971B UniMag Cold Cathode Vacuum Transducer

971B UniMag Cold Cathode Vacuum Transducer MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Granville-Phillips® Indirect Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Transducers 971B UniMag™ Cold Cathode Vacuum Transducers Print 971B UniMag™ Cold Cathode Vacuum Pressure Transducers 971B UniMag™ Cold Cathode Vacuum Pressure Transducers Products Configuration Options Features Accessories Resources Contact Us Overview

The 971B UniMag™ vacuum transducer offers a measurement range from 1x10-8 Torr to 5x10-3 Torr and is based on cold cathode inverted magnetron sensor technology. The 971B is a cost effective solution for base pressure measurement and control. In addition to its small size, broad range and lower cost, the 971 UniMag™ Cold Cathode Inverted Magnetron Transducer Vacuum Gauge can be operated via digital communication or as an autonomous analog unit.  Series 970B transducers have standard 15 pin HD Sub-D connectors.

Absolute measurement range from 1x10-8 to 0.005 Torr The cold cathode anode module design is user serviceable to decrease downtime Ease of operation via analog output, RS232, or RS485 Optional integrated touch-screen display available for local pressure indication Three user configurable relays for process control Small footprint design provides a compact transducer solution See All Features Products Show Filters:  View all products Compare Description Compatibility sortOrder rankScore ranking Drawings, CAD & Specs Display Relays Fitting Type Digital Communication Availability Featured Item Price Brand 971B-21024
Loading... Quote Loading... Vacuum Pressure Transducer, Cold Cathode, Display, NW25 ISO-KF, RS232 Contact Us 971B-21024 Vacuum Pressure Transducer, Cold Cathode, Display, NW25 ISO-KF, RS232 UNIVERSAL 0.0 1.0 0.0 0.0 Touch-screen 0 NW25 ISO-KF RS232 Contact Us Loading... Quote Loading... 971B-21030
Loading... Quote Loading... Vacuum Pressure Transducer, Cold Cathode, NW25 ISO-KF, RS232, 3 Relays Contact Us 971B-21030 Vacuum Pressure Transducer, Cold Cathode, NW25 ISO-KF, RS232, 3 Relays UNIVERSAL 0.0 1.0 0.0 0.0 No 3 NW25 ISO-KF RS232 Contact Us Loading... Quote Loading... 971B-21034
Loading... Quote Loading... Vacuum Pressure Transducer, Cold Cathode, Display, NW25 ISO-KF, RS232, 3 Relays Contact Us 971B-21034 Vacuum Pressure Transducer, Cold Cathode, Display, NW25 ISO-KF, RS232, 3 Relays UNIVERSAL 0.0 1.0 0.0 0.0 Touch-screen 3 NW25 ISO-KF RS232 Contact Us Loading... Quote Loading... 971B-22020
Loading... Quote Loading... Vacuum Pressure Transducer, Cold Cathode, NW25 ISO-KF, RS485 Contact Us 971B-22020 Vacuum Pressure Transducer, Cold Cathode, NW25 ISO-KF, RS485 UNIVERSAL 0.0 1.0 0.0 0.0 No 0 NW25 ISO-KF RS485 Contact Us Loading... Quote Loading... 971B-22034
Loading... Quote Loading... Vacuum Pressure Transducer, Cold Cathode, Display, NW25 ISO-KF, RS485, 3 Relays Contact Us 971B-22034 Vacuum Pressure Transducer, Cold Cathode, Display, NW25 ISO-KF, RS485, 3 Relays UNIVERSAL 0.0 1.0 0.0 0.0 Touch-screen 3 NW25 ISO-KF RS485 Contact Us Loading... Quote Loading... 971B-71020
Loading... Quote Loading... Vacuum Pressure Transducer, Cold Cathode, 2.75 in. CF, RS232 Contact Us 971B-71020 Vacuum Pressure Transducer, Cold Cathode, 2.75 in. CF, RS232 UNIVERSAL 0.0 1.0 0.0 0.0 No 0 2.75 in. CF RS232 Contact Us Loading... Quote Loading... 971B-71024
Loading... Quote Loading... Vacuum Pressure Transducer, Cold Cathode, Display, 2.75 in. CF, RS232 Contact Us 971B-71024 Vacuum Pressure Transducer, Cold Cathode, Display, 2.75 in. CF, RS232 UNIVERSAL 0.0 1.0 0.0 0.0 Touch-screen 0 2.75 in. CF RS232 Contact Us Loading... Quote Loading... 971B-71030
Loading... Quote Loading... Vacuum Pressure Transducer, Cold Cathode, 2.75 in. CF, RS232, 3 Relays Contact Us 971B-71030 Vacuum Pressure Transducer, Cold Cathode, 2.75 in. CF, RS232, 3 Relays UNIVERSAL 0.0 1.0 0.0 0.0 No 3 2.75 in. CF RS232 Contact Us Loading... Quote Loading... 971B-71034
Loading... Quote Loading... Vacuum Pressure Transducer, Cold Cathode, Display, 2.75 in. CF, RS232, 3 Relays Contact Us 971B-71034 Vacuum Pressure Transducer, Cold Cathode, Display, 2.75 in. CF, RS232, 3 Relays UNIVERSAL 0.0 1.0 0.0 0.0 Touch-screen 3 2.75 in. CF RS232 Contact Us Loading... Quote Loading... 971B-72020
Loading... Quote Loading... Vacuum Pressure Transducer, Cold Cathode, 2.75 in. CF, RS485 Contact Us 971B-72020 Vacuum Pressure Transducer, Cold Cathode, 2.75 in. CF, RS485 UNIVERSAL 0.0 1.0 0.0 0.0 No 0 2.75 in. CF RS485 Contact Us Loading... Quote Loading... 971B-72024
Loading... Quote Loading... Vacuum Pressure Transducer, Cold Cathode, Display, 2.75 in. CF, RS485 Contact Us 971B-72024 Vacuum Pressure Transducer, Cold Cathode, Display, 2.75 in. CF, RS485 UNIVERSAL 0.0 1.0 0.0 0.0 Touch-screen 0 2.75 in. CF RS485 Contact Us Loading... Quote Loading... 971B-72034
Loading... Quote Loading... Vacuum Pressure Transducer, Cold Cathode, Display, 2.75 in. CF, RS485, 3 Relays Contact Us 971B-72034 Vacuum Pressure Transducer, Cold Cathode, Display, 2.75 in. CF, RS485, 3 Relays UNIVERSAL 0.0 1.0 0.0 0.0 Touch-screen 3 2.75 in. CF RS485 Contact Us Loading... Quote Loading... 971B-91020
Loading... Quote Loading... Vacuum Pressure Transducer, Cold Cathode, NW40 ISO-KF, RS232 Contact Us 971B-91020 Vacuum Pressure Transducer, Cold Cathode, NW40 ISO-KF, RS232 UNIVERSAL 0.0 1.0 0.0 0.0 No 0 NW40 ISO-KF RS232 Contact Us Loading... Quote Loading... 971B-91024
Loading... Quote Loading... Vacuum Pressure Transducer, Cold Cathode, Display, NW40 ISO-KF, RS232 Contact Us 971B-91024 Vacuum Pressure Transducer, Cold Cathode, Display, NW40 ISO-KF, RS232 UNIVERSAL 0.0 1.0 0.0 0.0 Touch-screen 0 NW40 ISO-KF RS232 Contact Us Loading... Quote Loading... 971B-91030
Loading... Quote Loading... Vacuum Pressure Transducer, Cold Cathode, NW40 ISO-KF, RS232, 3 Relays Contact Us 971B-91030 Vacuum Pressure Transducer, Cold Cathode, NW40 ISO-KF, RS232, 3 Relays UNIVERSAL 0.0 1.0 0.0 0.0 No 3 NW40 ISO-KF RS232 Contact Us Loading... Quote Loading... 971B-92020
Loading... Quote Loading... Vacuum Pressure Transducer, Cold Cathode, NW40 ISO-KF, RS485 Contact Us 971B-92020 Vacuum Pressure Transducer, Cold Cathode, NW40 ISO-KF, RS485 UNIVERSAL 0.0 1.0 0.0 0.0 No 0 NW40 ISO-KF RS485 Contact Us Loading... Quote Loading... 971B-92030
Loading... Quote Loading... Vacuum Pressure Transducer, Cold Cathode, NW40 ISO-KF, RS485, 3 Relays Contact Us 971B-92030 Vacuum Pressure Transducer, Cold Cathode, NW40 ISO-KF, RS485, 3 Relays UNIVERSAL 0.0 1.0 0.0 0.0 No 3 NW40 ISO-KF RS485 Contact Us Loading... Quote Loading... 971B-92034
Loading... Quote Loading... Vacuum Pressure Transducer, Cold Cathode, Display, NW40 ISO-KF, RS485, 3 Relays Contact Us 971B-92034 Vacuum Pressure Transducer, Cold Cathode, Display, NW40 ISO-KF, RS485, 3 Relays UNIVERSAL 0.0 1.0 0.0 0.0 Touch-screen 3 NW40 ISO-KF RS485 Contact Us Loading... Quote Loading... Show All Configuration Options The following options are available for 971B UniMag™ Vacuum Pressure Transducers
Ordering Code Example: 971B-21034

Configuration Option

Option Code

971B UniMag Vacuum Pressure Transducer 971B Fitting NW25 ISO-KF 2 NW40 ISO-KF 9 2.75 in. OD CF 7 Interface RS232 1 RS485 2 Analog Output 0.5 VDC per decade 0 Relays No relays 2 3 relays 3 Enclosure Standard 0 Standard with display 4  Show All Configuration Options Description 971B Cold Cathode Vacuum Transducer, UniMag, Series 971B Loading... Quote Loading... 971b-unimag-cold-cathode-transducer - Drawings & CAD Additional CAD file downloads are not available for this product. CAD File Downloads: Loading... Download Close Close Close 971b-unimag-cold-cathode-transducer - Drawings Additional drawings are not available for this product. Close Close Specifications Absolute Measurement Range 1 x 10-8 Torr to 5 x 10-3 Torr Digital Communication RS485 or RS232 Type Vacuum Transducer Sensor Cold Cathode Display Touch-screen (optional) Seal Material Viton Enclosure Standard or IP56 Electrical Connector 15-pin, High Density, D-sub male Relays 0 or 3 Installation Orientation Any Set Point Range 1 x 10-8 Torr to 5 x 10-3 Torr Calibration Gas Nitrogen Operating Temperature 0-40°C (32-104°F) Maximum Bakeout Temperature 85°C (185°F), non-operating Digital Controls Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type Digital Status Pressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions Analog Output 0.5 VDC per decade Relay Contact Rating 1 A @ 30VAC/DC, resistive Power Requirements 9-30 VDC, 2 W Accuracy 5 x 10-8 Torr to 10-3 ± 30% of reading Repeatability 5 x 10-8 Torr to 10-3 ± 30% of reading Overpressure Limit 1500 Torr Internal Volume 21 cc Exposed Materials 304 and 403 stainless steel, Viton®, Cu-Ni and Ag-Cu alloy, ceramic, titanium Electronic Casing and Flange 304 stainless steel Weight 12.7 oz (360 g) Compliance CE Features Digital Communications Series 970B vacuum transducers feature RS232, RS485, and EtherCAT (972B only) digital communications interface for setup of transducer parameters and to provide real time pressure measurement. The digital interface can be used to control pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; set point functions: value, hysteresis, direction, HV enable, protect, control set point, and gas type.

0.5 VDC per Decade Analog Output All Series 970B transducers have an analog pressure output of 0.5 VDC per decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. It can emulate analog voltage outputs from a variety of other vacuum transducers. The emulation feature can be used to upgrade and replace other vendors’ gauges in OEM applications without changing system software.

Optional Integrated Touch-screen Display The optional integrated touch-screen display is user configurable; the user can change pressure units, orientation and has access to set point parameters as well as gas type. The display also indicates the status of the available set point relays. Displayed pressure reading from individual sensors or combined reading can be seen from >5 meters away on the high contrast display.

Process Control Relays The Series 970B has up to three mechanical SPST relays which can be used for process control, examples are interlocking valves or pumps. Relay contacts are rated at 1 amp for 30 VAC or VDC, resistive loads.

Applications Sensor and transducer measurement ranges. From top to bottom: 971B, 972B, and 974B The Series 970B Transducers are compact, low cost measurement solutions for vacuum users operating within the pressure range of atmosphere to 10-8 Torr. The small size of the Series 970B transducers makes them ideal for system integrators looking to reduce footprint and enable miniaturization.

Applications include:

Analytical equipment (mass spectrometer control) Scanning electron microscopes Coating systems Semiconductor loadlock pressure control General vacuum base pressure measurement

Accessories Compatible Cables

Compare Description Compatibility Drawings, CAD & Specs Avail. Price 100013620Cable, 901P, 902B, 910, 925, 971B, 972B, or 974B Gauges, RS232 to PDR900 15 Pin, 10 ft. UNIVERSAL Contact Us Loading... Quote Loading... 100013671Cable, 901P, 909AR, 910, 925, 971, 972, 973, 974, 979B, 999 Gauges, RS485 to PDR900 15 Pin, 10 ft. UNIVERSAL Contact Us Loading... Quote Loading... 100013622Cable, 901P, 902B, 910, 925, 971B, 972B, or 974B Gauges, RS232 to PDR900 15 Pin, 25 ft. UNIVERSAL Contact Us Loading... Quote Loading... Accessories

Compare Description Compatibility Drawings, CAD & Specs Avail. Price PDR900-12-USVacuum Gauge Controller, RS232 and RS485, US Power Cord, Series 900 UNIVERSAL Contact Us Loading... Quote Loading... 970BNT-KITSeries 970 Cold Cathode Rebuild Kit UNIVERSAL 12 Weeks Loading... Quote Loading... 900USB-1USB Adapter, Series 900 Vacuum Transducers, 15 pin UNIVERSAL Contact Us Loading... Quote Loading... 100016640US Power Supply for 971B, 972B, 974B, 925, 910, 901P, & 275Transducers UNIVERSAL 15 Weeks Loading... Quote Loading... 100014245US Power Supply for 9 Pin D-sub gauges: 901P, 925, 910, 902B, 971B, 972B, & 974B Series Transducers UNIVERSAL 15 Weeks Loading... Quote Loading... Resources Literature 970 Cold Cathode Transducers (250.9 kB, PDF) Vacuum Measurement Product Guide (711.5 kB, PDF) Manuals 900 Series Vacuum Transducer USB Adapter Manual   (129.6 kB, PDF) 971, 972, 974 Vacuum Transducer Pin-outs (60.8 kB, PDF) 971B UniMag™ Transducer Manual (100017131, Rev. J)   (1.6 MB, PDF) 900 Series EtherCAT Communication Protocol Manual (20003335)   (925.8 kB, PDF) 971B, 972B, 974B Anode/Cathode Replacement Procedure   (106.8 kB, PDF) Drawings & CADs 971 UniMag™ Cold Cathode Transducer Dimensional Drawing (242.3 kB, PDF) 971b-unimag-cold-cathode-transducer Related Products PDR900 Vacuum Gauge Controller 972B DualMag™ Cold Cathode - MicroPirani™ Vacuum Transducers 974B QuadMag™ Cold Cathode - MicroPirani™ - Piezo Vacuum Transducers 903 Inverted Magnetron Cold Cathode Vacuum Transducer Related Products PDR900 Vacuum Gauge Controller 972B DualMag™ Cold Cathode - MicroPirani™ Vacuum Transducers 974B QuadMag™ Cold Cathode - MicroPirani™ - Piezo Vacuum Transducers 903 Inverted Magnetron Cold Cathode Vacuum Transducer Need help? Contact an Applications Specialist by sending us an email

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