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Process Monitor

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Process Monitor MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

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Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Gas Analyzers Mass Spectrometers Vacuum Process and Chamber Environment Monitors Vacuum Process and Chamber Environment Monitors Our process monitors are innovative in-situ process monitoring instruments that are fully integrated, application-specific packages, including component residual gas analyzers (RGAs), analytical equipment, and control software. Process mass spectrometers are used in varied applications, including; Semiconductor, Thin Film (CVD, Etch, PVD and degas), pharmaceutical lyophylization and bulk gas purity monitoring. Vacuum Process and Chamber Environment Monitors Our process monitors are innovative in-situ process monitoring instruments that are fully integrated, application-specific packages, including component residual gas analyzers (RGAs), analytical equipment, and control software. Process mass spectrometers are used in varied applications, including; Semiconductor, Thin Film (CVD, Etch, PVD and degas), pharmaceutical lyophylization and bulk gas purity monitoring. Showing 13 products in 11 families Show Filters:  Filter Products Showing 13 products in 11 families View:  Filter by: Mass Range 1-100, 1-200, or 1-300 amu 5 1 - 200 amu 4 1 - 100 amu 2 1 - 300 amu 2 Mass Stability Better than ±0.1 amu over 8 hours 10 ±0.1 amu over 8 hours at stable ambient 1 Minimum Detectable Concentration 3 3 2 -11 Torr (1e-10 mbar), Concentration\: 5 ppm at 1e-3 Torr (1.3e-3 mbar) (3 sigma baseline noise at 300 ms integration)"/> -11 Torr (1e-10 mbar), Concentration: 5 ppm at 1e-3 Torr (1.3e-3 mbar) (3 sigma baseline noise at 300 ms integration)" value=""/> Partial Pressure: 8e-11 Torr (1e-10 mbar), Concentration: 5 ppm at 1e-3 Torr (1.3e-3 mbar) (3 sigma baseline noise at 300 ms integration) 2 Analyzer Housing Base Pressure -9 Torr after bakeout"/> -9 Torr after bakeout" value=""/> Better than 5e-9 Torr after bakeout 6 -9 Torr after bakeout"/> -9 Torr after bakeout" value=""/> Better than 5x10-9 Torr after bakeout 2 Vision 2000-A RGA for ALD & CVD Modular UniBloc inlet with all metal seals and field serviceable parts Temperature inlet up to 200°C (consult the factory for models up to 300°C) Direct coupling for a sample transfer tube 1 Products Vision 2000-A RGA for ALD & CVD 1 Products Vision 2000-A XD High Sensitivity RGA for ALD & CVD Modular UniBloc inlet with all metal seals and field-serviceable parts V-lens ion optics technology Temperature inlet, up to 200°C (consult the factory for models up to 300°C) 1 Products Vision 2000-A XD High Sensitivity RGA for ALD & CVD 1 Products Vision 2000-B™ Vacuum Baseline RGA for Process Tools Monitor vacuum pumpdown, baseline, and leakback conditions 100 amu standard mass range with 200 amu or 300 amu options Process Eye™ Professional or optional TOOLweb® RGA software 1 Products Vision 2000-B™ Vacuum Baseline RGA for Process Tools 1 Products Vision 2000-C™ & E™ RGAs for Multi-pressure & CVD/ALD Processes Continuous in situ monitoring of CVD and etching processes Baseline monitoring for air leaks and background contamination Includes Process Eye™ Professional RGA software 2 Products  Show Top Products Compare Description Avail. Price Qty. VISION-2000-E CVD or Etch Process Monitor, 1-200 amu, Multi-pressure & CVD/ALD Contact Us Loading... Quote VISION-2000-E CVD or Etch Process Monitor, 1-200 amu, Multi-pressure & CVD/ALD Contact Us Quote VISION-2000-C CVD or Etch Process Monitor, 1-300 amu, Multi-pressure & CVD/ALD Contact Us Loading... Quote VISION-2000-C CVD or Etch Process Monitor, 1-300 amu, Multi-pressure & CVD/ALD Contact Us Quote Viewing2 of 2 Products | View All 2 Products Vision 2000-C™ & E™ RGAs for Multi-pressure & CVD/ALD Processes 2 Products Vision 2000-C™-E™ XD High Sensitivity RGAs for Multi-pressure & CVD/ALD In situ monitoring during chamber clean, passivation and deposition Up to 10 times increased sensitivity at lower masses ( Reliable distinction between gases and background 2 Products  Show Top Products Compare Description Avail. Price Qty. VISION-2000-E-XD CVD or Etch Process Monitor, High Sensitivity, 1-200 amu, Multi-pressure Contact Us Loading... Quote VISION-2000-E-XD CVD or Etch Process Monitor, High Sensitivity, 1-200 amu, Multi-pressure Contact Us Quote VISION-2000-C-XD CVD or Etch Process Monitor, High Sensitivity, 1-300 amu, Multi-pressure Contact Us Loading... Quote VISION-2000-C-XD CVD or Etch Process Monitor, High Sensitivity, 1-300 amu, Multi-pressure Contact Us Quote Viewing2 of 2 Products | View All 2 Products Vision 2000-C™-E™ XD High Sensitivity RGAs for Multi-pressure & CVD/ALD 2 Products Vision 2000-P™ RGA for Select Pressure & PVD Processes ppb level detection of contaminant gases during PVD processes Track process gas mixture composition when two gases are utilized Vacuum troubleshooting for fast PM recovery 1 Products Vision 2000-P™ RGA for Select Pressure & PVD Processes 1 Products Vision 2000-P™ XD High Sensitivity RGAs for Select Pressure & PVD PVD contamination monitoring (inc. hydrocarbons) to sub-ppm levels Cleaner baseline and lower noise across the mass scale Up to 10 times increased sensitivity at lower masses ( 1 Products Vision 2000-P™ XD High Sensitivity RGAs for Select Pressure & PVD 1 Products 300 mm Resist-Torr Photoresist Detection Monitor for High Pressure Degas Detection of photoresist contamination during high pressure (~8 Torr) degas Fully automated process monitoring means no operator necessary Calculation of PR Index - a measure of photoresist contamination level 1 Products 300 mm Resist-Torr Photoresist Detection Monitor for High Pressure Degas 1 Products 300 mm Resist-Torr® XD High Sensitivity Photoresist Detection Monitor Detection of photoresist contamination during high pressure (~8 Torr) degas Up to 10 times increased sensitivity at lower masses ( Reliable distinction between gases and background 1 Products 300 mm Resist-Torr® XD High Sensitivity Photoresist Detection Monitor 1 Products HPQ3 High Pressure 0.001 Torr Residual Gas Analyzers Upper working limit of 0.001 Torr total pressure Leak detection of vacuum lines, coolant lines, welds, and seals Chamber contaminant monitoring, including hydrocarbons 1 Products HPQ3 High Pressure 0.001 Torr Residual Gas Analyzers 1 Products HPQ3S High Pressure 0.008 Torr Residual Gas Analyzer Upper working limit of 0.008 Torr total pressure Leak detection of vacuum lines, coolant lines, welds, and seals Application validated correction algorithms to compensate for sensitivity variation 1 Products HPQ3S High Pressure 0.008 Torr Residual Gas Analyzer 1 Products Need help? 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