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641B12TS1V42V Gauge Pressure Controller - AI智能索引
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641B12TS1V42V Gauge Pressure Controller

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641B12TS1V42V Gauge Pressure Controller MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Pressure Controllers and Valves Pressure Controllers Integrated Upstream & Downstream Pressure Controllers 641B Integrated Gauge Pressure Controllers 641B12TS1V42V Gauge Pressure Controller, 100 Torr, 10,000 sccm, 0.25 in. Tube, Viton, Viton Valve Plug Model: 641B12TS1V42V Gauge Pressure Controller, 100 Torr, 10,000 sccm, 0.25 in. Tube, Viton, Viton Valve Plug Gauge Pressure Controller, 100 Torr, 10,000 sccm, 0.25 in. Tube, Viton, Viton Valve Plug Model: 641B12TS1V42V 15 Weeks Loading... Request a Quote Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to 641B12TS1V42V Gauge Pressure Controller, 100 Torr, 10,000 sccm, 0.25 in. Tube, Viton, Viton Valve Plug Continue Shopping View All Saved Lists     Compare Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to 641B12TS1V42V Gauge Pressure Controller, 100 Torr, 10,000 sccm, 0.25 in. Tube, Viton, Viton Valve Plug Continue Shopping View All Saved Lists Overview Overview The 641B12TS1V42V Gauge Pressure Controller features 100 Torr full scale pressure measurement, a 10,000 sccm valve orifice, and 0.25 in. male tube fittings. It has a Viton seal and a Viton valve plug. This gauge pressure controller is a self-contained, compact, closed-loop electronic control system used for upstream or downstream pressure control. It contains a Baratron® Capacitance Manometer, normally-closed proportioning control valve, and closed-loop control electronics. Electrically similar to a standard MFC, the 641B Gage Pressure Controller for Closed-Loop Electronic Pressure Control is powered by ±15 VDC at only 200 mA, permitting use with standard power supply/display electronics. The pressure output and input control signals are linear 0-5 or 0-10 VDC, user-selectable. Two trip points are included in the 641B, with LED status indicators, for use as simple on/off process limits.

Product Series Overview 641B Integrated Gauge Pressure Controllers Technical Specs Technical Specs Type Gauge Pressure Controller Pressure Range 100 Torr Fitting Type 0.25 in. tube Valve Position Normally closed Valve Seat Viton Valve Orifice No. 4 (10,000 sccm) Trip Points Two open-collector transistors, Rated 250 mA @ 30 VDC, Adjustable 1 - 100% of Full Scale Plug Material Viton Pressure Resolution Pressure Control Accuracy ±0.2% of Full Scale Transducer Over Pressure Limit 45 psia or 2x Full Scale, whichever is greater Maximum Differential Pressure 150 psi for 50 - 10,000 sccm orifices, 30 psi for 20,000 and 50,000 sccm orifices (consistent with transducer overpressure limit) Control Mode Downstream Pressure Measurement Accuracy ±0.5% of Reading (includes linearity, hysteresis, and repeatability) Zero Temperature Coefficient ±0.02% of Full Scale/°C Span Temperature Coefficient ±0.04% of Reading/°C Control Range >2 to 100% of Full Scale Typical Response Time Operating Temperature 0 - 50°C (32 - 122°F) Storage Temperature -20 - 80°C (-4 - 176°F) External Leak Integrity -9 scc/sec He Leak Integrity Through Closed Valve Elastomer valve: -4 scc/sec He, Metal valve: Wetted Materials 316L S.S., 316L/VAR S.S., Inconel, Nickel, plus valve seal Power Required ±15 VDC ±5%, 200 mA max. Connector-Interface 15-pin male type D Indicators Green LED on when actuated RFI Sensitivity SAMA 33.1, 1-abc: Input-Output Signals 0-5 VDC standard, 0-10 VDC optional Hysteresis 3% of Full Scale Cable Length 100 ft. (30 m) max. Weight 2.54 lbs. (1.15 kg) Dimensions 1.5 x 4.88 x 5.5 in. (38.1 x 124 x 140 mm) Compliance CE Technical Specs Type Gauge Pressure Controller Pressure Range 100 Torr Fitting Type 0.25 in. tube Valve Position Normally closed Valve Seat Viton Valve Orifice No. 4 (10,000 sccm) Trip Points Two open-collector transistors, Rated 250 mA @ 30 VDC, Adjustable 1 - 100% of Full Scale Plug Material Viton Pressure Resolution Pressure Control Accuracy ±0.2% of Full Scale Transducer Over Pressure Limit 45 psia or 2x Full Scale, whichever is greater Maximum Differential Pressure 150 psi for 50 - 10,000 sccm orifices, 30 psi for 20,000 and 50,000 sccm orifices (consistent with transducer overpressure limit) Control Mode Downstream Pressure Measurement Accuracy ±0.5% of Reading (includes linearity, hysteresis, and repeatability) Zero Temperature Coefficient ±0.02% of Full Scale/°C Span Temperature Coefficient ±0.04% of Reading/°C Control Range >2 to 100% of Full Scale Typical Response Time Operating Temperature 0 - 50°C (32 - 122°F) Storage Temperature -20 - 80°C (-4 - 176°F) External Leak Integrity -9 scc/sec He Leak Integrity Through Closed Valve Elastomer valve: -4 scc/sec He, Metal valve: Wetted Materials 316L S.S., 316L/VAR S.S., Inconel, Nickel, plus valve seal Power Required ±15 VDC ±5%, 200 mA max. Connector-Interface 15-pin male type D Indicators Green LED on when actuated RFI Sensitivity SAMA 33.1, 1-abc: Input-Output Signals 0-5 VDC standard, 0-10 VDC optional Hysteresis 3% of Full Scale Cable Length 100 ft. (30 m) max. Weight 2.54 lbs. (1.15 kg) Dimensions 1.5 x 4.88 x 5.5 in. (38.1 x 124 x 140 mm) Compliance CE Resources & Downloads Resources & Downloads Literature 640B/641B Pressure Controller for Closed-Loop Electronic Pressure Control (231.6 kB, PDF) Gauge Pressure Controller, 100 Torr, 10,000 sccm, 0.25 in. Tube, Viton, Viton Valve Plug PART: 641B12TS1V42V 15 Weeks Loading... Request a Quote    Compare Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to 641B12TS1V42V Gauge Pressure Controller, 100 Torr, 10,000 sccm, 0.25 in. Tube, Viton, Viton Valve Plug Continue Shopping View All Saved Lists Overview Technical Specs Resources & Downloads Need help? Contact an Applications Specialist by sending us an email 641B12TS1V42V - Drawings & CAD Additional CAD file downloads are not available for this product. CAD File Downloads: Loading... Download Close Close Close 641B12TS1V42V - Drawings Additional drawings are not available for this product. Close Close 641B12TS1V42V

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