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Flow Ratio Controller

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Flow Ratio Controller MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Mass Flow Controllers & Meters Flow Ratio Controllers Flow Ratio Controllers Flow Ratio Controllers For processes requiring precise and uniform distribution of multiple gases within a chamber, MKS offers a pioneering line of DELTA™ Flow Ratio Controllers (FRCs). These innovative instruments are designed to meticulously control and split a single gas source into various streams, ensuring consistent flow ratios across multiple channels. This capability is crucial in various industries, including semiconductor fabrication, flat panel display production, and solar cell manufacturing.

MKS FRCs leverage advanced control algorithms and robust valve technologies to maintain precise flow ratios even under fluctuating pressure or temperature conditions. They offer a wide range of dynamic control capabilities, allowing for rapid adjustments to flow rates as needed. This ensures optimal process uniformity and repeatability, leading to superior product quality and yield.

Flow Ratio Controllers For processes requiring precise and uniform distribution of multiple gases within a chamber, MKS offers a pioneering line of DELTA™ Flow Ratio Controllers (FRCs). These innovative instruments are designed to meticulously control and split a single gas source into various streams, ensuring consistent flow ratios across multiple channels. This capability is crucial in various industries, including semiconductor fabrication, flat panel display production, and solar cell manufacturing.

MKS FRCs leverage advanced control algorithms and robust valve technologies to maintain precise flow ratios even under fluctuating pressure or temperature conditions. They offer a wide range of dynamic control capabilities, allowing for rapid adjustments to flow rates as needed. This ensures optimal process uniformity and repeatability, leading to superior product quality and yield.

Showing 6 products in 3 families Filter Products Showing 6 products in 3 families View:  Filter by: Channels 3 2 4 2 full Scale Flow Range 500, 1000, 2000, 10,000 sccm per channel (N2 equivalent) 2 500, 1000, 2000, and 10,000 sccm per channel (N2 equivalent) 2 DELTA II 2-zone Flow Ratio Controller Accurately and repeatably control flow ratio for better process optimization Digital control loop provides rapid response to channel set point independent of the gas mix Uses standard web browser with no special software required 2 Products  Show Top Products Compare Description Avail. Price Qty. DLT2B-DeviceNet Flow Ratio Controller, 2 Channels, DeviceNet Contact Us Loading... Quote DLT2B-DeviceNet Flow Ratio Controller, 2 Channels, DeviceNet Contact Us Quote DLT2B-EtherCAT Flow Ratio Controller, 2 Channels, EtherCAT Contact Us Loading... Quote DLT2B-EtherCAT Flow Ratio Controller, 2 Channels, EtherCAT Contact Us Quote Viewing2 of 2 Products | View All 2 Products DELTA II 2-zone Flow Ratio Controller 2 Products DELTA III 3-zone Flow Ratio Controller Accurately and repeatably control flow ratio for better process optimization Digital control loop provides rapid response to channel set point independent of the gas mix Uses standard web browser with no special software required 2 Products  Show Top Products Compare Description Avail. Price Qty. DLT3B-DeviceNet Flow Ratio Controller, 3-zone, DeviceNet Contact Us Loading... Quote DLT3B-DeviceNet Flow Ratio Controller, 3-zone, DeviceNet Contact Us Quote DLT3B-EtherCAT Flow Ratio Controller, 3-zone, EtherCAT Contact Us Loading... Quote DLT3B-EtherCAT Flow Ratio Controller, 3-zone, EtherCAT Contact Us Quote Viewing2 of 2 Products | View All 2 Products DELTA III 3-zone Flow Ratio Controller 2 Products DELTA IV 4-zone Flow Ratio Controller Accurately and repeatably control flow ratio for better process optimization Digital control loop provides rapid response to channel set point independent of the gas mix Uses standard web browser with no special software required 2 Products  Show Top Products Compare Description Avail. Price Qty. DLT4B-DeviceNet Flow Ratio Controller, 4-zone, DeviceNet Contact Us Loading... Quote DLT4B-DeviceNet Flow Ratio Controller, 4-zone, DeviceNet Contact Us Quote DLT4B-EtherCAT Flow Ratio Controller, 4-zone, EtherCAT Contact Us Loading... Quote DLT4B-EtherCAT Flow Ratio Controller, 4-zone, EtherCAT Contact Us Quote Viewing2 of 2 Products | View All 2 Products DELTA IV 4-zone Flow Ratio Controller 2 Products  Mass Flow Technology Need help? Contact an Applications Specialist by sending us an email

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