus Vacuum Transducers 355 Micro-Ion® Hot Cathode Vacuum Transducers 355 Micro-Ion® Bayard-Alpert Vacuum Sensors Need help? Contact an Applications Specialist by sending us an email

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