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C-Series Compact Ultrafast Mass Flow Controllers & Meters

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C-Series Compact Ultrafast Mass Flow Controllers & Meters MKS logo Products MKS Newport Ophir Spectra-Physics Atotech ESI Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service MKS Service Solutions RMA Request Form Health & Safety Forms Contact Global Service Technical Support Product Technical Support Training Programs Contact Product Technical Support Technical Resources Literature Manuals Technical Papers Application Notes Standards Compliance View All Technical Resources Contact MKS Company About MKS Guiding Principles Executives & Fellows Solutions & Innovations Legal Information Environmental, Social and Governance Investor Relations Corporate Governance Stock Information News Releases Events & Presentations Annual Meeting Materials SEC Filings and Forms Financial Analysts All Investor Relations News & Media Trade Shows & Events Press Releases Media Library Careers Job Openings We're Hiring! About MKS MKS Benefits Message from CEO Business Units & Products MY INNOVATION Stories Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Sign In Compare products Product Comparison 

Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. Compare All Close Shopping cart items Shopping cart items Keyword search Search Submit search mks Search Submit search Products MKS Capacitance Manometers Compact Pressure Transducers General Purpose Pressure Transducers High Performance Pressure Transducers Industrial Pressure Transducers Reference Pressure Transducers View All Capacitance Manometers Mass Flow Controllers & Meters Mass Flow Controllers Mass Flow Meters In Situ Flow Verifiers Flow Ratio Controllers Mass Flow Controller Accessories Vacuum Gauges Vacuum Pressure Transducers Vacuum Pressure Sensors Vacuum Gauge Controllers Vacuum Gauge Accessories Vacuum Gauge Calibration Legacy Vacuum Gauges Gas Analyzers Mass Spectrometers Tunable Filter Spectrometers FTIR Gas Analyzers NDIR Gas Analyzers Vacuum Flanges & Fittings ISO-KF Flanges & Fittings ISO-MF Flanges & Fittings CF Flanges & Fittings Butt Weld Flanges & Fittings Custom Vacuum Fabrication RF & Microwave Generators Microwave Generators RF Power Generators Pressure Controllers & Valves Pressure Controllers Vacuum Isolation Valves Downstream Exhaust Throttle Valves Upstream Flow Control Valves Gate Valves Plasma & Reactive Gas Solutions Remote Plasma Sources Ozone Generators & Systems Dissolved Gas Foreline Plasma Clean Systems Automation, Control & Sensing Heater Jackets & Traps Special Offers Virtual Booth Newport Ophir Spectra-Physics Atotech ESI Solutions Semiconductor Electronics and Packaging Specialty Industrial Support Global Service Technical Support Technical Resources Contact MKS Company About MKS Investor Relations News & Media Careers Contact Contact Us Online Corporate Offices Sales & Application Support Calibration, Service & Repairs Product Technical Support Products Mass Flow Controllers & Meters Mass Flow Controllers C-Series Compact, Ultrafast Mass Flow Controllers CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Controller Print CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Controller CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Controller Products Configuration Options Features Resources Contact Us Overview

Ultrafast response time of Control range from 0.1 to 100% of Full Scale Accuracy of ±0.8% of set point Minimal zero and span drift assure long term reproducibility Surface mount interface available for compact gas panel design Embedded web browser for setup and diagnostics See All Features Products Configuration Options The following options are available for CMA10B Mass Flow Controllers & Meters
Ordering Code Example: CMA10B013102RCV1010

Configuration Option

Option Code

Controller CMA10B CMA10B Gas (Per Semi Standard E52-0703) He 001 Ar 004 Air 008 N2 013 O2 015 SF6 110 For other gases, contact MKS Instruments
Flow range is based on gas - see the Selection Table below. Flow Range Full Scale 50 sccm 501 100 sccm 102 200 sccm 202 500 sccm 502 1000 sccm 103 2000 sccm 203 5000 sccm 503 10000 sccm 104 Fittings (compatible with) 4 VCR Male R 0.25 in. Compression S Downmount O-ring Seal C For other options, contact MKS Instruments Connector Dual I/O (Analog 9-Pin/RS485 ASCII) RS-485 Primary R Dual I/O (Analog 9-Pin/RS485 ASCII) Analog Primary C Modbus TCP M PROFINET 9 Seal Materials Viton V Valve/Device Type Normally Closed/Mass Flow Controller (MFC) 1 No Valve/Mass Flow Meter (Same length as MFC) 3 No Valve/Mass Flow Meter (Reduced Length)
Reduced length not available for W-Seal or Downmount O-ring Seal fittings 4 Reserved (future use) Standard Build 0 Firmware RS485/Analog Dual I/O 10 Modbus TCP 10 PROFINET 10  Show All Configuration Options Description CMA10B-MFC 15-14,000 sccm Compact, Fast Response Mass Flow Controller Loading... Quote Loading... c-series-mass-flow-controller - Drawings & CAD Additional CAD file downloads are not available for this product. CAD File Downloads: Loading... Download Close Close Close c-series-mass-flow-controller - Drawings Additional drawings are not available for this product. Close Close Specifications Type Mass Flow Controller Full Scale Flow Range 15-14,000 sccm (N2) Maximum Inlet Pressure 80 psig Normal Operating Pressure Differential 15 to 7000 sccm: 10 to 45 psid (N2)
7001 to 14000: 15 to 45 psid (N2) Proof Pressure 232 psi/16 bar Burst Pressure 1000 psi/70 bar Control Range Digital I/O: 0.1-100% of Full Scale
Analog I/O: 0.2-100% of Full Scale
(typical) Typical Accuracy ±0.8% of set point for 20-100% Full Scale
±0.16% of Full Scale for (with N2 calibration gas) Repeatability ±0.2% of Reading Zero Temperature Coefficient ≤0.005% of Full Scale/°C Span Temperature Coefficient ≤0.06% of Reading/°C Pressure Coefficient Response Time ≤100 ms typical above 10% Full Scale, 50 sccm - 5 slm Full Scale models
≤150 ms typical above 10% Full Scale, 10 slm Full Scale models
(per SEMI Guideline E-17-0600) Warm-up Time ≤1 min Operating Temperature 10-50°C (32-122°F) Storage Temperature 0-60°C (32-140°F) Fitting Type Compatible with:
Swagelok® 4 VCR® male
surface mount (o-ring)
0.25 in. Swagelok compression External Leak Integrity -09 (scc/sec He) Leak Integrity Through Closed Valve (to assure no flow-through, a separate positive shut-off valve is required) Wetted Materials Aluminum, Elgiloy®, 20# Steel, Stainless Steel, Silicon, Silicon Oxide, Silicon Carbide, Viton®, Glob Top Seal Material Viton Valve Position Normally closed Set Point Command Signal 0-5 VDC (0-10 VDC, optional) Power Requirements 24 VDC @ (±10%), Flow Input Output Signal 0-5 VDC (0-10 VDC, optional) Analog I/O Connector 9-pin Type D Weight 0.68 lbs (310 grams) (w/VCR fitting) Compliance CE Features C-Series Communication Options Digital I/O RS485 PROFINET® Modbus Input Power Required 24 VDC @ (±10%), +24 VDC ( +24 VDC ( Connector 9 pin Type D male (power and comm.) 2 x RJ-45 (comm.) male, M8 male, 5 pin (power) 1 x RJ-45 (comm.) male,DC power plug Data Rate Switch/Selection No switch
Set data rate via RS485 MFC: No switch
MFM: N/A N/A Comm. Rate(s) 9.6 Kbps
19.2 Kbps
38.4 Kbps MFC: 100 Mbps
MFM: N/A N/A MAC ID Switches/Addresses Set address over RS485 Station Addresses 0,0 to 9,9 N/A N/A Network Size Up to 32 nodes N/A N/A Visual Indicators LED Power
LED Run (green) LED Maint (amber)
LED BUS Fault (red)
LED Ready (green)
LED Sys Fault (red) LED Module
LED Network Compliance CE CE CE

CMA10B Selection Guide C-Series mass flow controllers and meters are selected based on the gas and range desired.  Use this table to determine the best model for your application:

CMA10B Gas SEMI# Gas Symbol Minimum Full Scale Maximum Full Scale 1 He 23 16000 4 Ar 40 14000 8 Air 15 14000 13 N2 15 14000 15 O2 14 13000 110 SF6 7 4500

C-Series Overview The CMA10B compact design is only 1 inch (25.4 mm) and less than 4.4 inches (111.8 mm) high. It has standard lengths of 4.88 inches (124 mm) for 4 VCR® male and 4.54 inches (113 mm) for 0.25 inch compression seal gas line connections. Downmount versions are also available. A low thermal mass MEMS sensor provides rapid sensing of flow changes with low noise output. The solid state design of the sensor makes it resistant to water condensation, particles, pressure shock and vibration.

Fast response, wide dynamic control range, and 0.8% of set point accuracy make this MFC an excellent choice for flow control in critical process applications where noncorrosive gases are used. Typical uses can be found in mass spectroscopy, vacuum coating, bioreactor as well as many other applications. The CMA10B incorporates a fast-acting solenoid control valve coupled with the flow sensor via the MFC's superior flow signal processing and control algorithm. This results in response times to set point of less than 100 milliseconds.

Resources Manuals   (2 MB, PDF) C-Series Mass Flow Controller Pin-outs (94 kB, PDF) C-Series MFC/MFM Modbus Register Map & Specification (135.9 kB, PDF) Drawings & CADs C-Series Mass Flow Controller/Meter 3D Model Files C-Series Mass Flow Controller Dimensional Drawing (2 MB, PDF) Application Notes Gas Correction Factors for Thermal-based Mass Flow Sample Gas Codes for Mass Flow Controllers/Meters Literature CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Controller (2 MB, PDF) Device Description Files C-Series MFC/MFM PROFINET GSDML File (.XML) (30.5 kB, XML) Software USB Interface Communication for C Series MFC and P Series Pressure Controllers (2.6 MB, ZIP) cma10b-mass-flow-controller Related Products CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Meter CMA50A 14,000-50,000 sccm Compact, Fast Response Mass Flow Controller 946 Vacuum System Controller Related Products CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Meter CMA50A 14,000-50,000 sccm Compact, Fast Response Mass Flow Controller 946 Vacuum System Controller Need help? Contact an Applications Specialist by sending us an email

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