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974B-71020 Vacuum Transducer

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974B-71020 Vacuum Transducer MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Granville-Phillips® Indirect Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Transducers 974B QuadMag™ Cold Cathode - MicroPirani™ - Piezo Vacuum Transducers 974B-71020 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, 2.75 in. CF, RS232 Model: 974B-71020 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, 2.75 in. CF, RS232 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, 2.75 in. CF, RS232 Model: 974B-71020 Contact Us Loading... Request a Quote Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to 974B-71020 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, 2.75 in. CF, RS232 Continue Shopping View All Saved Lists     Compare Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to 974B-71020 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, 2.75 in. CF, RS232 Continue Shopping View All Saved Lists Overview Overview The 974B-71020 QuadMag Cold Cathode / MicroPirani / Piezo Transducer offers a measurement range from 1x10-8 to 1500 Torr and features a 2.75 inch CF flange fitting. It has an RS232 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. The 974B QuadMag has been specifically designed for pressure measurement within a vacuum loadlock. It has the capability to replace multiple pressure measurement devices on a loadlock with its absolute pressure measurement from atmosphere to 10-8 Torr and atmospheric switching capabilities. Subsequently, OEM’s can reduce costs with a simplified loadlock design. The 974B can be used on loadlocks or any vacuum chamber requiring both absolute pressure measurement and atmospheric switching capabilities. All Series 970B transducers have an analog pressure output of 0.5VDC/decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. The Series 970B have standard 15 pin HD Sub-D connector. It can also emulate analog voltage outputs from a variety of other vacuum transducers. The emulation feature can be used to upgrade and replace other vendors’ gauges in OEM applications without changing system software. The Series 970B has up to three mechanical relays which can be used for process control, examples are interlocking valves or pumps.

Product Series Overview 974B QuadMag™ Cold Cathode - MicroPirani™ - Piezo Vacuum Transducers Technical Specs Technical Specs Absolute Measurement Range 1.0 x 10-8 to 1500 Torr Differential Measurement Range -760 to +760 Torr Digital Communication RS232 Type Vacuum Transducer Sensor Cold Cathode,MicroPirani™ (MEMS Thermal Conductivity) and Piezo Differential (MEMS Diaphragm) Display No Seal Material Viton Enclosure Standard Electrical Connector 15-pin, High Density, D-sub male Interface RS232/analog Relays 0 Fitting Type 2.75 in. CF Installation Orientation Any Set Point Range Absolute: 1 x 10-8 Torr to 1000 Torr, Differential: -760 to +100 Torr Calibration Gas Nitrogen Operating Temperature 0 - 40°C (32 - 104°F) Maximum Bakeout Temperature 85°C (185°F) Digital Controls Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction, set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type Digital Status Pressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions Analog Output 0.5 VDC per Decade Power Requirements 9 - 30 VDC, 2 Watts Accuracy Absolute: 5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 50 Torr ±5% of Reading, 50 to 1000 Torr ±1% of Reading, Differential: -10 to +10 Torr ±10% of Reading, -100 to -10 Torr ±8% of Reading, -760 to -100 Torr ±1% of Reading, +10 to 100 Torr ±5% of Reading Repeatability Absolute: 5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 50 ±2% of Reading, 50 to 1000 Torr ±1% of Reading, Differential: -760 to +10 Torr ±1% of Reading Overpressure Limit 1500 Torr Internal Volume 21 cm3 Electronic Casing and Flange 304 stainless steel Compliance CE Zero Stability ±0.1% of Full Scale (Full Scale = 760 Torr) (typical) Differential Technical Specs Absolute Measurement Range 1.0 x 10-8 to 1500 Torr Differential Measurement Range -760 to +760 Torr Digital Communication RS232 Type Vacuum Transducer Sensor Cold Cathode,MicroPirani™ (MEMS Thermal Conductivity) and Piezo Differential (MEMS Diaphragm) Display No Seal Material Viton Enclosure Standard Electrical Connector 15-pin, High Density, D-sub male Interface RS232/analog Relays 0 Fitting Type 2.75 in. CF Installation Orientation Any Set Point Range Absolute: 1 x 10-8 Torr to 1000 Torr, Differential: -760 to +100 Torr Calibration Gas Nitrogen Operating Temperature 0 - 40°C (32 - 104°F) Maximum Bakeout Temperature 85°C (185°F) Digital Controls Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction, set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type Digital Status Pressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions Analog Output 0.5 VDC per Decade Power Requirements 9 - 30 VDC, 2 Watts Accuracy Absolute: 5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 50 Torr ±5% of Reading, 50 to 1000 Torr ±1% of Reading, Differential: -10 to +10 Torr ±10% of Reading, -100 to -10 Torr ±8% of Reading, -760 to -100 Torr ±1% of Reading, +10 to 100 Torr ±5% of Reading Repeatability Absolute: 5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 50 ±2% of Reading, 50 to 1000 Torr ±1% of Reading, Differential: -760 to +10 Torr ±1% of Reading Overpressure Limit 1500 Torr Internal Volume 21 cm3 Electronic Casing and Flange 304 stainless steel Compliance CE Zero Stability ±0.1% of Full Scale (Full Scale = 760 Torr) (typical) Differential Resources & Downloads Resources & Downloads Literature 970 Cold Cathode Transducers (250.9 kB, PDF) 3D Product Models Download CAD Files Drawings & CADs 974 QuadMag™ Vacuum Transducer Dimensional Drawing (253.5 kB, PDF) Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, 2.75 in. CF, RS232 PART: 974B-71020 Contact Us Loading... Request a Quote    Compare Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to 974B-71020 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, 2.75 in. CF, RS232 Continue Shopping View All Saved Lists Overview Technical Specs Resources & Downloads Need help? Contact an Applications Specialist by sending us an email 974B-71020 - Drawings & CAD Additional CAD file downloads are not available for this product. CAD File Downloads: Loading... Download Close Close Close 974B-71020 - Drawings Additional drawings are not available for this product. Close Close 974B-71020

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