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971B-71030 Vacuum Pressure Transducer

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971B-71030 Vacuum Pressure Transducer MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Granville-Phillips® Indirect Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Transducers 971B UniMag™ Cold Cathode Vacuum Transducers 971B-71030 Vacuum Pressure Transducer, Cold Cathode, 2.75 in. CF, RS232, 3 Relays Model: 971B-71030 Vacuum Pressure Transducer, Cold Cathode, 2.75 in. CF, RS232, 3 Relays Vacuum Pressure Transducer, Cold Cathode, 2.75 in. CF, RS232, 3 Relays Model: 971B-71030 Contact Us Loading... Request a Quote Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to 971B-71030 Vacuum Pressure Transducer, Cold Cathode, 2.75 in. CF, RS232, 3 Relays Continue Shopping View All Saved Lists     Compare Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to 971B-71030 Vacuum Pressure Transducer, Cold Cathode, 2.75 in. CF, RS232, 3 Relays Continue Shopping View All Saved Lists Overview Overview The 971B-71030 UniMag Cold Cathode Inverted Magnetron Vacuum Gauge offers a measurement range from 1x10-8 Torr to 5x10-3 Torr and features a 2.75 inch CF flange fitting. It has an RS232 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. Three included mechanical relays can be used for process control like interlocking valves or pumps. UniMag transducers are based on cold cathode inverted magnetron sensor technology. The 971B is a cost effective solution for base pressure measurement and control. All Series 970B transducers have an analog pressure output of 0.5VDC/decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. The Series 970B have standard 15 pin HD Sub-D connector. It can also emulate analog voltage outputs from a variety of other vacuum transducers. The emulation feature can be used to upgrade and replace other vendors’ gauges in OEM applications without changing system software.

Product Series Overview 971B UniMag™ Cold Cathode Vacuum Transducers Technical Specs Technical Specs Absolute Measurement Range 1.0 x 10-8 to 0.005 Torr Digital Communication RS232 Type Vacuum Transducer Sensor Cold Cathode Display No Seal Material Viton Enclosure Standard Electrical Connector 15-pin, High Density, D-sub male Interface RS232/analog Relays 3 Fitting Type 2.75 in. CF Installation Orientation Any Set Point Range 1 x 10-8 Torr to 5 x 10-3 Torr Absolute Calibration Gas Nitrogen Operating Temperature 0 - 40°C (32 - 104°F) Maximum Bakeout Temperature 85°C (185°F) Digital Controls Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction, set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type Digital Status Pressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions Analog Output 0.5 VDC per Decade Relay Contact Rating 1 A @ 30VAC/DC, resistive Power Requirements 9 - 30 VDC, 2 Watts Accuracy 5 x 10-8 Torr to 10-3 ±30% of Reading (Typical) Repeatability 5 x 10-8 Torr to 10-3 ±30% of Reading (Typical) Overpressure Limit 1500 Torr Internal Volume 21 cm3 Exposed Materials 304 and 403 stainless steel, Viton, Cu-Ni and Ag-Cu alloy, ceramic, titanium Electronic Casing and Flange 304 stainless steel Compliance CE Technical Specs Absolute Measurement Range 1.0 x 10-8 to 0.005 Torr Digital Communication RS232 Type Vacuum Transducer Sensor Cold Cathode Display No Seal Material Viton Enclosure Standard Electrical Connector 15-pin, High Density, D-sub male Interface RS232/analog Relays 3 Fitting Type 2.75 in. CF Installation Orientation Any Set Point Range 1 x 10-8 Torr to 5 x 10-3 Torr Absolute Calibration Gas Nitrogen Operating Temperature 0 - 40°C (32 - 104°F) Maximum Bakeout Temperature 85°C (185°F) Digital Controls Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction, set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type Digital Status Pressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions Analog Output 0.5 VDC per Decade Relay Contact Rating 1 A @ 30VAC/DC, resistive Power Requirements 9 - 30 VDC, 2 Watts Accuracy 5 x 10-8 Torr to 10-3 ±30% of Reading (Typical) Repeatability 5 x 10-8 Torr to 10-3 ±30% of Reading (Typical) Overpressure Limit 1500 Torr Internal Volume 21 cm3 Exposed Materials 304 and 403 stainless steel, Viton, Cu-Ni and Ag-Cu alloy, ceramic, titanium Electronic Casing and Flange 304 stainless steel Compliance CE Resources & Downloads Resources & Downloads Literature 970 Cold Cathode Transducers (250.9 kB, PDF) 3D Product Models Download CAD Files Drawings & CADs 971 UniMag™ Cold Cathode Transducer Dimensional Drawing (242.3 kB, PDF) Vacuum Pressure Transducer, Cold Cathode, 2.75 in. CF, RS232, 3 Relays PART: 971B-71030 Contact Us Loading... Request a Quote    Compare Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to 971B-71030 Vacuum Pressure Transducer, Cold Cathode, 2.75 in. CF, RS232, 3 Relays Continue Shopping View All Saved Lists Overview Technical Specs Resources & Downloads Need help? Contact an Applications Specialist by sending us an email 971B-71030 - Drawings & CAD Additional CAD file downloads are not available for this product. CAD File Downloads: Loading... Download Close Close Close 971B-71030 - Drawings Additional drawings are not available for this product. Close Close 971B-71030

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