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902B-52010 Piezo Vacuum Transducer - AI智能索引
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902B-52010 Piezo Vacuum Transducer

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902B-52010 Piezo Vacuum Transducer MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

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Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Granville-Phillips® Indirect Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Transducers 902B Absolute Piezo Vacuum Transducers 902B-52010 Piezo Vacuum Transducer, 0.1-1000 Torr, 8 VCR, RS485, 0-10 VDC, DB9, 1 Relay Model: 902B-52010 Piezo Vacuum Transducer, 0.1-1000 Torr, 8 VCR, RS485, 0-10 VDC, DB9, 1 Relay Piezo Vacuum Transducer, 0.1-1000 Torr, 8 VCR, RS485, 0-10 VDC, DB9, 1 Relay Model: 902B-52010 Contact Us Loading... Request a Quote Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to 902B-52010 Piezo Vacuum Transducer, 0.1-1000 Torr, 8 VCR, RS485, 0-10 VDC, DB9, 1 Relay Continue Shopping View All Saved Lists     Compare Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to 902B-52010 Piezo Vacuum Transducer, 0.1-1000 Torr, 8 VCR, RS485, 0-10 VDC, DB9, 1 Relay Continue Shopping View All Saved Lists Overview Overview The 902B-52010 Absolute Piezo Vacuum Transducer combines the pressure measurement technology of a MEMS-based Piezo sensor with a metal sealed stainless steel 316 diaphragm and integrated electronics. It features an 8 VCR fitting and a RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. In addition, the 902B has a 16 bit 0-10 VDC analog pressure output that is linear at 10 mV/Torr and can be interfaced to external analog equipment for pressure readout or close loop control. It has a male DB9 connector offering backward compatibility with the first generation 902. One mechanical relay is included for process control use, for example interlocking isolation valves and vacuum pumps. The SPDT relay includes both normally open and closed contacts and can be set to energize above or below a set point trip value. Many applications require continuous surveillance of system pressure and warning of atypical pressure levels. The flexible relay options of the 902B can provide warning to external safety logic in cases of abnormal pressure and loss of power. The 902B provides economical, absolute pressure measurement that is independent of gas type. With a measurement range of 0.1 to 1000 Torr Full Scale, the sensor is ideal for a wide range of applications including semiconductor manufacturing, thin film coatings, freeze-drying, analytical instruments, medical devices, automotive and aerospace. The Series 902B Piezo transducer is based on a silicon piezo resistive pressure sensor that measures absolute vacuum pressure with an accuracy of ±1% of Reading (from 10-1000 Torr). The sensor is robust and resistant to mechanical vibration and g-forces. Furthermore, the sensor technology makes the transducer gas type independent. With only stainless steel 316 exposed to the process gas, the transducer can be used in many demanding applications. The compact design of the 902B significantly reduces the amount of space occupied by the transducer. This is particularly appealing to system designers and allows design of compact systems or equipment. The 902B can be used as a standalone device or together with the PDR900 controller.

Product Series Overview 902B Absolute Piezo Vacuum Transducers Technical Specs Technical Specs Absolute Measurement Range 0.1 to 1000 Torr Digital Communication RS485 Type Vacuum Transducer Sensor Stainless steel enclosed Piezo (Absolute Pressure) Display No Seal Material Viton Enclosure Standard Interface RS485/analog Fitting Type 8 VCR female Installation Orientation Any Set Point Range 1 - 1000 Torr Analog Output 0-10 VDC (Linear 10 mV/Torr) Compliance CE Connector, Relays 9-pin sub-D male, 1 relay Technical Specs Absolute Measurement Range 0.1 to 1000 Torr Digital Communication RS485 Type Vacuum Transducer Sensor Stainless steel enclosed Piezo (Absolute Pressure) Display No Seal Material Viton Enclosure Standard Interface RS485/analog Fitting Type 8 VCR female Installation Orientation Any Set Point Range 1 - 1000 Torr Analog Output 0-10 VDC (Linear 10 mV/Torr) Compliance CE Connector, Relays 9-pin sub-D male, 1 relay Resources & Downloads Resources & Downloads 3D Product Models Download CAD Files Drawings & CADs 902B Transducer Dimensional Drawing (74.3 kB, PDF) Literature 902B Absolute Piezo Vacuum Transducer (279.9 kB, PDF) Piezo Vacuum Transducer, 0.1-1000 Torr, 8 VCR, RS485, 0-10 VDC, DB9, 1 Relay PART: 902B-52010 Contact Us Loading... Request a Quote    Compare Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to 902B-52010 Piezo Vacuum Transducer, 0.1-1000 Torr, 8 VCR, RS485, 0-10 VDC, DB9, 1 Relay Continue Shopping View All Saved Lists Overview Technical Specs Resources & Downloads Need help? Contact an Applications Specialist by sending us an email 902B-52010 - Drawings & CAD Additional CAD file downloads are not available for this product. CAD File Downloads: Loading... Download Close Close Close 902B-52010 - Drawings Additional drawings are not available for this product. Close Close 902B-52010

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