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CIRRUS-3 Atmospheric Gas Analyzer

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CIRRUS-3 Atmospheric Gas Analyzer MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Gas Analyzers Mass Spectrometers Atmospheric Pressure Gas Analyzers Cirrus™ 3 Powerful and Versatile Atmospheric Gas Analyzer CIRRUS-3 Atmospheric Gas Analyzer, Quadrupole Mass Spectrometry, Cirrus 3 Model: CIRRUS-3 Atmospheric Gas Analyzer, Quadrupole Mass Spectrometry, Cirrus 3 Atmospheric Gas Analyzer, Quadrupole Mass Spectrometry, Cirrus 3 Model: CIRRUS-3 Contact Us Loading... Request a Quote Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to CIRRUS-3 Atmospheric Gas Analyzer, Quadrupole Mass Spectrometry, Cirrus 3 Continue Shopping View All Saved Lists     Compare Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to CIRRUS-3 Atmospheric Gas Analyzer, Quadrupole Mass Spectrometry, Cirrus 3 Continue Shopping View All Saved Lists Overview Overview The Cirrus™3 Quadrupole Mass Spectrometry Platform provides superior analytical results in a compact, powerful, versatile platform for the lab or production facility. It is designed for researchers and engineers who require fast, sensitive, reliable monitoring of gases at atmospheric pressure. Building on proven Cirrus Quadrupole Mass Spectrometry technology, Cirrus 3 combines state-of-the-art performance in compact bench top and rack-mounted formats. With a heated capillary inlet and fast scan speed (250 points per second), gas compositions can be tracked over wide dynamic range (ppb to percentage levels), more reliably. Enhancements in capillary and oven design ensure precise temperature control and stability, allowing you to obtain high quality data with greater confidence in the results. Combined with its versatile and automatable software control, the Cirrus 3 system can be optimized and customized for a variety of applications, from industrial processes to research applications.

Product Series Overview Cirrus™ 3 Powerful and Versatile Atmospheric Gas Analyzer Technical Specs Technical Specs Type ATM-pressure Gas Monitor Mass Range 1 - 100 amu, 1 - 200 amu, or 1 - 300 amu Minimum Detectable Concentration Gas dependent, typically Electron Energy & Emission Current Operator variable Maximum Operating Conditions 5 - 35°C, 80% RH Bake Out Temperature 180°C for bake out. User-definable for operation, typically 80°C Inlet 2.0 m long with 0.25 in. Swagelok® end connection, heated to 150°C (optional heating to 300°C, with stainless steel only). Standard fused silica and optional stainless steel. Gas Consumption 20 ml/min, lower uptake rate capillaries options are available Sample Pressure 1 bar nominal Pumping System High compression turbo-molecular pump with internal 4-stage diaphragm backing pump standard, corrosive gas pumping with all internal pumps optional Automated Inlet Pressure Controller A Baratron® capacitance manometer-based automated inlet pressure controller is available as an option PC Requirements Microsoft 32 bit or 64 bit Windows 7 or 10 Interfaces 1 x RJ45 Ethernet LAN port required I/O Capability 4 analog inputs (-11 to +11 V, 22 bit), 2 analog outputs (0-10 V, 12 bit), 16 TTL digital I/O Power Requirements Universal mains input 100 - 240 VAC/50 - 60 Hz. Power supply specified at 700 W. Maximum consumption(during bakeout) typically 300 W Compliance CE Dimensions Benchtop: 593 x 291 x 470 mm, Rack-mounted: 577 x 482 x 266mm, (6U) (length x width x height) Weight Benchtop: 35 kg, Rack-mounted: 35 kg Measurement Technique Mass Spectrometry Detector Dual (Faraday and Secondary Electron Multiplier) Technical Specs Type ATM-pressure Gas Monitor Mass Range 1 - 100 amu, 1 - 200 amu, or 1 - 300 amu Minimum Detectable Concentration Gas dependent, typically Electron Energy & Emission Current Operator variable Maximum Operating Conditions 5 - 35°C, 80% RH Bake Out Temperature 180°C for bake out. User-definable for operation, typically 80°C Inlet 2.0 m long with 0.25 in. Swagelok® end connection, heated to 150°C (optional heating to 300°C, with stainless steel only). Standard fused silica and optional stainless steel. Gas Consumption 20 ml/min, lower uptake rate capillaries options are available Sample Pressure 1 bar nominal Pumping System High compression turbo-molecular pump with internal 4-stage diaphragm backing pump standard, corrosive gas pumping with all internal pumps optional Automated Inlet Pressure Controller A Baratron® capacitance manometer-based automated inlet pressure controller is available as an option PC Requirements Microsoft 32 bit or 64 bit Windows 7 or 10 Interfaces 1 x RJ45 Ethernet LAN port required I/O Capability 4 analog inputs (-11 to +11 V, 22 bit), 2 analog outputs (0-10 V, 12 bit), 16 TTL digital I/O Power Requirements Universal mains input 100 - 240 VAC/50 - 60 Hz. Power supply specified at 700 W. Maximum consumption(during bakeout) typically 300 W Compliance CE Dimensions Benchtop: 593 x 291 x 470 mm, Rack-mounted: 577 x 482 x 266mm, (6U) (length x width x height) Weight Benchtop: 35 kg, Rack-mounted: 35 kg Measurement Technique Mass Spectrometry Detector Dual (Faraday and Secondary Electron Multiplier) Resources & Downloads Resources & Downloads 3D Product Models Download CAD Files Drawings & CADs Cirrus™ 3 Dimensional Drawing (778.4 kB, PDF) Atmospheric Gas Analyzer, Quadrupole Mass Spectrometry, Cirrus 3 PART: CIRRUS-3 Contact Us Loading... Request a Quote    Compare Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to CIRRUS-3 Atmospheric Gas Analyzer, Quadrupole Mass Spectrometry, Cirrus 3 Continue Shopping View All Saved Lists Overview Technical Specs Resources & Downloads Need help? Contact an Applications Specialist by sending us an email CIRRUS-3 - Drawings & CAD Additional CAD file downloads are not available for this product. CAD File Downloads: Loading... Download Close Close Close CIRRUS-3 - Drawings Additional drawings are not available for this product. Close Close CIRRUS-3

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