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DELTA 4-zone Flow Ratio Controller

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Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Mass Flow Controllers & Meters Flow Ratio Controllers Flow Ratio Controllers DELTA IV 4-zone Flow Ratio Controller Print DELTA™ IV 4-zone Flow Ratio Controller DELTA™ IV 4-zone Flow Ratio Controller Products Configuration Options Features Resources Contact Us Overview

Accurately and repeatably control flow ratio for better process optimization Digital control loop provides rapid response to channel set point independent of the gas mix Uses standard web browser with no special software required See All Features Products Configuration Options The following options are available for DELTA IIV EtherCAT Flow Ratio Controllers
Ordering Code Example: DLT4B0AAAA8R10

Configuration Option

Option Code

DELTA IV 4-Channel Flow Ratio Controller DLT4B Reserved Reserved 0 Channel Full Scale Flow Ranges 4-channel* 500 sccm AAAA 1000 sccm BBBB 2000 sccm CCCC 3000 sccm DDDD 5000 sccm EEEE 10000 sccm FFFF Interface Electronics EtherCAT 8 Fittings 4 VCR male, non-rotatable on inlet and outlet R Firmware Firmware Revision 11 *All channels must be the same and are N2 equivalent.

The following options are available for DELTA IV DeviceNet Flow Ratio Controllers
Ordering Code Example: DLTNA4B0BBB6R21

Configuration Option

Option Code

DELTA IV 4-channel Flow Ratio Controller DLT4B Reserved Reserved 0 Channel Full Scale Flow Ranges 4 channel* 500 sccm AAAA 1000 sccm BBBB 2000 sccm CCCC 3000 sccm DDDD 5000 sccm EEEE 10000 sccm FFFF Interface Electronics DeviceNet 6 Fittings 4 VCR male, non-rotatable on inlet and outlet R Firmware DeviceNet Firmware Revision 20 *All channels must be the same and are N2 equivalent.

 Show All Configuration Options Description DLT4B-DeviceNet Flow Ratio Controller, 4-zone, DeviceNet Loading... Quote Loading... DLT4B-EtherCAT Flow Ratio Controller, 4-zone, EtherCAT Loading... Quote Loading... delta-iv-flow-ratio-controller - Drawings & CAD Additional CAD file downloads are not available for this product. CAD File Downloads: Loading... Download Close Close Close delta-iv-flow-ratio-controller - Drawings Additional drawings are not available for this product. Close Close Specifications Type Flow Ratio Controller Full Scale Flow Range 500, 1000, 2000, 3000 and 10000 sccm (each channel nitrogen equivalent-Q) Percentage Accuracy ±2% set point (for flow ≥10% of channel Full Scale) Channel Flow Control Range 0, 5-100% Full Scale Input Flow Range 0, 2-100% of total flow within flow channel control range Percentage Repeatability ±0.3% of set point Resolution 0.02% of channel Full Scale Maximum Operating Outlet Pressure 200 Torr at maximum flow rate through all channels Maximum Allowable Outlet Pressure Differential 50 Torr with the same percentage flow through all channels Normal Operating Pressure Differential Percentage Settling Time Maximum Inlet Pressure 150 psig (non-operational) Zero Temperature Coefficient Span Temperature Coefficient Warm-up Time 60 minutes Operating Temperature 10-40°C Storage Temperature -20-65°C Storage Humidity 0-95% relative humidity, non-condensing Temperature Accuracy +2°C Temperature Resolution 0.1°C Fitting Type 4 VCR male, non-rotatable External Leak Integrity -10 (scc/sec He) Leak Integrity Through Closed Valve Wetted Materials 316 S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality); 316 S.S., Inconel®, KM-45, PTFE
EtherCAT: Hastelloy® Surface Finish 5 microinch average Ra Connector EtherCAT: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)
DeviceNet: 5 pin microconnector Communication DeviceNet or EtherCAT Compliance CE (an overall metal braided, shielded able, properly grounded at both ends, is required during use). Features Control Flow to Four Zones The DELTA IV, four channel ratio controller provides a needed “knob” to tune process gas flows over the substrate surface or gas dispersion head to help achieve these uniformities. The DELTA IV ratio controller provides closed loop control over the flow proportion that is not available with typical metering valve or flow orifice setups that have often been used. The DELTA ratio controllers provide the added advantage of tuning the process from the tool controller as opposed to manual valve adjustment necessary with metering valve and manual changeout which is impractical with fixed flow orifices.

The DELTA IV flow ratio controller is shown here with its four flow outputs providing flow to center (C) and outer (O) zones within a process chamber for a dual wafer chamber or a dual chamber configuration. Wide Dynamic Ratio Control Range The DELTA IV has a wide dynamic ratio control range and fast development of chamber flow while being adaptive to different tool and process conditions. MKS has developed a unique patent pending ratio control logic enabling rapid ratio and flow response times. This control logic enables the total input flow to be split with channel flows ranging from 2 to 100% of the channel Full Scale for measurement and control purposes. The total of all channel flows shall be split in such a way that their sum equals 100%. For example the flows may be split to 10, 20, 30 and 40% of total flow input going to channels Q1, Q2, Q3 and Q4, respectively. The dynamic control also allows for individual channels to be given 0% set points which closes the valve, effectively closing off flow to this output.

Above, the device starts with flows of 20, 30, 10 and 40% in channels, Q1, Q2, Q3 and Q4 respectively. The flow then transitions to 25% in each channel followed by a transition to 10, 20, 30 and 40% in each channel. In-Situ Embedded Diagnostics The DELTA’s diagnostic feature allows the user to check the DELTA’s performance in-situ, lowering costs through reduced removal of No Problem Found devices. This feature is enabled through a web browser utility accessed through the device’s Ethernet port. This utility uses a standard web browser and requires no special software. The diagnostic input includes the ability to control the device locally, operate the device, open and close valves along with collecting and saving data for later analysis.

Resources Literature DELTA™ IV 4-zone Flow Ratio Controller with EtherCAT (387.8 kB, PDF) DELTA™ IV, 4 Zone Flow Ratio Controller with DeviceNet™ Communications (357.3 kB, PDF) Drawings & CADs DELTA™ IV EtherCAT Dimensional Drawing (125.9 kB, PDF) DELTA™ IV DeviceNet™ Dimensional Drawing (110 kB, PDF) DELTA™ Flow Ratio Controller 3D Model Files Manuals   (2.8 MB, PDF) delta-iv-flow-ratio-controller Related Products DELTA III 3-zone Flow Ratio Controller DELTA II 2-zone Flow Ratio Controller Related Products DELTA III 3-zone Flow Ratio Controller DELTA II 2-zone Flow Ratio Controller Need help? Contact an Applications Specialist by sending us an email

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