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Cleanline® Foreline Plasma Clean System

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Cleanline® Foreline Plasma Clean System MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Plasma and Reactive Gas Solutions Foreline Plasma Clean Systems Foreline Plasma Clean Systems Cleanline® Foreline Plasma Clean System Print Cleanline® Foreline Plasma Clean System Cleanline® Foreline Plasma Clean System Products Configuration Options Features Resources Contact Us Overview

The Cleanline system can be installed anywhere in the vacuum line, including at the chamber outlet, where it can improve particle performance. The internal geometry matches the conductance of standard piping and the plasma source can operate at typical foreline temperatures. This system is designed to be completely passive when not powered.

Increase tool uptime and productivity Improve particle performance Improve chamber matching and wafer-to-wafer matching See All Features Products Configuration Options Description CLEANLINE Foreline Plasma Clean System Loading... Quote Loading... cleanline-foreline-plasma-clean-system - Drawings & CAD Additional CAD file downloads are not available for this product. CAD File Downloads: Loading... Download Close Close Close cleanline-foreline-plasma-clean-system - Drawings Additional drawings are not available for this product. Close Close Features Cleaning performance ~ 1 µm of SiO2 powder removed, over 1 meter of pipe, in 1 minute Conductance is equivalent to an open section of pipe for full process transparency Plasma source can be heated to 150°C Reliable ignition in process gas

Specifications KF40 KF50 ISO 80 mm Wetted Materials 316L Stainless
Aluminum Nitride
Kalrez® 9500 316L Stainless
Aluminum Nitride
Kalrez® 9500 6061-T6 Aluminum
Aluminum Nitride
Kalrez® 9500 Flanges KF40 KF50 ISO80 Length 3.175.in [80.6 mm] 3.25.in [82.5 mm] 7.15.in [181.6 mm] Inner Diameter 1.41.in [35.8 mm]
(same as KF40 pipe) 2.10.in [35.8mm]
(Same as KF50 pipe) 2.86.in [72.64 mm]
(same as ISO 80mm pipe) Max Mechanical Axial Force 200 lbf Tensile or Compressive Weight 2 lb 3.6 lb 9.5 lb Max Mechanical Moment 100 ft*lb 100 ft*lb 200 ft*lb Max Operating Temperature Gas Input: NF3 or F2
(with matching Argon flow) Operating Pressure Range 0.15 - 3 Torr 0.15 – 3 Torr 0.25 – 5 Torr Plasma Power (fixed) 50 W 50 W 200 W Plasma Ignition Any condition within Operating Flow and Pressure window; Optionally 100% Argon ( 0.25 – 5 Torr, Typical Pipe Clean Rate Up to 20 mg/min SiO2 powder
~60 sec/meter of 40mm pipe/µm of SiO2 powder Up to 20 mg/min SiO2 powder
~60 sec / meter of 50mm pipe / µm of SiO2 powder Up to 100 mg/min SiO2 powder
~60 sec/meter of 80mm pipe/µm of SiO2 powder Typical Electrode Lifetime 2000 RF Hours Helium Leak Rate 1 e-9 atm*cc/sec Compliance CE
RoHS 2021
SEMI S2

Power Supply/Controller Specifications Dimensions 5.5.in W x 5.in H x 12.in D [139.7 mm W x 127 mm H x 304.8 mm D] Input Power 100 – 132 VAC 50/60 Hz 6A Service (400W typical)
200 – 264 VAC 50/60 Hz, 6A Service (switch selectable) Ambient Temperature 10-40°C Non-condensing Weight 10 lbs Cooling Air Cooled, Rear Panel Fan (requires 2.in of clearance) RF Output 1 Mhz Interface 24 VDC Discrete Logic
Input: Plasma On Command
Output: Ready, RF On, Plasma On, Plasma Fault Diagnostics Ethernet Web Page Diagnostics via Front Panel RJ45

Resources Literature Cleanline® Foreline Plasma Clean System Drawings & CADs Cleanline® Foreline Plasma Clean System Dimensional Drawings (964.4 kB, PDF) Manuals   (531.5 kB, PDF)   (1.3 MB, PDF) Videos Cleanline® Foreline Plasma Clean System for Removing CVD and Etch Processes Byproducts and Deposits (2:45) cleanline-foreline-plasma-clean-system Need help? Contact an Applications Specialist by sending us an email

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