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MKS Inc. MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Enabling Technologies that Transform Our World At MKS Inc., we apply our broad science and engineering capabilities to create instruments, subsystems, systems, process control solutions and specialty chemicals technology that improve process performance, optimize productivity and enable unique innovations for many of the world’s leading technology and industrial companies.
Learn More     America’s Most Responsible Companies Award

MKS named one of America’s Most Responsible Companies for 2026
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MKS ESG Report

MKS Environmental, Social and Governance Report 2025 highlights the meaningful progress MKS has made and reflects our ongoing commitment to embedding sustainability across our organization.
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  Advanced Packaging Handbook

Uncover 2.5D/3D packaging, fan-out wafer-level packaging (FOWLP), and systems-in-package (SiP) technologies and processes.
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      Pushing the Boundaries of Possibility
Explore the MKS Industry Leading Brands. MKS

Foundational technology solutions for semiconductor manufacturing, electronics and packaging, and specialty industrial applications.
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Newport

Precision motion control, optical tables and vibration isolation systems, optics, and opto-mechanical components.
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  Ophir

Laser and LED measurement products, beam profilers, IR thermal imaging lenses, and optics for CO2 and high-power fiber lasers.
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    Spectra-Physics

Broad spectrum of ultrafast, pulsed and continuous-waved lasers for precision industrial and scientific applications.
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  Atotech

Process and manufacturing technologies for surface modification, electroless and electrolytic plating, and surface finishing.
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ESI

Solutions for flexible PCB laser processing, high-speed MLCC testing, and CO2-laser-based systems for HDI PCB and IC substrate manufacturing.
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        Solutions for Your Industry

We deliver foundational technology solutions to leading edge semiconductor manufacturing, electronics and packaging, and specialty industrial applications. We apply our broad science and engineering capabilities to create instruments, subsystems, systems, process control solutions and specialty chemicals technology that improve process performance.

      The semiconductor industry continually faces new challenges as products become smaller, more powerful and highly mobile.
Explore Our Semiconductor Solutions Powering innovation in electronics and packaging with solutions for PCB manufacturing, solar, display and electronic component applications.
Explore Our Electronics & Packaging Solutions Our specialty industrial solutions enable technological progress across a wide range of applications, such as LHS, defense & homeland security, and automotive.
Explore Our Industrial Solutions     Push the Boundaries of Possibility with Us

At MKS, it's all about courage, big ideas, and a serious passion for innovation. Winning here is about exploring possibilities, taking action, and solving our customers’ toughest challenges. It's not just a job – it's what you make of it.

While you shape your role and make it unique, we invest in you with on-the-job and formal training, as well as educational assistance. Curiosity is key at MKS - ask questions, own your path.

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Join Our Team Discover More MY INNOVATION Stories Discover More   MKS in India Discover More      

 

 

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