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CMA50A 14,000-50,000 sccm Compact, Fast Response Mass Flow Controller

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CMA50A 14,000-50,000 sccm Compact, Fast Response Mass Flow Controller MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Mass Flow Controllers & Meters Mass Flow Controllers C-Series Compact, Ultrafast Mass Flow Controllers CMA50A 14,000-50,000 sccm Compact, Fast Response Mass Flow Controller Print CMA50A 14,000-50,000 sccm Compact, Fast Response Mass Flow Controller CMA50A 14,000-50,000 sccm Compact, Fast Response Mass Flow Controller Products Configuration Options Features Resources Contact Us Overview

Ultrafast response time of Control range from 0.1 to 100% of Full Scale Accuracy of ±0.8% of set point Minimal zero and span drift assure long term reproducibility Surface mount interface available for compact gas panel design Embedded web browser for setup and diagnostics See All Features Products Configuration Options The following options are available for CMA50A Mass Flow Controllers & Meters
Ordering Code Example: CMA50A013504RCV1010

Configuration Option

Option Code

Controller CMA50A CMA50A Gas (Per Semi Standard E52-0703) He 001 Ar 004 Air 008 N2 013 O2 015 SF6 110 For other gases, contact MKS Instruments
Flow range is based on gas - see the Selection Table below. Flow Range Full Scale 20000 sccm 204 30000 sccm 304 40000 sccm 404 50000 sccm 504 Fittings (compatible with) 4 VCR Male R 0.25 in. Compression S Downmount O-ring Seal C W-Seal (1.125 in. Wide Seal Configuration) H For other options, contact MKS Instruments Connector Dual I/O (Analog 9-Pin/RS485 ASCII) RS-485 Primary R Dual I/O (Analog 9-Pin/RS485 ASCII) Analog Primary C Modbus TCP M PROFINET 9 Seal Materials Viton V Valve/Device Type Normally Closed/Mass Flow Controller (MFC) 1 No Valve/Mass Flow Meter (Same length as MFC) 3 No Valve/Mass Flow Meter (Reduced Length)
Reduced length not available for W-Seal or Downmount O-ring Seal fittings 4 Reserved (future use) Standard Build 0 Firmware RS485/Analog Dual I/O 10 Modbus TCP 10 PROFINET 10  Show All Configuration Options Description CMA50A-MFC 14,000-50,000 sccm Compact, Fast Response Mass Flow Controller Loading... Quote Loading... cma50a-mass-flow-controller - Drawings & CAD Additional CAD file downloads are not available for this product. CAD File Downloads: Loading... Download Close Close Close cma50a-mass-flow-controller - Drawings Additional drawings are not available for this product. Close Close Specifications Type Mass Flow Controller Full Scale Flow Range 14,001-50,000 sccm (N2) Maximum Inlet Pressure 80 psig Normal Operating Pressure Differential 14001 to 50000 sccm: 30 to 45 psid (N2) Proof Pressure 232 psi/16 bar Burst Pressure 1000 psi/70 bar Control Range Digital I/O: 0.1% to 100% of Full Scale
Analog I/O: 0.2% to 100% of Full Scale Typical Accuracy ±0.8% of set point for 20 to 100% Full Scale
±0.16% of Full Scale for (with N2 calibration gas) Repeatability ±0.2% of Reading Zero Temperature Coefficient ≤0.005% of Full Scale/°C Span Temperature Coefficient ≤0.06% of Reading/°C Pressure Coefficient Response Time ≤100 ms typical above 10% Full Scale, 50 sccm - 5 slm Full Scale models
≤150 ms typical above 10% Full Scale, 10 slm Full Scale models
(per SEMI Guideline E-17-0600) Warm-up Time ≤1 min (to within 0.2% of Full Scale of set point) Operating Temperature 10-50°C (32-122°F) Storage Temperature 0-60°C (32-140°F) Fitting Type Compatible with:
Swagelok® 4 VCR® male
surface mount (o-ring and w-seal)
0.25 in. Swagelok compression External Leak Integrity -09 (scc/sec He) Leak Integrity Through Closed Valve (to assure no flow-through, a separate positive shut-off valve is required) Wetted Materials Aluminum, Stainless Steel, Silicon, Silicon Oxide, Silicon Carbide, Viton®, Glob Top Seal Material Viton Valve Position Normally closed Set Point Command Signal 0-5 VDC (0-10 VDC, optional) Power Requirements 24 VDC @ (±10%), Flow Input Output Signal 0-5 VDC (0-10 VDC, optional) Analog I/O Connector 9-pin Type D Weight 0.68 lbs (310 grams) (VCR) Compliance CE Features CMA50A Selection Guide C-Series mass flow controllers and meters are selected based on the gas and range desired.  Use this table to determine the best model for your application:

CMA50A Gas SEMI# Gas Symbol Minimum Full Scale Maximum Full Scale 1 He 16001 50000 4 Ar 17001 49000 8 Air 14001 50000 13 N2 14001 50000 15 O2 13001 50000 110 SF6 4501 8100

C-Series Communication Options Digital I/O RS485 PROFINET® Modbus Input Power Required 24 VDC @ (±10%), +24 VDC ( +24 VDC ( Connector 9 pin Type D male (power and comm.) 2 x RJ-45 (comm.) male, M8 male, 5 pin (power) 1 x RJ-45 (comm.) male,DC power plug Data Rate Switch/Selection No switch
Set data rate via RS485 MFC: No switch
MFM: N/A N/A Comm. Rate(s) 9.6 Kbps
19.2 Kbps
38.4 Kbps MFC: 100 Mbps
MFM: N/A N/A MAC ID Switches/Addresses Set address over RS485 Station Addresses 0,0 to 9,9 N/A N/A Network Size Up to 32 nodes N/A N/A Visual Indicators LED Power
LED Run (green) LED Maint (amber)
LED BUS Fault (red)
LED Ready (green)
LED Sys Fault (red) LED Module
LED Network Compliance CE CE CE

The CMA50A compact design is only 1 inch (25.4 mm) and less than 4.4 inches (111.8 mm) high. It has standard lengths of 4.88 inches (124 mm) for 4 VCR® male and 4.54 inches (113 mm) for 0.25 inch compression seal gas line connections. Downmount versions are also available. A low thermal mass MEMS sensor provides rapid sensing of flow changes with low noise output. The solid state design of the sensor makes it resistant to water condensation, particles, pressure shock and vibration.

Fast response, wide dynamic control range, and 0.8% of set point accuracy make this MFC an excellent choice for flow control in critical process applications where noncorrosive gases are used. Typical uses can be found in mass spectroscopy, vacuum coating, bioreactor as well as many other applications. The CMA50A incorporates a fast-acting solenoid control valve coupled with the flow sensor via the MFC’s superior flow signal processing and control algorithm. This results in response times to set point of less than 100 milliseconds.

Resources Literature CMA50A 14,000-50,000 sccm Compact, Fast Response Mass Flow Controller (2 MB, PDF) Drawings & CADs C-Series Mass Flow Controller/Meter 3D Model Files C-Series Mass Flow Controller Dimensional Drawing (2 MB, PDF) Manuals C-Series Mass Flow Controller Pin-outs (94 kB, PDF)   (2 MB, PDF) C-Series MFC/MFM Modbus Register Map & Specification (135.9 kB, PDF) Application Notes Sample Gas Codes for Mass Flow Controllers/Meters Gas Correction Factors for Thermal-based Mass Flow Device Description Files C-Series MFC/MFM PROFINET GSDML File (.XML) (30.5 kB, XML) cma50a-mass-flow-controller Related Products CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Controller CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Meter 946 Vacuum System Controller Related Products CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Controller CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Meter 946 Vacuum System Controller Need help? Contact an Applications Specialist by sending us an email

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