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910-21030 Vacuum Transducer

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910-21030 Vacuum Transducer MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

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Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Granville-Phillips® Indirect Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Transducers 910 DualTrans™ MicroPirani™ - Absolute Piezo Vacuum Transducers 910-21030 Vacuum Transducer, MicroPirani-Absolute Piezo, NW25 ISO-KF, RS232 Model: 910-21030 Vacuum Transducer, MicroPirani-Absolute Piezo, NW25 ISO-KF, RS232 Vacuum Transducer, MicroPirani-Absolute Piezo, NW25 ISO-KF, RS232 Model: 910-21030 Contact Us Loading... Request a Quote Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to 910-21030 Vacuum Transducer, MicroPirani-Absolute Piezo, NW25 ISO-KF, RS232 Continue Shopping View All Saved Lists     Compare Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to 910-21030 Vacuum Transducer, MicroPirani-Absolute Piezo, NW25 ISO-KF, RS232 Continue Shopping View All Saved Lists Overview Overview The 910-21030 DualTrans™ MicroPirani™/Absolute Piezo Vacuum Transducer is designed specifically for wide-range pressure measurement applications and features a size NW25 ISO-KF flange fitting. The combined output provides significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges. The 910 combines two pressure measurement technologies to provide superior performance and functionality. The 910 provides gas independent absolute pressure measurement from 11 to 1500 Torr with increased accuracy over thermal conductivity sensors. Unlike traditional Pirani gauges, the sensor element in the MicroPirani is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. As a result of the MicroPirani technology, the 910 can read pressures down to 10-5 Torr, two decades below a standard Pirani sensor. The sensor design minimizes the effects of convection, subsequently the 910 can be mounted in any orientation without compromising accuracy. The Piezo is an absolute pressure sensor, providing a direct pressure reading, allowing the measurement to be gas independent. The Piezo sensor measures from less than 1 Torr to 1500 Torr. The 910 has RS232 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. The 910 also has an analog pressure output of 1VDC/decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. The 910 has three mechanical relays which can be used for process control, for example interlocking isolation valves and vacuum pumps. Each set point can be assigned either to the piezo measurement or the combined absolute MicroPirani/Piezo measurement. The 910 compact design significantly reduces the amount of space occupied by a vacuum gauge. This is particularly appealing to system designers and allows for a more compact vacuum system.

Product Series Overview 910 DualTrans™ MicroPirani™ - Absolute Piezo Vacuum Transducers Technical Specs Technical Specs Absolute Measurement Range 1.0 x 10-5 to 1500 Torr Digital Communication RS232 Type Vacuum Transducer Sensor MicroPirani (MEMS Thermal Conductivity), Piezo absolute (MEMS diaphragm) Display No Seal Material Viton Enclosure Standard Electrical Connector 15-pin, High Density, D-sub male Interface RS232/analog Relays 3 Fitting Type NW25 ISO-KF Installation Orientation Any Set Point Range 5.0 x 10-4 - 1500 Torr, Absolute Calibration Gas Air, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, Xenon, Neon, Gas independent above 11 Torr Operating Temperature 0 - 40°C (32 - 104°F) Maximum Bakeout Temperature 85°C (185°F) Digital Controls Zero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable, transducer status, switch, LED test Digital Status Pressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturer Analog Output 1-9.2 VDC, (1 VDC per Decade) Analog Output Resolution 16 bit Relay Contact Rating 1 Amp @ 30 VAC/DC, resistive Relay Response 100 msec maximum Power Requirements 9 - 30 VDC, Accuracy 5 x 10-4 to 1 x 10-3 Torr ±10% of Reading, 1 x 10-3 to 11 Torr ±5% of Reading, 11 - 1000 Torr ±0.75% of Reading Repeatability 5 x 10-4 to 10-3 Torr ±8% of Reading, 10-3 Torr to 11 Torr ±2% of Reading, 11 - 1000 Torr ±0.2% of Reading Overpressure Limit 2250 Torr (absolute) Exposed Materials Silicon, SiO2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton Electronic Casing and Flange 304 stainless steel Compliance CE Digital Baud Rates 4800 - 230400 Baud Technical Specs Absolute Measurement Range 1.0 x 10-5 to 1500 Torr Digital Communication RS232 Type Vacuum Transducer Sensor MicroPirani (MEMS Thermal Conductivity), Piezo absolute (MEMS diaphragm) Display No Seal Material Viton Enclosure Standard Electrical Connector 15-pin, High Density, D-sub male Interface RS232/analog Relays 3 Fitting Type NW25 ISO-KF Installation Orientation Any Set Point Range 5.0 x 10-4 - 1500 Torr, Absolute Calibration Gas Air, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, Xenon, Neon, Gas independent above 11 Torr Operating Temperature 0 - 40°C (32 - 104°F) Maximum Bakeout Temperature 85°C (185°F) Digital Controls Zero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable, transducer status, switch, LED test Digital Status Pressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturer Analog Output 1-9.2 VDC, (1 VDC per Decade) Analog Output Resolution 16 bit Relay Contact Rating 1 Amp @ 30 VAC/DC, resistive Relay Response 100 msec maximum Power Requirements 9 - 30 VDC, Accuracy 5 x 10-4 to 1 x 10-3 Torr ±10% of Reading, 1 x 10-3 to 11 Torr ±5% of Reading, 11 - 1000 Torr ±0.75% of Reading Repeatability 5 x 10-4 to 10-3 Torr ±8% of Reading, 10-3 Torr to 11 Torr ±2% of Reading, 11 - 1000 Torr ±0.2% of Reading Overpressure Limit 2250 Torr (absolute) Exposed Materials Silicon, SiO2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton Electronic Casing and Flange 304 stainless steel Compliance CE Digital Baud Rates 4800 - 230400 Baud Resources & Downloads Resources & Downloads 3D Product Models Download CAD Files Drawings & CADs 910 Vacuum Transducer Dimensional Drawing (66.8 kB, PDF) Literature 910 DualTrans™ MicroPirani™/Absolute Piezo Vacuum Transducer (297.3 kB, PDF) Vacuum Transducer, MicroPirani-Absolute Piezo, NW25 ISO-KF, RS232 PART: 910-21030 Contact Us Loading... Request a Quote    Compare Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to 910-21030 Vacuum Transducer, MicroPirani-Absolute Piezo, NW25 ISO-KF, RS232 Continue Shopping View All Saved Lists Overview Technical Specs Resources & Downloads Need help? Contact an Applications Specialist by sending us an email 910-21030 - Drawings & CAD Additional CAD file downloads are not available for this product. CAD File Downloads: Loading... Download Close Close Close 910-21030 - Drawings Additional drawings are not available for this product. Close Close 910-21030

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