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649 Downstream Integrated Pressure Controllers

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649 Downstream Integrated Pressure Controllers MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Pressure Controllers and Valves Pressure Controllers Integrated Upstream & Downstream Pressure Controllers 649B Downstream Pressure Controllers with Mass Flow Meter Print 649B Downstream Pressure Controllers with Mass Flow Meter 649B Downstream Pressure Controllers with Mass Flow Meter Products Configuration Options Features Resources Contact Us Overview

Integral Baratron® capacitance manometer technology Patented mass flow sensor for exceptional long-term accuracy and zero stability Metal-sealed, cleanroom manufactured for critical high purity applications Fast response to set point with minimal overshoot See All Features Products Configuration Options The following options are available for 649B Pressure Controllers with Integral Baratron® Manometer and Mass Flow Meter
Ordering Code Example: 649B00413T12C2VR

Configuration Option Option Code 649B Pressure Controller with MFM

649B

Gas Helium (He) 001 Argon (Ar) 004 Hydrogen (H2) 007 Nitrogen (N2) 013 Pressure Range Full Scale 10 Torr 11T 20 Torr 21T 50 Torr 51T 100 Torr 12T 1000 Torr 13T Full Scale Flow Rate 10 sccm 11C 20 sccm 21C 50 sccm 51C 100 sccm 12C 200 sccm 22C 500 sccm 52C 1000 sccm 13C 2000 sccm 23C 5000 sccm 53C Orifice Size A (50 sccm) A #1 (200 sccm) 1 #2 (1000 sccm) 2 #3 (5000 sccm) 3 Plug Material Viton V Kalrez D Metal M Kel-F F Fittings (compatible with) Swagelok 4 VCR male R Swagelok 8 VCR male T  Show All Configuration Options Description 649B Integrated Pressure Controller, Compact, Series 649B Loading... Quote Loading... 649b-integrated-pressure-controller - Drawings & CAD Additional CAD file downloads are not available for this product. CAD File Downloads: Loading... Download Close Close Close 649b-integrated-pressure-controller - Drawings Additional drawings are not available for this product. Close Close Specifications Type 649 Pressure Controller with Capacitance Manometer and Mass Flow Meter Pressure Range 10, 20, 50, 100, 1000 mmHg (Torr) Full Scale Valve Orifice 50, 200, 1000, 5000 sccm (nominal Full Scale flow rates for N2 with 15 psig on inlet and atmospheric pressure on outlet) Flow Rate 10, 20, 50, 100, 200, 500, 1000, 2000, 5000 sccm (Full Scale) Trip Points Pressure: Two open-collector transistors
Rated: 250 mA @ 30 VDC
Adjustable: 1 to 100% of Full Scale
Hysteresis: 3% of Full Scale
Indicators: Green LEDs on when actuated Pressure Control Accuracy ±0.2% of Full Scale Transducer Over Pressure Limit 45 psia or 2x Full Scale, whichever is greater Maximum Differential Pressure 150 psi (consistent with transducer overpressure limit) Control Mode Downstream Pressure Measurement Accuracy ±0.5% of Reading (includes linearity, hysteresis, and repeatability) Zero Temperature Coefficient ±0.04% of Full Scale/°C Span Temperature Coefficient ±0.04% of Reading/°C Control Range 2 to 100% of Full Scale Typical Response Time 1.0 sec (excluding system time constant) Operating Temperature 0 to 50°C (32 to 122°F) Storage Temperature -20 to 80°C (-4 to 176°F) Flow Measurement Range 1% to 100% of Full Scale Flow Repeatability ±0.2% of Full Scale Flow Resolution 0.1% of Full Scale Flow Accuracy ±1.0% of Full Scale (including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C) Flow Span Temperature Coefficient Flow Zero Temperature Coefficient Flow Reading Pressure Coefficient Input Power ±15 VDC ±5%, 300 mA max. Connector 15-pin male Type “D" Meter Response Time Meter Warm-up Time RFI Sensitivity SAMA 33.1, 1-abc: Input-Output Signals Pressure: 0-10 VDC default (user settable to 0-5 VDC) Cable Length 100 ft. (30 m) max. Compliance CE Features Analog Operation The 649 is powered by ±15 VDC at only 300 mA. The default pressure output and input control signals are 0-10 VDC. Two trip points are included in the 649, with LED status indicators, for use as simple on/off process limits. The 649’s control loop tuning parameters are preset for typical installation conditions, but are field adjustable for different conditions and optimum performance. The Proportional and Integral Term adjustments are simple rotary switches, providing a wide dynamic control range.

Control Loop In the 649B, a pressure transducer monitors the pressure to be controlled at the downstream end of the controller. Actual pressure is compared in the electronics to the pressure set point signal. An appropriate signal is then generated to adjust the proportioning control valve to bring actual pressure into agreement with the desired set point. The internal control valve can be specified with one of four orifices allowing pressure control in systems with Full Scale flows from 10 sccm to 5 slm.

Resources Literature 649B Compact Pressure Controller with Integral Baratron® Capacitance Manometer and Mass Flow Meter (197.1 kB, PDF) Manuals   (487.2 kB, PDF) 649 Pressure Controller Pin-outs (22.3 kB, PDF) Drawings & CADs 649 Pressure Controller 3D Model Files Application Notes Configuring 649 Compact Pressure Controllers 649b-integrated-pressure-controller Related Products PPCMA Downstream Pressure Controller with Mass Flow Meter GPCMA Downstream Pressure Controller with Mass Flow Meter Related Products PPCMA Downstream Pressure Controller with Mass Flow Meter GPCMA Downstream Pressure Controller with Mass Flow Meter Need help? Contact an Applications Specialist by sending us an email

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