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VISION-2000-A ALD or CVD Process Monitor

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VISION-2000-A ALD or CVD Process Monitor MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Gas Analyzers Mass Spectrometers Vacuum Process and Chamber Environment Monitors Vision 2000-A RGA for ALD & CVD VISION-2000-A ALD or CVD Process Monitor, 1-100, 1-200 or 1-300 amu Model: VISION-2000-A ALD or CVD Process Monitor, 1-100, 1-200 or 1-300 amu ALD or CVD Process Monitor, 1-100, 1-200 or 1-300 amu Model: VISION-2000-A 15 Weeks Loading... Request a Quote Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to VISION-2000-A ALD or CVD Process Monitor, 1-100, 1-200 or 1-300 amu Continue Shopping View All Saved Lists     Compare Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to VISION-2000-A ALD or CVD Process Monitor, 1-100, 1-200 or 1-300 amu Continue Shopping View All Saved Lists Overview Overview The Vision 2000-A Residual Gas Analyzer (RGA) improves process productivity and product quality by providing real-time trace level monitoring of various gas species, including precursors, reaction byproducts, and contaminants during ALD and CVD processes. It can monitor the chamber baseline for air leaks and background contamination levels. In-situ monitoring of ALD and CVD processes can help characterize and prevent damage to production equipment and wafer yield loss owing to precursor concentration change, chamber leak or contamination.

Product Series Overview Vision 2000-A RGA for ALD & CVD Technical Specs Technical Specs Mass Range 1-100, 1-200, or 1-300 amu Ion Source High conductance closed ion source Filaments Independently replaceable twin Tungsten or Thoria filaments Mass Filter Double filter (1-inch "RF only" pre-filter with 4-inch main filter) Detector Dual (Faraday and secondary electron multiplier) Technical Specs Mass Range 1-100, 1-200, or 1-300 amu Ion Source High conductance closed ion source Filaments Independently replaceable twin Tungsten or Thoria filaments Mass Filter Double filter (1-inch "RF only" pre-filter with 4-inch main filter) Detector Dual (Faraday and secondary electron multiplier) ALD or CVD Process Monitor, 1-100, 1-200 or 1-300 amu PART: VISION-2000-A 15 Weeks Loading... Request a Quote    Compare Add to List Add to List Create a New List List Name Required Create a New List Cancel Add to List Your Saved Lists: Preferred List" selected> Add to List Create a New List List Name Required or Create a New List Cancel Add to List 1 item(s) added to VISION-2000-A ALD or CVD Process Monitor, 1-100, 1-200 or 1-300 amu Continue Shopping View All Saved Lists Overview Technical Specs Need help? Contact an Applications Specialist by sending us an email VISION-2000-A - Drawings & CAD Additional CAD file downloads are not available for this product. CAD File Downloads: Loading... Download Close Close Close VISION-2000-A - Drawings Additional drawings are not available for this product. Close Close VISION-2000-A

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To access this and other valuable technical resources, please sign in or register for a new online account. Cancel Add to Cart ALD or CVD Process Monitor, 1-100, 1-200 or 1-300 amu Part:  VISION-2000-A Availability:  15 Weeks Add to Cart Also available on Newport.com Qty:  Availability:  15 Weeks Shop at Newport.com  Ultra-High Velocity Learn More Invalid VAT ID

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