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GM50A013103RMM020 Mass Flow Controller

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GM50A013103RMM020 Mass Flow Controller MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Mass Flow Controllers & Meters Mass Flow Controllers G-Series Fast and Repeatable Mass Flow Controllers GM50A/GM51A Metal-sealed 5-50,000 sccm Mass Flow Controllers GM50A013103RMM020 Mass Flow Controller, 1000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal Model: GM50A013103RMM020 Mass Flow Controller, 1000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal Mass Flow Controller, 1000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal Model: GM50A013103RMM020 15 Weeks Loading... Request a Quote Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to GM50A013103RMM020 Mass Flow Controller, 1000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal Continue Shopping View All Saved Lists     Compare Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to GM50A013103RMM020 Mass Flow Controller, 1000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal Continue Shopping View All Saved Lists Overview Overview The G-Series GM50A013103RMM020 metal-sealed, digitally-controlled mass flow controller utilizes the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. It has a Full Scale Flow Range of 1000 sccm and a control range of 20 to 1000 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. 

Product Series Overview GM50A/GM51A Metal-sealed 5-50,000 sccm Mass Flow Controllers Technical Specs Technical Specs Type Mass Flow Controller Full Scale Flow Range 1000 sccm Control Range 20 - 1000 sccm Calibration Gas N2 (or equivalent) Fitting Type 4 VCR male Seal Material Metal Flow Input Output Signal 0 - 5 VDC Analog Connector 15-pin D-sub (tied grounds) Maximum Inlet Pressure 150 psig Normal Operating Pressure Differential 10 - 40 psid Proof Pressure 1000 psig Burst Pressure 1500 psig Typical Accuracy ±1% of set point for 20 to 100% Full Scale, ± 0.2% of Full Scale for 2 to 20% Full Scale Repeatability ± 0.3% of Reading Resolution 0.1% of Full Scale Zero Temperature Coefficient Span Temperature Coefficient Inlet Pressure Coefficient Typical Settling Time Warm-up Time 30 minutes Operating Temperature 10 - 50°C Storage Humidity 0 - 95% Relative Humidity, non-condensing Storage Temperature -20 to 80°C External Leak Integrity -09 (scc/sec He) Leak Integrity Through Closed Valve Wetted Materials 316L S.S. VAR, 316 S.S., Elgiloy®, Nickel, KM45 Surface Finish 10µ inch average Ra (electropolished) Weight 3 lbs (1.4 kg) Compliance CE Technical Specs Type Mass Flow Controller Full Scale Flow Range 1000 sccm Control Range 20 - 1000 sccm Calibration Gas N2 (or equivalent) Fitting Type 4 VCR male Seal Material Metal Flow Input Output Signal 0 - 5 VDC Analog Connector 15-pin D-sub (tied grounds) Maximum Inlet Pressure 150 psig Normal Operating Pressure Differential 10 - 40 psid Proof Pressure 1000 psig Burst Pressure 1500 psig Typical Accuracy ±1% of set point for 20 to 100% Full Scale, ± 0.2% of Full Scale for 2 to 20% Full Scale Repeatability ± 0.3% of Reading Resolution 0.1% of Full Scale Zero Temperature Coefficient Span Temperature Coefficient Inlet Pressure Coefficient Typical Settling Time Warm-up Time 30 minutes Operating Temperature 10 - 50°C Storage Humidity 0 - 95% Relative Humidity, non-condensing Storage Temperature -20 to 80°C External Leak Integrity -09 (scc/sec He) Leak Integrity Through Closed Valve Wetted Materials 316L S.S. VAR, 316 S.S., Elgiloy®, Nickel, KM45 Surface Finish 10µ inch average Ra (electropolished) Weight 3 lbs (1.4 kg) Compliance CE Resources & Downloads Resources & Downloads 3D Product Models Download CAD Files Drawings & CADs GM50A Mass Flow Controller/Meter 3D Model Files Literature GM50A Metal-sealed, Digital Mass Flow Controllers (0, PDF) Mass Flow Controller, 1000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal PART: GM50A013103RMM020 15 Weeks Loading... Request a Quote    Compare Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to GM50A013103RMM020 Mass Flow Controller, 1000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal Continue Shopping View All Saved Lists Overview Technical Specs Resources & Downloads Need help? Contact an Applications Specialist by sending us an email GM50A013103RMM020 - Drawings & CAD Additional CAD file downloads are not available for this product. CAD File Downloads: Loading... Download Close Close Close GM50A013103RMM020 - Drawings Additional drawings are not available for this product. Close Close GM50A013103RMM020

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To access this and other valuable technical resources, please sign in or register for a new online account. Cancel Add to Cart Mass Flow Controller, 1000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal Part:  GM50A013103RMM020 Availability:  15 Weeks Add to Cart Also available on Newport.com Qty:  Availability:  15 Weeks Shop at Newport.com  Ultra-High Velocity Learn More Invalid VAT ID

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