GM50A, GM51A Multi-gas, Multi-range, Metal-sealed, 50-50,000 sccm Mass Flow Controllers

GM50A, GM51A Multi-gas, Multi-range, Metal-sealed, 50-50,000 sccm Mass Flow Controllers MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Mass Flow Controllers & Meters Mass Flow Controllers G-Series Fast and Repeatable Mass Flow Controllers GM50A/GM51A Metal-sealed 5-50,000 sccm Mass Flow Controllers Print Multi-gas, Multi-range, Metal-sealed, 5-50,000 sccm Mass Flow Controller Multi-gas, Multi-range, Metal-sealed, 5-50,000 sccm Mass Flow Controller Products Configuration Options Features Accessories Resources Contact Us Overview

The GM50A & GM51A digitally-controlled mass flow controllers are available with either analog or RS485, Profibus™, EtherCAT®, PROFINET, or DeviceNet™ I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. 

Flow rates from 5 to 50,000 sccm Metal sealed with Teflon valve plug Wide choice of digital (EtherCAT, DeviceNet™, Profibus®, PROFINET and RS485) or analog I/O Standard closed conductance leak rate of less than 1.0% of Full Scale Less than 750 millisecond settling time See All Features Products Show Filters:  View all products Compare Description Compatibility sortOrder rankScore ranking Drawings, CAD & Specs Full Scale Flow Range Fitting Type Analog Connector Availability Featured Item Price Brand GM50A013101RMM020
Loading... Quote Loading... Mass Flow Controller, 10 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal 15 Weeks GM50A013101RMM020 Mass Flow Controller, 10 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal UNIVERSAL 25.0 1.0 0.0 0.0 10 sccm 4 VCR male 15-pin D-sub (tied grounds) 15 Weeks Loading... Quote Loading... GM50A013101SMM020
Loading... Quote Loading... Mass Flow Controller, 10 sccm, 0.25 in. Swagelok-style, 0-5 VDC, DB15, Metal Seal 15 Weeks GM50A013101SMM020 Mass Flow Controller, 10 sccm, 0.25 in. Swagelok-style, 0-5 VDC, DB15, Metal Seal UNIVERSAL 25.0 1.0 0.0 0.0 10 sccm 0.25 in. Swagelok-style 15-pin D-sub (tied grounds) 15 Weeks Loading... Quote Loading... GM50A013102RMM020
Loading... Quote Loading... Mass Flow Controller, 100 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal 15 Weeks GM50A013102RMM020 Mass Flow Controller, 100 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal UNIVERSAL 22.0 1.0 0.0 0.0 100 sccm 4 VCR male 15-pin D-sub (tied grounds) 15 Weeks Loading... Quote Loading... GM50A013103RMM020
Loading... Quote Loading... Mass Flow Controller, 1000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal 15 Weeks GM50A013103RMM020 Mass Flow Controller, 1000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal UNIVERSAL 19.0 1.0 0.0 0.0 1000 sccm 4 VCR male 15-pin D-sub (tied grounds) 15 Weeks Loading... Quote Loading... GM50A013103SMM020
Loading... Quote Loading... Mass Flow Controller, 1000 sccm, 0.25 in. Swagelok-style, 0-5 VDC, DB15, Metal Seal Contact Us GM50A013103SMM020 Mass Flow Controller, 1000 sccm, 0.25 in. Swagelok-style, 0-5 VDC, DB15, Metal Seal UNIVERSAL 19.0 1.0 0.0 0.0 1000 sccm 0.25 in. Swagelok-style 15-pin D-sub (tied grounds) Contact Us Loading... Quote Loading... GM50A013104RBM020
Loading... Quote Loading... Mass Flow Controller, 10000 sccm, 4 VCR male, 0-5 VDC, DB15, Metal Seal Contact Us GM50A013104RBM020 Mass Flow Controller, 10000 sccm, 4 VCR male, 0-5 VDC, DB15, Metal Seal UNIVERSAL 0.0 1.0 0.0 0.0 10000 sccm Swagelok 4 VCR male Analog 0-5 VDC (15 pin D connector) Contact Us Loading... Quote Loading... GM50A013201RBM020
Loading... Quote Loading... Mass Flow Controller, 20 sccm, 4 VCR male, 0-5 VDC, DB15, Metal Seal Contact Us GM50A013201RBM020 Mass Flow Controller, 20 sccm, 4 VCR male, 0-5 VDC, DB15, Metal Seal UNIVERSAL 0.0 1.0 0.0 0.0 20 sccm Swagelok 4 VCR male Analog 0-5 VDC (15 pin D connector) Contact Us Loading... Quote Loading... GM50A013201RMM020
Loading... Quote Loading... Mass Flow Controller, 20 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal 15 Weeks GM50A013201RMM020 Mass Flow Controller, 20 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal UNIVERSAL 24.0 1.0 0.0 0.0 20 sccm 4 VCR male 15-pin D-sub (tied grounds) 15 Weeks Loading... Quote Loading... GM50A013202RMM020
Loading... Quote Loading... Mass Flow Controller, 200 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal 15 Weeks GM50A013202RMM020 Mass Flow Controller, 200 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal UNIVERSAL 21.0 1.0 0.0 0.0 200 sccm 4 VCR male 15-pin D-sub (tied grounds) 15 Weeks Loading... Quote Loading... GM50A013203RMM020
Loading... Quote Loading... Mass Flow Controller, 2000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal 15 Weeks GM50A013203RMM020 Mass Flow Controller, 2000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal UNIVERSAL 18.0 1.0 0.0 0.0 2000 sccm 4 VCR male 15-pin D-sub (tied grounds) 15 Weeks Loading... Quote Loading... GM50A013204RMM020
Loading... Quote Loading... Mass Flow Controller, 20000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal Contact Us GM50A013204RMM020 Mass Flow Controller, 20000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal UNIVERSAL 25.0 1.0 0.0 0.0 20,000 sccm 4 VCR male 15-pin D-sub (tied grounds) Contact Us Loading... Quote Loading... GM50A013204SMM020
Loading... Quote Loading... Mass Flow Controller, 20000 sccm, 0.25 in. Swagelok-style, 0-5 VDC, DB15, Metal Seal Contact Us GM50A013204SMM020 Mass Flow Controller, 20000 sccm, 0.25 in. Swagelok-style, 0-5 VDC, DB15, Metal Seal UNIVERSAL 25.0 1.0 0.0 0.0 20,000 sccm 0.25 in. Swagelok-style 15-pin D-sub (tied grounds) Contact Us Loading... Quote Loading... GM50A013501RMM020
Loading... Quote Loading... Mass Flow Controller, 50 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal 15 Weeks GM50A013501RMM020 Mass Flow Controller, 50 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal UNIVERSAL 23.0 1.0 0.0 0.0 50 sccm 4 VCR male 15-pin D-sub (tied grounds) 15 Weeks Loading... Quote Loading... GM50A013502RMM020
Loading... Quote Loading... Mass Flow Controller, 500 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal 15 Weeks GM50A013502RMM020 Mass Flow Controller, 500 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal UNIVERSAL 20.0 1.0 0.0 0.0 500 sccm 4 VCR male 15-pin D-sub (tied grounds) 15 Weeks Loading... Quote Loading... GM50A013503RMM020
Loading... Quote Loading... Mass Flow Controller, 5000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal 15 Weeks GM50A013503RMM020 Mass Flow Controller, 5000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal UNIVERSAL 17.0 1.0 0.0 0.0 5000 sccm 4 VCR male 15-pin D-sub (tied grounds) 15 Weeks Loading... Quote Loading... Show All Configuration Options The following options are available for GM50A Mass Flow Controllers
Ordering Code Example: GM50A013502R6V020

Configuration Option

Option Code

GM50A Mass Flow Controller GM50A Gas (Per Semi Standard E52-0703) Nitrogen (N2) 013 Ammonia (NH3) 029 Sulfur Hexafluoride (SF6) 110 Other Gas Options See Here Flow Range Full Scale 5 sccm 500 10 sccm 101 20 sccm 201 50 sccm 501 100 sccm 102 200 sccm 202 500 sccm 502 1000 sccm 103 2000 sccm 203 5000 sccm 503 10000 sccm 104 20000 sccm 204 30000 sccm 304 50000 sccm 504 Fittings (compatible with) 6 mm Swagelok M 8 mm Swagelok E 10 mm Swagelok P 12 mm Swagelok F 1/8 in. Swagelok (1000 sccm or below) A 1/4 in. Swagelok S 1/2 in. Swagelok K 3/8 in. Swagelok J 2 VCR Male (1000 sccm or below) B 4 VCR Male R 8 VCR Male T C-seal surface mount C W-seal surface mount H NW16 ISO-KF U Connector EtherCAT 8 DeviceNet 6 RS485 (uses 9 pin connector) 5 Profibus (1480 Compatible) 4 Profibus (1179B Compatible) 3 PROFINET 9 Analog 0 to 5 VDC (9 pin D connector) A Analog 0 to 5 VDC (9 Pin D connector), Tied Grounds L Analog 0 to 5 VDC (15 pin D connector) B Analog 0 to 5 VDC (15 pin D connector), Tied Grounds M Analog 4 to 20 mA (15 pin D connector) H Valve/Device Type Normally Closed/Mass Flow Controller, Teflon® M0 No Valve/Mass Flow Meter 30 Normally Open/Mass Flow Controller, Teflon® PT Firmware MKS will ship firmware revision current to date 20 The following options are available for GM51A Mass Flow Controllers
Ordering Code Example: GM51A013502R6V020

Configuration Option

Option Code

GM51A Mass Flow Controller GM51A Gas (Per Semi Standard E52-0703) Nitrogen (N2) 013 Ammonia (NH3) 029 Sulfur Hexafluoride (SF6) 110 Other Gas Options See Here Flow Range Full Scale 5 sccm 500 10 sccm 101 20 sccm 201 50 sccm 501 100 sccm 102 200 sccm 202 500 sccm 502 1000 sccm 103 2000 sccm 203 5000 sccm 503 10000 sccm 104 20000 sccm 204 30000 sccm 304 50000 sccm 504 Fittings (compatible with) 4 VCR Male R C-seal surface mount as per SEMI 2787.1 C W-seal surface mount as per SEMI 2787.3F H Connector EtherCAT 8 DeviceNet 6 RS485 (uses 9 pin connector) 5 PROFINET 9 Analog 0 to 5 VDC (9 pin D connector) A Analog 0 to 5 VDC (9 Pin D connector), Tied Grounds L Analog 0 to 5 VDC (15 pin D connector) B Analog 0 to 5 VDC (15 pin D connector), Tied Grounds M Valve/Device Type Normally Closed/Mass Flow Controller, Teflon® M0 No Valve/Mass Flow Meter 30 Reserved for Future Use Std. 0 Firmware MKS will ship firmware revision current to date 20  Show All Configuration Options Description GM50A Mass Flow Controller, Multi-gas, Multi-range, Metal-sealed, 5 sccm-50 slm, 1.45 in. Wide Loading... Quote Loading... GM51A Mass Flow Controller, Multi-gas, Multi-range, Metal-sealed, 5 sccm-50 slm, 1.25 in. Wide Loading... Quote Loading... gm50a-mass-flow-controller - Drawings & CAD Additional CAD file downloads are not available for this product. CAD File Downloads: Loading... Download Close Close Close gm50a-mass-flow-controller - Drawings Additional drawings are not available for this product. Close Close Specifications Type Mass Flow Controller (MFC) Full Scale Flow Range 5 - 50000 sccm (N2 equivalent) Control Range 2-100% of Full Scale Maximum Inlet Pressure 150 psig Normal Operating Pressure Differential 10 to 5000 sccm; 10 to 40 psid, 10000 to 20000 sccm; 15 to 40 psid, 30000 to 50000 sccm; 25 to 40 psid Proof Pressure 1000 psig Burst Pressure 1500 psig Typical Accuracy ±1% of set point for 20 to 100% Full Scale, ± 0.2% of Full Scale for 2 to 20% Full Scale Repeatability ± 0.3% of Reading Resolution 0.1% of Full Scale Zero Temperature Coefficient Span Temperature Coefficient Inlet Pressure Coefficient Typical Settling Time Warm-up Time 30 minutes Operating Temperature 10°C to 50°C Storage Humidity 0 to 95% Relative Humidity, non-condensing Storage Temperature -20° to 80°C External Leak Integrity -10 (scc/sec He) Leak Integrity Through Closed Valve Wetted Materials 316L S.S. VAR, 316 S.S., Elgiloy®, Nickel, KM45 Weight 3 lbs (1.4 kg) Compliance CE Features Communication Options/Specifications Digital I/O DeviceNet™ RS485 Profibus® EtherCAT® PROFINET® Input Power Required +11 to +25 VDC per ( +15 to +24 VDC ( +15 to +24 VDC ( +24 VDC ( +24 VDC ( Connector 5 pin micro connector (power and comm.) 9 pin Type D male (power and comm.) 9 pin Type D male (power)
9 pin Type D female (comm.) 2 x RJ-45 (comm.) male, M8 male,
5 pin (power) 2 x RJ-45 (comm.) male, M8 male,
5 pin (power) Data Rate Switch/Selection 4 positions: 125, 250, 500K (Default)
(programmable over network) No switch Set data rate via RS485 No switch Set data rate via Profibus No switch No switch Comm. Rate(s) 125 Kbps; 250 Kbps; 500 Kbps 9.6 Kbps; 19.2 Kbps 38.4 Kbps 9.6 Kbps to 12 Mbps 100 Mbps 100 Mbps MAC ID Switches/Addresses 2 switches, 10 positions; 0,0 to 6,3 1 to 254 Set address over RS485 Station Addresses 0,0 to 9,9 2 switches, 10 positions 3 switches, 16 positions N/A Network Size Up to 64 nodes Up to 32 nodes Up to 99 nodes Up to 4095 nodes N/A Visual Indicators LED Network (green/red)
LED Module (green/red) LED Comm (yellow)
LED Error (red) LED Comm (green/red)
LED Error (green/red) LED Power (green)
LED Run (green)
LED Error (red)
LED Comm (green) LED Maint (amber)
LED BUS Fault (red)
LED Ready (green)
LED Sys Fault (red) Compliance CE CE CE CE CE

Wide Choice of Digital and Analog Interfaces The GM50A digitally controlled MFC is available with either analog or digital I/O. The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. The GM50A’s analog and digital I/O can easily be used to replace those same I/O types of the 1179A MFCs. All GM50As include Modbus as an available secondary I/O (excludes PROFINET® and EtherCAT®).

Standard 3 inch Footprint The GM50A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range enabling its use without the need to modify existing gas line configurations.

Metal Sealed The GM50A metal sealed MFC features a 10 µ inch electropolished 316L surface finish which enables this mass flow controller for use with use in high purity applications.

Percent of Setpoint Accuracy Included digital calibration yields 1% of set point accuracy with N2 calibration gas for 20 to 100% of the full scale flow range.  Set point accuracy enables precise process control vs accuracy stated relative to full scale.  For mass flow rates of 2 to 20% full scale the accuracy is ±0.2% of full scale.

Embedded User Interface An embedded user interface provides the ability to easily change device range and user gas which reduces inventory requirements. You can also monitor MFC functionality and collect performance data in-situ.

Patented Thermal Sensor A well proven, patented thermal sensor design provides exceptional zero stability. US Patent No 5461913.

Accessories

Compare Description Compatibility Drawings, CAD & Specs Avail. Price CB147-12-10Cable, Mass Flow Controller, DB9, 10 ft. UNIVERSAL 15 Weeks Loading... Quote Loading... CB147-1-10Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, DB15, 10 ft. UNIVERSAL 15 Weeks Loading... Quote Loading... 100016744Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 10 ft. UNIVERSAL 15 Weeks Loading... Quote Loading... 100016745Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 25 ft. UNIVERSAL 15 Weeks Loading... Quote Loading... 100016746Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 50 ft. UNIVERSAL 15 Weeks Loading... Quote Loading... CB259-5-10Cable, Mass Flow Controller, 246, 247 or 660 Controllers, DB15, 10 ft. UNIVERSAL 15 Weeks Loading... Quote Loading... 100019087Cable, Mass Flow Controller, 946 Controller, DB9 to HD15, 10 ft. UNIVERSAL 15 Weeks Loading... Quote Loading... 100019088Cable, Mass Flow Controller, 946 Controller, DB9 to HD15, 25 ft. UNIVERSAL 15 Weeks Loading... Quote Loading... 100019089Mass Flow Controller Cable, 946 Controller, DB9 to HD15, 50 ft. UNIVERSAL 15 Weeks Loading... Quote Loading... RCBDMFC-3-10Cable, Mass Flow Controller, RoHS, DB9, 10 ft. UNIVERSAL 15 Weeks Loading... Quote Loading... RCBDMFC-1-10Cable, Mass Flow Controller, 246, 247 or 660 Controllers, RoHS, DB15, 10 ft. UNIVERSAL 15 Weeks Loading... Quote Loading... RCB147-1-10Mass Flow Meter Cable, PR4000 Controller to DB15 Mass Flow Meters, 10 ft. UNIVERSAL 15 Weeks Loading... Quote Loading... RCBDMFC-4-10Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, RoHS, DB15, 10 ft. UNIVERSAL 15 Weeks Loading... Quote Loading... RCB147-12-10Mass Flow Meter Cable, PR4000 Controller to DB9 Mass Flow Meters, 10 ft. UNIVERSAL Contact Us Loading... Quote Loading... RCB147-7-10Mass Flow Meter Cable, PR4000 Controller to 20-pin Card Edge Meters, 10 ft. UNIVERSAL Contact Us Loading... Quote Loading... Resources Literature GM51A, 1.125 in. wide, Metal Sealed, Mass Flow Controller, 5 sccm - 50 slm (553.1 kB, PDF) GM50A Metal-sealed, Digital Mass Flow Controllers (0, PDF) Application Notes Accelerated Automotive Emission Control Catalyst Research   (0, PDF) MFCs for Gas Control in Case Hardening Processes   (246.3 kB, PDF) Gas Delivery for Plasma Spray Coating Applications   (320.8 kB, PDF) Sample Gas Codes for Mass Flow Controllers/Meters Gas Correction Factors for Thermal-based Mass Flow Manuals G and I Series Mass Flow Controller/Meter Manual   (2.2 MB, PDF) G-Series Mass Flow Controller/Meter DeviceNet™ Supplement   (112.5 kB, PDF) G-Series Mass Flow Controller/Meter RS485 Supplement   (149.3 kB, PDF) G-Series Mass Flow Controller/Meter PROFINET Communications Supplement   (1 MB, PDF) G and I-Series Mass Flow Controller/Meter Profibus Manual Supplement   (86.9 kB, PDF) G-Series/I-Series MFC Modbus Register Map and Specification   (502.9 kB, PDF) G-Series MFC Web Browser Tutorial   (5.6 MB, PDF) G-Series Mass Flow Controller & Meter EtherCAT Manual Supplement   (1.1 MB, PDF) Drawings & CADs GM50A Mass Flow Controller/Meter 3D Model Files GM51A Mass Flow Controller/Meter 3D Model Files GM50A Mass Flow Controller Dimensional Drawing (336.4 kB, PDF) Device Description Files GM50A EDS File (346.2 kB, EDS) GM50A ESI File (132 kB, XML) GM50A Profibus GSD File (1179B compatible) (2.5 kB, GSD) GM50A Profibus GSD File (1480 compatible) (2.6 kB, GSD) GM51A EDS File (346.2 kB, EDS) GM51A ESI File (132 kB, XML) gm50a-mass-flow-controller Related Products PR4000B Digital Power Supply and Readout 946 Vacuum System Controller Test Diagnostic Circuit Boards GM50A/GM51A Metal-sealed 5-50,000 sccm Mass Flow Meters PSR1A Single Channel Power Supply, Readout and Set Point Controller PSR4A Four Channel Power Supply, Readout & Set Point Controller Related Products PR4000B Digital Power Supply and Readout 946 Vacuum System Controller Test Diagnostic Circuit Boards GM50A/GM51A Metal-sealed 5-50,000 sccm Mass Flow Meters PSR1A Single Channel Power Supply, Readout and Set Point Controller PSR4A Four Channel Power Supply, Readout & Set Point Controller Need help? Contact an Applications Specialist by sending us an email

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