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AX3060/AX370 Microwave Matching Unit

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AX3060/AX370 Microwave Matching Unit MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products RF & Microwave Generators Microwave Generators and Systems Microwave Generator Accessories SmartMatch® Intelligent Microwave Matching Unit/Autotuner for 3 & 6kW Systems AX3060/AX370 Microwave Matching Unit, Auto tuner for 3 & 6 kW Systems Model: AX3060/AX370 Microwave Matching Unit, Auto tuner for 3 & 6 kW Systems Microwave Matching Unit, Auto tuner for 3 & 6 kW Systems Model: AX3060/AX370 Contact Us Loading... Request a Quote Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to AX3060/AX370 Microwave Matching Unit, Auto tuner for 3 & 6 kW Systems Continue Shopping View All Saved Lists     Compare Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to AX3060/AX370 Microwave Matching Unit, Auto tuner for 3 & 6 kW Systems Continue Shopping View All Saved Lists Overview Overview The SmartMatch® module is an advanced microwave matching unit which utilizes phase-magnitude detection hardware and an advanced predictive tuning algorithm to provide fast, reliable and repeatable matching. Available for power levels up to 6kW, with user selectable operating modes and reflected power threshold, the SmartMatch® module has been qualified to provide fast, reliable tuning with multiple plasma loads including O2, N2, CF4, NF3, H2O, NH3, N2H2 (and many others). Typical matching speed is below 1 second. The SmartMatch® module is compact and self-contained, with the micro-controller located in the tuning head. This eliminates the need for a separate CPU and allows for completely automatic, hands-off operation - ideal for multi-step processes while greatly reducing development time. The SmartMatch® matching unit is available in standard or custom waveguide configurations to best meet the specific size requirements. For flexibility, and upon customer request, a separate local interface module may be used for program presets and manual tuning operation.

Product Series Overview SmartMatch® Intelligent Microwave Matching Unit/Autotuner for 3 & 6kW Systems Technical Specs Technical Specs Type Microwave Matching Unit Time to Match Matching System Three stubs on 1-4 length waveguide intervals Waveguide Size WR284 Operating Frequency 2450 MHz, ±15 MHz Possible Matching Range Match to maximum VSWR of 10 Matching Head Weight 14 lb. (6.4 kg) Mounting Position Any User Interface RS485, Analog Ambient Temperature Up to 50°C max. Matching Head Cooling Requirement Water at 0.25 gpm, 30°C maximum @ 30 psid Matching Head Power Requirement 24 VDC ±10% Measurement Module Size 3.43 x 4.87 x 8.0 in. (87 x 124 x 203 mm) (height x width x length) Matching Head Size 10.25 x 6.18 x 11 in. (260 x 156 x 279 mm) (height x width x length) Measurement Module Weight 2 lb. (0.9 kg) Technical Specs Type Microwave Matching Unit Time to Match Matching System Three stubs on 1-4 length waveguide intervals Waveguide Size WR284 Operating Frequency 2450 MHz, ±15 MHz Possible Matching Range Match to maximum VSWR of 10 Matching Head Weight 14 lb. (6.4 kg) Mounting Position Any User Interface RS485, Analog Ambient Temperature Up to 50°C max. Matching Head Cooling Requirement Water at 0.25 gpm, 30°C maximum @ 30 psid Matching Head Power Requirement 24 VDC ±10% Measurement Module Size 3.43 x 4.87 x 8.0 in. (87 x 124 x 203 mm) (height x width x length) Matching Head Size 10.25 x 6.18 x 11 in. (260 x 156 x 279 mm) (height x width x length) Measurement Module Weight 2 lb. (0.9 kg) Microwave Matching Unit, Auto tuner for 3 & 6 kW Systems PART: AX3060/AX370 Contact Us Loading... Request a Quote    Compare Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to AX3060/AX370 Microwave Matching Unit, Auto tuner for 3 & 6 kW Systems Continue Shopping View All Saved Lists Overview Technical Specs Need help? Contact an Applications Specialist by sending us an email AX3060/AX370 - Drawings & CAD Additional CAD file downloads are not available for this product. CAD File Downloads: Loading... Download Close Close Close AX3060/AX370 - Drawings Additional drawings are not available for this product. Close Close AX3060/AX370

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